المؤلفون: Justine Lespiaux, Fabien Deprat, Jérémy Vives, Romain Duru, Mehmet Bicer, Alexis Gauthier, Edoardo Brezza, Marc Juhel, Florence Chenevas-Paule, Alain Baron, Alexia Valery, Jean-Michel Hartmann

المصدر: ECS Transactions. 109:217-236

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::13b5d7d3691a997ffba80243d3e32054
https://doi.org/10.1149/10904.0217ecst

المؤلفون: Fabien Deprat, Jérémy Vives, Marc Juhel, Alexia Valery, Justine Lespiaux, Alain Baron, Edoardo Brezza, Alexis Gauthier

المصدر: ECS Transactions. 109:159-169

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::40f8867a1426a73e3c35414a0c11f45d
https://doi.org/10.1149/10904.0159ecst

المؤلفون: Kennet D. R. Hannikainen, fabien deprat, olivier gourhant, Isabelle Berbezier, jean-noel aqua

المصدر: SSRN Electronic Journal.

مصطلحات موضوعية: History, Polymers and Plastics, Business and International Management, Industrial and Manufacturing Engineering

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::62f4fee7fd7ef4c0420662ce6b95dfce
https://doi.org/10.2139/ssrn.4376090

المؤلفون: Mohamed Bouabdellaoui, Monica Bollani, Marco Salvalaglio, Elie Assaf, Luc Favre, Mathieu Abel, Antoine Ronda, Olivier Gourhant, Fabien Deprat, Christophe Duluard, Anne-Flore Mallet, Philippe Vennegues, Jean-Noël Aqua, Isabelle Berbezier

مصطلحات موضوعية: General Physics and Astronomy, Surfaces and Interfaces, General Chemistry, Condensed Matter Physics, Surfaces, Coatings and Films

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e229ce6a7fdca7645c4f8e2160763a7e
https://doi.org/10.2139/ssrn.4343371

المؤلفون: Jérémy Vives, Stephane Verdier, Fabien Deprat, Marvin Frauenrath, Romain Duru, Marc Juhel, Gregory Berthome, Didier Chaussende

المصدر: Journal of Materials Chemistry C.

مصطلحات موضوعية: Materials Chemistry, General Chemistry

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b0f56306ccc2716b78d5d95aebb62d42
https://doi.org/10.1039/d3tc01107k

المؤلفون: Elie Assaf, Isabelle Berbezier, Mohammed Bouabdellaoui, Marco Abbarchi, Antoine Ronda, Damien Valenducq, Fabien Deprat, Olivier Gourhant, Andreas Campos, Luc Favre

المساهمون: Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP), Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS), STMicroelectronics [Crolles] (ST-CROLLES), Centre Pluridisciplinaire de Microscopie Electronique et de Microanalyse (AMU CP2M), Aix Marseille Université (AMU)

المصدر: Applied Surface Science
Applied Surface Science, 2022, 590, pp.153015. ⟨10.1016/j.apsusc.2022.153015⟩

مصطلحات موضوعية: [PHYS]Physics [physics], General Physics and Astronomy, Surfaces and Interfaces, General Chemistry, Condensed Matter Physics, Surfaces, Coatings and Films

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::dd720de64ebdfb8381e8f64738e3ccb9
https://hal-amu.archives-ouvertes.fr/hal-03812512/document

المؤلفون: Justine Lespiaux, Fabien Deprat, Jérémy Vives, Romain Duru, Mehmet Bicer, Alexis Gauthier, Edoardo Brezza, Marc Juhel, Florence Chenevas-Paule, Alain Baron, Alexia Valery, Jean-Michel Hartmann

المصدر: ECS Meeting Abstracts. :1214-1214

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::566061cd16c6ff97fed89b7568dbef56
https://doi.org/10.1149/ma2022-02321214mtgabs

المؤلفون: Jérémy Vives, Fabien Deprat, Didier Dutartre, Justine Lespiaux, Romain Duru, Mehmet Bicer, Nathalie Drogue, Marc Juhel, Didier Chaussende

المصدر: ECS Meeting Abstracts. :1215-1215

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3ff9e918dfc44a6e057e0a4d27f6e750
https://doi.org/10.1149/ma2022-02321215mtgabs

المؤلفون: Sébastien Duguay, Vincent Lu, Edwin Arevalo, F. Hilario, P.L. Julliard, Fabien Deprat, J. Borrel, P. Dumas, Wei Zou, W. Zhao, Didier Blavette

المساهمون: STMicroelectronics [Crolles] (ST-CROLLES), Groupe de physique des matériaux (GPM), Université de Rouen Normandie (UNIROUEN), Normandie Université (NU)-Normandie Université (NU)-Institut national des sciences appliquées Rouen Normandie (INSA Rouen Normandie), Institut National des Sciences Appliquées (INSA)-Normandie Université (NU)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)-Institut de Recherche sur les Matériaux Avancés (IRMA), Université de Caen Normandie (UNICAEN), Normandie Université (NU)-Normandie Université (NU)-École Nationale Supérieure d'Ingénieurs de Caen (ENSICAEN), Normandie Université (NU)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université de Rouen Normandie (UNIROUEN), Normandie Université (NU)-Institut national des sciences appliquées Rouen Normandie (INSA Rouen Normandie), Institut National des Sciences Appliquées (INSA)-Normandie Université (NU)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)-Université de Caen Normandie (UNICAEN), Normandie Université (NU)-École Nationale Supérieure d'Ingénieurs de Caen (ENSICAEN), Normandie Université (NU)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS), Applied Materials Gloucester, Centre National de la Recherche Scientifique (CNRS)-Institut national des sciences appliquées Rouen Normandie (INSA Rouen Normandie), Institut National des Sciences Appliquées (INSA)-Normandie Université (NU)-Institut National des Sciences Appliquées (INSA)-Normandie Université (NU)-Université de Rouen Normandie (UNIROUEN), Normandie Université (NU)

المصدر: Journal of Applied Physics
Journal of Applied Physics, American Institute of Physics, 2021, 129 (19), pp.195706. ⟨10.1063/5.0049782⟩
Journal of Applied Physics, 2021, 129 (19), pp.195706. ⟨10.1063/5.0049782⟩

مصطلحات موضوعية: 010302 applied physics, [PHYS]Physics [physics], Materials science, Silicon, Diffusion barrier, Phosphorus, Analytical chemistry, General Physics and Astronomy, chemistry.chemical_element, 02 engineering and technology, Atom probe, Trapping, 021001 nanoscience & nanotechnology, 01 natural sciences, [SPI.MAT]Engineering Sciences [physics]/Materials, law.invention, chemistry, law, Phase (matter), 0103 physical sciences, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, Carbon, Stoichiometry, ComputingMilieux_MISCELLANEOUS

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cf2dbc6599b68f158bf92f9336823465
https://hal-normandie-univ.archives-ouvertes.fr/hal-03468001

المؤلفون: Damien Valenducq, F. Abbate, Denis Rouchon, Fabien Deprat, Olivier Gourhant, Elisabeth Blanquet, Veronique Guyader

المصدر: 2019 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS).

مصطلحات موضوعية: 010302 applied physics, Materials science, Fabrication, Strain (chemistry), Condensation, Kinetics, Silicon on insulator, 02 engineering and technology, Partial pressure, Surface finish, 021001 nanoscience & nanotechnology, 01 natural sciences, Crystallographic defect, 0103 physical sciences, Composite material, 0210 nano-technology

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::5db2ff0f6d8a2edabbdb73efd50fe522
https://doi.org/10.1109/eurosoi-ulis45800.2019.9041919

المؤلفون: Vincent Lu, L. Clement, Alexis Gauthier, Edwin Arevalo, Pascal Chevalier, Fabien Deprat, Wei Zou, Heloise Tupin, F. Abbate, Didier Dutartre, Sylvain Joblot, J. Borrel

المصدر: 2018 22nd International Conference on Ion Implantation Technology (IIT)

مصطلحات موضوعية: Materials science, business.industry, Economies of agglomeration, Silicon on insulator, 02 engineering and technology, 021001 nanoscience & nanotechnology, Epitaxy, 01 natural sciences, Crystallographic defect, Ion implantation, CMOS, 0103 physical sciences, Optoelectronics, Dewetting, Thin film, 010306 general physics, 0210 nano-technology, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::26f5fa44f55167eedee067fc0a89a211

المؤلفون: Pascal Besson, Maurice Rivoire, Elodie Beche, Laurent Brunet, Maud Vinet, Olivier Rozeau, Catherine Euvrard-Colnat, Ogun Turkyilmaz, Olivier Billoint, Lamine Benaissa, Aurelien Seignard, Bernard Previtali, C. Fenouillet-Beranger, Thomas Signamarcheix, Luca Pasini, Frank Fournel, Fabienne Ponthenier, Fabien Deprat, Fabien Clermidy, Christian Arvet, Perrine Batude

المصدر: ECS Meeting Abstracts. :1745-1745

مصطلحات موضوعية: Materials science, Enabling, Hardware_INTEGRATEDCIRCUITS, Key (cryptography), Systems engineering, Hardware_PERFORMANCEANDRELIABILITY, Direct bonding

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::636bdf7cbcdf1f14b467427b14aa58c5
https://doi.org/10.1149/ma2014-02/34/1745