المؤلفون: A. Joi, A. Lesniewska, D. Dictus, K. C. Tso, K. Venkatraman, Y. Dordi, K. Croes, Z. Tokei, S. K. Yadav, P. W. Wu

المصدر: Journal of Applied Physics. 132:175704

مصطلحات موضوعية: General Physics and Astronomy

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::240eb0ac0741932790ecf5fa267aa8ed
https://doi.org/10.1063/5.0108688

المؤلفون: V. Vega-Gonzalez, J. Bekaert, E. Kesters, Q. T. Le, C. Lorant, O. Varela P., L. Teugels, N. Heylen, Z. El-Mekki, M. van der Veen, T. Webers, C. J. Wilson, H. Vats, L. Rynders, M. Cupak, J. Uk-Lee, Y. Drissi, L. Halipre, A.-L. Charley, P. Verdonck, T. Witters, S. V. Gompel, B. Briggs, Y. Kimura, N. Jourdan, I. Ciofi, A. Gupta, A. Contino, G. Boccardi, S. Lariviere, L. Dupas, B. De-Wachter, E. Vancoille, S. Decoster, F. Lazzarino, M Ercken, P. Debacker, R. Kim, D. Trivkovic, K. Croes, P. Leray, L. Dillemans, Y.-F. Chen, Z. Tokei, J. Versluijs, A. Lesniewska, S. Paolillo, R. Baert, H. Puliyalil

المصدر: 2019 IEEE International Electron Devices Meeting (IEDM).

مصطلحات موضوعية: 010302 applied physics, Chamfer, Materials science, business.industry, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Electromigration, Modulation, 0103 physical sciences, Process integration, Optoelectronics, Node (circuits), Static random-access memory, Place and route, 0210 nano-technology, business, Block (data storage)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::7eecb12b8a386042eac7e3255fe54876
https://doi.org/10.1109/iedm19573.2019.8993538

المؤلفون: L. Kljucar, J. Mitard, N. Rassoul, H. Dekkers, S. Steudel, J.I.delAgua Borniquel, B.De Wachter, L. Teugels, D. Tsvetanova, K. Devriendt, I. Grisin, G. Boccardi, H. Hody, M. Nag, L.Di Piazza, C.J. Wilson, G.S. Kar, Z. Tokei, J. Ramalingam, Y. Cao, D.L. Diehl

المصدر: Extended Abstracts of the 2019 International Conference on Solid State Devices and Materials.

مصطلحات موضوعية: Scheme (programming language), Materials science, Electronic engineering, computer, computer.programming_language

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a0732db15c7eb22a87eb8c1876e68cdd
https://doi.org/10.7567/ssdm.2019.g-1-02

المؤلفون: B. Briggs, S. Guissi, C.J. Wilson, J. Ryckaert, S. Paolillo, K. Vandersmissen, J. Versluijs, C. Lorant, N. Heylen, J. Boemmels, Z. Tokei, Y. Sherazi, P. Weckx, L. Kljucar, M.VanDer Veen, G. Boccardi, V. DeHeyn, A. Gupta, J. Ervin, M. Kamon

المصدر: Extended Abstracts of the 2018 International Conference on Solid State Devices and Materials.

مصطلحات موضوعية: Materials science, CMOS, Engineering physics, Scaling

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::01ce6d5919932daabf5e3aa91acb3ee1
https://doi.org/10.7567/ssdm.2018.g-3-02

المؤلفون: Z. Tokei

المصدر: Extended Abstracts of the 2018 International Conference on Solid State Devices and Materials.

مصطلحات موضوعية: Materials science, Engineering physics, Conductor

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::fd6fbcf258cac9028f524a58c048b07a
https://doi.org/10.7567/ssdm.2018.g-6-01

المؤلفون: Jan Genoe, P. Raghavan, Z. Tokei, F. Catthoor, Soeren Steudel

Relation: https://zenodo.org/communities/eu; https://doi.org/10.5281/zenodo.3364520; https://doi.org/10.5281/zenodo.3364521; oai:zenodo.org:3364521

الاتاحة: https://doi.org/10.5281/zenodo.3364521

المؤلفون: A Das, T Kokubo, Y Furukawa, H Struyf, I Vos, B Sijmus, F Iacopi, J Van. Aelst, Q.T Le, L Carbonell, S Brongersma, M Maenhoudt, Z Tokei, I Vervoort, E Sleeckx, M Stucchi, M Schaekers, W Boullart, E Rosseel, M Van Hove, S Vanhaelemeersch, A Shiota, K Maex

المصدر: Microelectronic Engineering. 64:25-33

مصطلحات موضوعية: Permittivity, Materials science, business.industry, Copper interconnect, Low-k dielectric, Dielectric, Integrated circuit, Condensed Matter Physics, Capacitance, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, Material selection, law, Chemical-mechanical planarization, Optoelectronics, Electrical and Electronic Engineering, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::418d616414353ade522e569289c856b9
https://doi.org/10.1016/s0167-9317(02)00768-2

المؤلفون: A.M. Urbanowicz, A. Humbert, G. Mannaert, Z. Tokei, Mikhail R. Baklanov

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::1ccec6eedb64bbf44d72772e7764cda4
https://doi.org/10.4028/3-908451-46-9.317

المؤلفون: A. M. Urbanowicz, A. Humbert, G. Mannaert, Z. Tokei

المساهمون: The Pennsylvania State University CiteSeerX Archives

المصدر: http://www.scientific.net/SSP.134.317.pdf.

مصطلحات موضوعية: plasma damage, cleaning plasmas, low-k dielectrics, bias potential Introduction

وصف الملف: application/pdf

Relation: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.697.961; http://www.scientific.net/SSP.134.317.pdf

الاتاحة: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.697.961
http://www.scientific.net/SSP.134.317.pdf

المؤلفون: A. M. Urbanowicz, A. Humbert, G. Mannaert, Z. Tokei, Baklanov A

المساهمون: The Pennsylvania State University CiteSeerX Archives

المصدر: http://www.scientific.net/SSP.134.317.pdf.

مصطلحات موضوعية: plasma damage, cleaning plasmas, low-k dielectrics, bias potential Introduction

وصف الملف: application/pdf

Relation: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.429.7312; http://www.scientific.net/SSP.134.317.pdf

الاتاحة: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.429.7312
http://www.scientific.net/SSP.134.317.pdf