المؤلفون: Menno POOT

المصدر: Sensors & Transducers, Vol 263, Iss 4, Pp 1-11 (2023)

مصطلحات موضوعية: optomechanics, film stress, aluminum nitride (aln), mems, silicon nitride (sin), bilayer membrane, finite-element simulations (fem), mechanical band structure, Technology (General), T1-995

Relation: https://sensorsportal.com/HTML/DIGEST/december_2023/Vol_263/P_3307.pdf; https://doaj.org/toc/2306-8515; https://doaj.org/toc/1726-5479; https://doaj.org/article/e12d69b6c48943dcbdf45f0d2236790e

الاتاحة: https://doaj.org/article/e12d69b6c48943dcbdf45f0d2236790e

المؤلفون: Yasutaka UCHIDA, Tomoko FUNAYAMA, Eiichi OHKUBO, Yoshiaki KOGURE

المصدر: Sensors & Transducers, Vol 263, Iss 4, Pp 12-20 (2023)

مصطلحات موضوعية: optomechanics, film stress, aluminum nitride (aln), mems, silicon nitride (sin), bilayer membrane, finite-element simulations (fem), mechanical band structure, Technology (General), T1-995

Relation: https://sensorsportal.com/HTML/DIGEST/december_2023/Vol_263/P_3308.pdf; https://doaj.org/toc/2306-8515; https://doaj.org/toc/1726-5479; https://doaj.org/article/8eb762c796c74abd83d69051089161ec

الاتاحة: https://doaj.org/article/8eb762c796c74abd83d69051089161ec