المؤلفون: Monja Kaiser, F. Bakker, Ypr Yann Lamy, Wfa Besling, Hj Harry Wondergem, R. Forti, Eva Tois, Fred Roozeboom, Kb Kochupurackal Jinesh

المساهمون: Plasma & Materials Processing

المصدر: Journal of Materials Research, 25(8), 1629-1635. Materials Research Society

مصطلحات موضوعية: Materials science, Mechanical Engineering, Oxide, Analytical chemistry, chemistry.chemical_element, Dielectric, Condensed Matter Physics, Erbium, chemistry.chemical_compound, Atomic layer deposition, chemistry, Mechanics of Materials, Phase (matter), Mixed oxide, General Materials Science, Thin film, Stoichiometry

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::07cfadfe4d9445f9ba67eca5c7f66085
https://research.tue.nl/en/publications/1f2a8664-c611-4821-9215-1e293fe3c536