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1Academic Journal
المؤلفون: Kravchenko, Vladimir M., Malyutina-Bronskaya, Victoria V., Kuzmitskaya, Hanna S., Nestsiaronak, Anton V.
المصدر: Modern Electronic Materials, 10((2)), 85-90, (2024-07-02)
مصطلحات موضوعية: ITO, copper metallization, solar elements, contact resistivity
Relation: https://doi.org/10.1016/j.solener.2022.03.065; https://doi.org/10.1108/CW-10-2013-0038; https://doi.org/10.1016/j.egypro.2012.07.050; https://doi.org/10.1007/s13391-019-00134-x; https://doi.org/10.1155/2013/183812; https://doi.org/10.1002/pip.2221; https://doi.org/10.1016/j.solmat.2021.110993; https://doi.org/10.1016/S0026-2714(00)00227-4; https://doi.org/10.3390/ma7021318; https://doi.org/10.1002/pip.3792; https://doi.org/10.4229/28thEUPVSEC2013-2AO.2.1; https://doi.org/10.1016/S0927-0248(02)00049-1; https://doi.org/10.1134/1.1507271; https://doi.org/10.1016/j.egypro.2015.03.292; https://doi.org/10.1088/1361-6463/ab9c6a; https://doi.org/10.1063/1.4937224; https://doi.org/10.1149/1.1860511; https://doi.org/10.1016/j.apsusc.2009.04.001; https://doi.org/10.1007/s10854-020-03941-3; https://doi.org/10.1016/j.solmat.2015.09.033; https://doi.org/10.1109/JPHOTOV.2014.2321663; https://doi.org/10.1063/1.1660931; https://doi.org/10.1016/j.sna.2006.01.023; https://doi.org/10.1364/AO.35.001566; https://doi.org/10.1063/1.1923612; https://doi.org/10.1021/acsami.3c17923; https://doi.org/10.33619/2414-2948/79/48; https://doi.org/10.7567/JJAP.57.08RB13; https://doi.org/10.1007/978-3-540-75997-3_221; https://doi.org/10.3897/j.moem.10.2.129762; oai:zenodo.org:12703348
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2Academic Journal
المؤلفون: Lachowicz Agata, Badel Nicolas, Barrou Alexis, Barth Vincent, Harrison Samuel, Frasson Nicola, Galiazzo Marco, Cohen Natali, Cohen Eyal, Zhao Jun, Paviet-Salomon Bertrand, Ballif Christophe
المصدر: EPJ Photovoltaics, Vol 15, p 11 (2024)
مصطلحات موضوعية: heterojunction solar cells, copper metallization, plating, module stability, pattern transfer printing, electrodeposition, Renewable energy sources, TJ807-830
Relation: https://www.epj-pv.org/articles/epjpv/full_html/2024/01/pv230062/pv230062.html; https://doaj.org/toc/2105-0716; https://doaj.org/article/7e92d6ca08974380ab1d72cf56a3a5aa
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3
المصدر: Processes. 10(4)
مصطلحات موضوعية: copper metallization, electronics fabrication, DFT analysis, fully additive method, polymerization, UV-laser, SBU-CBM process, printed electronics, characterizations, Electrotechnology, Elektroteknik alt Electrical engineering
وصف الملف: electronic
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4Academic Journal
المؤلفون: Orlov, Andrey A., Rezvanov, Askar A.
المصدر: Modern Electronic Materials, 8((3)), 107-111, (2022-10-20)
مصطلحات موضوعية: low-k dielectric, porosity, time dependent dielectric breakdown, copper metallization
Relation: https://doi.org/10.3897/j.moem.8.3.98145.figure6; https://doi.org/10.3897/j.moem.8.3.98145.figure5; https://doi.org/10.3897/j.moem.8.3.98145.figure1; https://doi.org/10.3897/j.moem.8.3.98145.figure2; https://doi.org/10.3897/j.moem.8.3.98145.figure3; https://doi.org/10.3897/j.moem.8.3.98145.figure4; https://doi.org/10.3897/j.moem.8.3.98145; oai:zenodo.org:7519343
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5Academic Journal
المؤلفون: Acharya, S. (Sarthak), Sattar, S. (Shahid), Chouhan, S. S. (Shailesh Singh), Delsing, J. (Jerker)
مصطلحات موضوعية: DFT analysis, SBU-CBM process, UV-laser, characterizations, copper metallization, electronics fabrication, fully additive method, polymerization, printed electronics
وصف الملف: application/pdf
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6Academic Journal
المؤلفون: Bruno M. C. Oliveira, Ruben F. Santos, Ana P. Piedade, Paulo J. Ferreira, Manuel F. Vieira
المصدر: Nanomaterials; Volume 12; Issue 10; Pages: 1752
مصطلحات موضوعية: barrier layers, dewetting, cobalt tungsten, copper metallization
وصف الملف: application/pdf
Relation: Nanofabrication and Nanomanufacturing; https://dx.doi.org/10.3390/nano12101752
الاتاحة: https://doi.org/10.3390/nano12101752
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7Academic Journal
المساهمون: Nguyen, Son [IBM Semiconductor Research, Albany, NY (United States)]
المصدر: Applied Physics Letters; 106; 18
وصف الملف: Medium: ED; Size: Article No. 181902
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8Conference
المؤلفون: Agata Lachowicz
مصطلحات موضوعية: Ameliz project copper metallization heterojunction solar cells
Relation: https://doi.org/10.5281/zenodo.6563902; https://doi.org/10.5281/zenodo.6563903; oai:zenodo.org:6563903
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9Conference
المؤلفون: Agata Lachowicz
مصطلحات موضوعية: Ameliz project copper metallization heterojunction solar cells
Relation: https://doi.org/10.5281/zenodo.6563920; https://doi.org/10.5281/zenodo.6563921; oai:zenodo.org:6563921
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10Conference
المؤلفون: Agata Lachowicz
مصطلحات موضوعية: Ameliz project copper metallization solar cells
Relation: https://doi.org/10.5281/zenodo.6563874; https://doi.org/10.5281/zenodo.6563875; oai:zenodo.org:6563875
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11Academic Journal
المؤلفون: V. E. Borisenko, L. M. Lynkou
المصدر: Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki, Vol 0, Iss 2, Pp 5-16 (2019)
مصطلحات موضوعية: copper metallization, micro-electro-mechanical system, nanoelectronics, solid state physics, Electronics, TK7800-8360
وصف الملف: electronic resource
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12Conference
المؤلفون: Lachowicz, Agata
مصطلحات موضوعية: heterojunction AZO copper metallization
Relation: https://doi.org/10.5281/zenodo.7158068; https://doi.org/10.5281/zenodo.7158069; oai:zenodo.org:7158069
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13Academic Journal
المؤلفون: A. A. Orlov, A. A. Rezvanov, А. А. Орлов, А. А. Резванов
المصدر: Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering; Том 24, № 2 (2021); 102-106 ; Известия высших учебных заведений. Материалы электронной техники; Том 24, № 2 (2021); 102-106 ; 2413-6387 ; 1609-3577 ; 10.17073/1609-3577-2021-2
مصطلحات موضوعية: медная металлизация, porosity, time dependent dielectric breakdown, copper metallization, пористость, временной пробой диэлектрика
وصف الملف: application/pdf
Relation: https://met.misis.ru/jour/article/view/427/404; International Technology Roadmap for Semiconductors (ITRS) Interconnect. 2020. https://irds.ieee.org/editions/2020; Gonella R. Key reliability issues for copper integration in damascene architecture. Microelectronic Engineering. 2001; 55(1-4): 245—255. https://doi.org/10.1016/S0167-9317(00)00454-8; Lloyd J.R., Murray C.E., Ponoth S., Cohen S., Liniger E. The effect of Cu diffusion on the TDDB behavior in a low-k interlevel dielectrics. Microelectronics Reliability. 2006; 46(9–11): 1643—1647. https://doi.org/10.1016/j.microrel.2006.08.003; Chen F., Bravo O., Chanda K., McLaughlin P., Sullivan T., Gill J., Lloyd J., Kontra R., Aitken J. A comprehensive study of low-k SiCOH TDDB phenomena and its reliability lifetime model development. In: Proc. of the Intern. Reliability Physics Symposium. 26-30, March 2006. New York: IEEE; 2006. P. 46—53. https://doi.org/10.1109/RELPHY.2006.251190; Suzumura N., Yamamoto S., Kodama D., Makabe K., Komori J., Murakami E., Maegawa S., Kubota K. A new TDDB degradation model based on Cu ion drift in Cu interconnect dielectrics. In: Proc. of the Intern. Reliability Physics Symposium. 26–30, March 2006. New York: IEEE; 2006. P. 484—489. https://doi.org/10.1109/RELPHY.2006.251266; Tan T.L., Gan C.L., Du A.Y., Cheng C.K. Effect of Ta migration from sidewall barrier on leakage current in Cu/SiOCH low-k dielectrics. Journal of Applied Physics. 2009; 106(4): 043517. https://doi.org/10.1063/1.3202387; Huang X., Sukharev V., Qi Z.-D., Kim T.-Y., Tan S. X.-D. Physics-based full-chip TDDB assessment for BEOL interconnects. In: Proc. of the 53rd Annual Design Automation Conference 2016 – DAC ’16. 05–09, June 2016. Austin, USA: IEEE; 2016. https://doi.org/10.1145/2897937.2898062; Валеев А.С., Красников Г.Я. Технология изготовления внутрикристальных и межкристальных межсоединений современных СБИС (обзор, концепция развития). Микроэлектроника. 2015; 44(3): 180—201. https://doi.org/10.7868/S0544126915030084; Groove A.S. Physics and Technology of Semiconductor Devices. Hoboken, NJ, USA: Wiley, 1967.; Yang L.Y., Zhang D.H., Li C.Y., Liu R., Wee A.T.S., Foo P.D. Characterization of Cu/Ta/ultra low-k porous polymer structures for multilevel interconnects. Thin Solid Films. 2004; 462–463: 182—185. https://doi.org/10.1016/j.tsf.2004.05.071; Kuo Y.-L., Lee H.-H., Lee C., Lin J.-C., Shue S.-L., Liang M.-S., Daniels B.J. Diffusion of copper in titanium zirconium nitride thin films. Electrochemical and Solid-State Letters. 2004; 7(3): C35—C37. https://doi.org/10.1149/1.1644355; https://met.misis.ru/jour/article/view/427
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14Academic Journal
المؤلفون: Y. C. Lin, S. H. Chen, P. H. Lee, K. H. Lai, T. J. Huang, Edward Y. Chang, Heng-Tung Hsu
المصدر: Micromachines; Volume 11; Issue 2; Pages: 222
مصطلحات موضوعية: high-electron-mobility transistors, copper metallization, millimeter wave
وصف الملف: application/pdf
Relation: D1: Semiconductor Devices; https://dx.doi.org/10.3390/mi11020222
الاتاحة: https://doi.org/10.3390/mi11020222
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15
المؤلفون: Andrey A. Orlov, Askar A. Rezvanov
مصطلحات موضوعية: porosity, General Medicine, time dependent dielectric breakdown, low-k dielectric, copper metallization
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16
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17Academic Journal
المؤلفون: Kazuyoshi Ueno, Ploybussara Gomasang
المصدر: JSAP Annual Meetings Extended Abstracts. 2019, :3825
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18
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19
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20
المصدر: Indian Journal of Engineering and Materials Sciences (IJEMS); Vol 28, No 2 (2021): IJEMS- April-2021; 174-181
مصطلحات موضوعية: Mechanical Engineering, Acrylonitrile-butadiene-styrene (ABS), Fused deposition modelling (FDM), Copper metallization
وصف الملف: application/pdf
Relation: http://op.niscair.res.in/index.php/IJEMS/article/download/40106/465524596; http://op.niscair.res.in/index.php/IJEMS/article/download/40106/465524597; http://op.niscair.res.in/index.php/IJEMS/article/download/40106/465524598; http://op.niscair.res.in/index.php/IJEMS/article/view/40106