المؤلفون: Yong Zhen Jiao, Hai Bin Li, Ting Yi Dong, Jia Lin Sun, He Long Hu, Bao Guo Lv, Wen Jun Yu

المصدر: Materials Science Forum. 944:1234-1239

مصطلحات موضوعية: Materials science, Silicon oxynitride, Silicon, business.industry, Mechanical Engineering, chemistry.chemical_element, Reuse, Condensed Matter Physics, chemistry.chemical_compound, chemistry, Silicon nitride, Mechanics of Materials, Slurry, General Materials Science, Process engineering, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2c99ca2101241ba38cd8184cd6dc43b3
https://doi.org/10.4028/www.scientific.net/msf.944.1234