المؤلفون: Chi Thang Nguyen (8496897), Bonwook Gu (9505084), Taehoon Cheon (6657683), Jeongwoo Park (6163205), Mohammad Rizwan Khan (6399956), Soo-Hyun Kim (10655), Bonggeun Shong (1291524), Han-Bo-Ram Lee (1512616)

مصطلحات موضوعية: Biophysics, Biochemistry, Molecular Biology, Inorganic Chemistry, Infectious Diseases, Chemical Sciences not elsewhere classified, Ru, precursor chemical reactivities, DFT-based reaction models, Atomic Layer Modulation, XPS, MC, multicomponent nanofilms, Al precursors, counter reactant, TMA, TEM, H 2 O, transmission electron microscopy, ALM, X-ray photoelectron spectroscopy, steric hindrance effects, exposure

Relation: https://figshare.com/articles/journal_contribution/Atomic_Layer_Modulation_of_Multicomponent_Thin_Films_through_Combination_of_Experimental_and_Theoretical_Approaches/14763469

الاتاحة: https://doi.org/10.1021/acs.chemmater.1c00508.s001