المؤلفون: Mikhail Piskarev, Elena Skryleva, Alla Gilman, Boris Senatulin, Alexander Zinoviev, Daria Syrtsova, Vladimir Teplyakov, Alexander Kuznetsov

المصدر: Coatings; Volume 11; Issue 11; Pages: 1317

مصطلحات موضوعية: poly(vinyltrimethylsilane) film, direct current discharge modification, X-ray photoelectron spectroscopy, precision etching, argon gas cluster ion beams (GCIB), depth profile analysis

وصف الملف: application/pdf

Relation: Functional Polymer Coatings and Films; https://dx.doi.org/10.3390/coatings11111317

الاتاحة: https://doi.org/10.3390/coatings11111317

المؤلفون: B. R. Senatulin, A. B. Gil’man, Alexander Zinoviev, Vladimir Teplyakov, M. S. Piskarev, D. A. Syrtsova, Alexander Kuznetsov, Elena A. Skryleva

المصدر: Coatings, Vol 11, Iss 1317, p 1317 (2021)
Coatings
Volume 11
Issue 11

مصطلحات موضوعية: X-ray photoelectron spectroscopy, Materials science, Analytical chemistry, direct current discharge modification, chemistry.chemical_element, Surfaces and Interfaces, Plasma, Engineering (General). Civil engineering (General), Surfaces, Coatings and Films, chemistry, Etching (microfabrication), Materials Chemistry, precision etching, Limiting oxygen concentration, Direct-current discharge, Gas separation, poly(vinyltrimethylsilane) film, depth profile analysis, TA1-2040, argon gas cluster ion beams (GCIB), Layer (electronics), Carbon

وصف الملف: application/pdf

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::939150d772ed6b05baec68affcbd89a1
https://www.mdpi.com/2079-6412/11/11/1317