المؤلفون: Calado, Victor, Mathijssen, Simon G. J., van Setten, Eelco, Finders, Jo, Wittebrood, Friso, Bouman, Wim, Bhattacharyya, Kaustuve, op t Root, Willem, McNamara, Elliott, McLaren, Matthew

المساهمون: Burkhardt, Martin, van Lare, Claire

المصدر: Optical and EUV Nanolithography XXXVII

الاتاحة: http://dx.doi.org/10.1117/12.3010835

المؤلفون: op 't Root, Willem, Park, Jungwan, Nam, Youngsun, Kim, Seho, Hwang, Hyunwoo, Kong, Jeong Heung, Yun, Sang-Ho, Kang, Youngseog, Klaassen, Bram, van den Bos, Karel, Hou, Zhe, Soco, Aileen, Cheon, Don, Yim, Jong-Hyuk, Song, Hong-seung, Baek, Mi-Yeon, Calado, Victor

المساهمون: Sendelbach, Matthew J., Schuch, Nivea G.

المصدر: Metrology, Inspection, and Process Control XXXVIII

الاتاحة: http://dx.doi.org/10.1117/12.3010370

المؤلفون: Sendelbach, Matthew J., Schuch, Nivea G., op 't Root, Willem, Park, Jungwan, Nam, Youngsun, Kim, Seho, Hwang, Hyunwoo, Kong, Jeong Heung, Yun, Sang-Ho, Kang, Youngseog, Klaassen, Bram, van den Bos, Karel, Hou, Zhe, Soco, Aileen, Cheon, Don, Yim, Jong-Hyuk, Song, Hong-seung, Baek, Mi-Yeon

المصدر: Proceedings of SPIE; April 2024, Vol. 12955 Issue: 1 p129552Q-129552Q-13, 12825662p

المؤلفون: Burkhardt, Martin, van Lare, Claire, Calado, Victor, Mathijssen, Simon, van Setten, Eelco, Finders, Jo, Wittebrood, Friso, Bouman, Wim, Bhattacharyya, Kaustuve, op 't Root, Willem, McNamara, Elliott, McLaren, Matthew

المصدر: Proceedings of SPIE; April 2024, Vol. 12953 Issue: 1 p1295307-1295307-8

المؤلفون: Eurlings, Mark, Hsu, Stephen D., Hendrickx, Eric, op 't Root, Willem, Laidig, Thomas L., Chiou, Tsann-Bim, Chen, Alek, Chen, Fung, Vandenberghe, Geert, Finders, Jo

المساهمون: Smith, Bruce W.

المصدر: SPIE Proceedings ; Optical Microlithography XVII ; ISSN 0277-786X

الاتاحة: http://dx.doi.org/10.1117/12.535221
http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.535221