يعرض 1 - 20 نتائج من 127 نتيجة بحث عن '"copper metallization"', وقت الاستعلام: 0.71s تنقيح النتائج
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    Academic Journal

    المصدر: Modern Electronic Materials, 10((2)), 85-90, (2024-07-02)

    مصطلحات موضوعية: ITO, copper metallization, solar elements, contact resistivity

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    Academic Journal
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    Academic Journal
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    Academic Journal

    المصدر: Nanomaterials; Volume 12; Issue 10; Pages: 1752

    مصطلحات موضوعية: barrier layers, dewetting, cobalt tungsten, copper metallization

    وصف الملف: application/pdf

    Relation: Nanofabrication and Nanomanufacturing; https://dx.doi.org/10.3390/nano12101752

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    Academic Journal

    المساهمون: Nguyen, Son [IBM Semiconductor Research, Albany, NY (United States)]

    المصدر: Applied Physics Letters; 106; 18

    وصف الملف: Medium: ED; Size: Article No. 181902

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    Conference
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    Academic Journal

    المؤلفون: V. E. Borisenko, L. M. Lynkou

    المصدر: Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki, Vol 0, Iss 2, Pp 5-16 (2019)

    وصف الملف: electronic resource

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    Conference
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    Academic Journal

    المصدر: Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering; Том 24, № 2 (2021); 102-106 ; Известия высших учебных заведений. Материалы электронной техники; Том 24, № 2 (2021); 102-106 ; 2413-6387 ; 1609-3577 ; 10.17073/1609-3577-2021-2

    وصف الملف: application/pdf

    Relation: https://met.misis.ru/jour/article/view/427/404; International Technology Roadmap for Semiconductors (ITRS) Interconnect. 2020. https://irds.ieee.org/editions/2020; Gonella R. Key reliability issues for copper integration in damascene architecture. Microelectronic Engineering. 2001; 55(1-4): 245—255. https://doi.org/10.1016/S0167-9317(00)00454-8; Lloyd J.R., Murray C.E., Ponoth S., Cohen S., Liniger E. The effect of Cu diffusion on the TDDB behavior in a low-k interlevel dielectrics. Microelectronics Reliability. 2006; 46(9–11): 1643—1647. https://doi.org/10.1016/j.microrel.2006.08.003; Chen F., Bravo O., Chanda K., McLaughlin P., Sullivan T., Gill J., Lloyd J., Kontra R., Aitken J. A comprehensive study of low-k SiCOH TDDB phenomena and its reliability lifetime model development. In: Proc. of the Intern. Reliability Physics Symposium. 26-30, March 2006. New York: IEEE; 2006. P. 46—53. https://doi.org/10.1109/RELPHY.2006.251190; Suzumura N., Yamamoto S., Kodama D., Makabe K., Komori J., Murakami E., Maegawa S., Kubota K. A new TDDB degradation model based on Cu ion drift in Cu interconnect dielectrics. In: Proc. of the Intern. Reliability Physics Symposium. 26–30, March 2006. New York: IEEE; 2006. P. 484—489. https://doi.org/10.1109/RELPHY.2006.251266; Tan T.L., Gan C.L., Du A.Y., Cheng C.K. Effect of Ta migration from sidewall barrier on leakage current in Cu/SiOCH low-k dielectrics. Journal of Applied Physics. 2009; 106(4): 043517. https://doi.org/10.1063/1.3202387; Huang X., Sukharev V., Qi Z.-D., Kim T.-Y., Tan S. X.-D. Physics-based full-chip TDDB assessment for BEOL interconnects. In: Proc. of the 53rd Annual Design Automation Conference 2016 – DAC ’16. 05–09, June 2016. Austin, USA: IEEE; 2016. https://doi.org/10.1145/2897937.2898062; Валеев А.С., Красников Г.Я. Технология изготовления внутрикристальных и межкристальных межсоединений современных СБИС (обзор, концепция развития). Микроэлектроника. 2015; 44(3): 180—201. https://doi.org/10.7868/S0544126915030084; Groove A.S. Physics and Technology of Semiconductor Devices. Hoboken, NJ, USA: Wiley, 1967.; Yang L.Y., Zhang D.H., Li C.Y., Liu R., Wee A.T.S., Foo P.D. Characterization of Cu/Ta/ultra low-k porous polymer structures for multilevel interconnects. Thin Solid Films. 2004; 462–463: 182—185. https://doi.org/10.1016/j.tsf.2004.05.071; Kuo Y.-L., Lee H.-H., Lee C., Lin J.-C., Shue S.-L., Liang M.-S., Daniels B.J. Diffusion of copper in titanium zirconium nitride thin films. Electrochemical and Solid-State Letters. 2004; 7(3): C35—C37. https://doi.org/10.1149/1.1644355; https://met.misis.ru/jour/article/view/427

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    Academic Journal

    المصدر: JSAP Annual Meetings Extended Abstracts. 2019, :3825

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