المؤلفون: GUO Zhongzheng, YAN Wanjun, ZHANG Dianxi, YANG Xiufan, JIANG Xianbang, ZHOU Dantong

المصدر: Cailiao Baohu, Vol 57, Iss 3, Pp 166-174 (2024)

مصطلحات موضوعية: magnetron sputtering, cu-w thin films, structures, mechanical properties, Materials of engineering and construction. Mechanics of materials, TA401-492, Technology

وصف الملف: electronic resource

Relation: http://www.mat-pro.com/fileup/1001-1560/PDF/202403019.pdf; https://doaj.org/toc/1001-1560

URL الوصول: https://doaj.org/article/f45cda093dd149e7ade8ec436a93ffed