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1Academic Journal
المؤلفون: Evgenii Barbin, Tamara Nesterenko, Aleksej Koleda, Evgeniy Shesterikov, Ivan Kulinich, Andrey Kokolov, Anton Perin
المصدر: Sensors, Vol 24, Iss 3, p 765 (2024)
مصطلحات موضوعية: microoptoelectromechanical accelerometer, tunneling effect, evanescent coupling, proof mass, waveguides, microoptoelectromechanical sensing element, Chemical technology, TP1-1185
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المؤلفون: Evgenij Barbin, Tamara Nesterenko, Aleksei Koleda, Evgeniy Shesterikov, Ivan Kulinich, Andrey Kokolov, Anton Perin
مصطلحات موضوعية: Photonic and electro-optical devices, sensors and systems (excl. communications), microoptoelectromechanical accelerometer, waveguides, microoptoelectromechanical sensing element, optical measuring transducer, sensitivity threshold, positioning system
Relation: https://figshare.com/articles/dataset/Calculated_and_experimental_data_for_figures/25053299