المؤلفون: Gudmundsson, Jon Tomas, Lundin, D., Raadu, Michael A., Minea, T., Brenning, Nils

المصدر: 2016 IEEE International Conference on Plasma Science (ICOPS).

مصطلحات موضوعية: Ar-O2, discharge current waveform, poisoned mode, Ar-oxygen discharge, oxygen partial pressure, pulse repetition frequency, nonreactive current waveform, reactive gas flow rate, gas mixtures, ionization region model, discharge composition, gas compression, reactive high power impulse magnetron sputtering discharge

وصف الملف: print

URL الوصول: https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-200422