المؤلفون: Yonemaru, Naoto, Matsui, Kazuaki, Yoshida, Itaru, Kojima, Yosuke, Yamana, Mitsuharu

المساهمون: Kojima, Yosuke

المصدر: Photomask Japan 2022: XXVIII Symposium on Photomask and Next-Generation Lithography Mask Technology

الاتاحة: http://dx.doi.org/10.1117/12.2640377

المؤلفون: Matsui, Kazuaki, Yonemaru, Naoto, Kojima, Yosuke, Nagatomo, Tatsuya, Yamana, Mitsuharu

المساهمون: Ando, Akihiko

المصدر: Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology

الاتاحة: http://dx.doi.org/10.1117/12.2601771

المؤلفون: Yonemaru, Naoto, Matsui, Kazuaki, Kojima, Yosuke, Nagatomo, Tatsuya, Yamana, Mitsuharu

المساهمون: Renwick, Stephen P., Preil, Moshe E.

المصدر: Photomask Technology 2020

الاتاحة: http://dx.doi.org/10.1117/12.2572021

المؤلفون: Yonemaru, Naoto, Matsui, Kazuaki, Kojima, Yosuke, Nagatomo, Tatsuya, Yamana, Mitsuharu

المصدر: Journal of Micro/Nanopatterning, Materials, and Metrology ; volume 20, issue 01 ; ISSN 2708-8340

الاتاحة: http://dx.doi.org/10.1117/1.jmm.20.1.014401
https://www.spiedigitallibrary.org/journalArticle/Download?urlId=10.1117%2F1.JMM.20.1.014401

المؤلفون: Ando, Akihiko, Matsui, Kazuaki, Yonemaru, Naoto, Kojima, Yosuke, Nagatomo, Tatsuya, Yamana, Mitsuharu

المصدر: Proceedings of SPIE; August 2021, Vol. 11908 Issue: 1 p119080A-119080A-13, 11788934p

المؤلفون: Preil, Moshe E., Renwick, Stephen P., Yonemaru, Naoto, Matsui, Kazuaki, Kojima, Yosuke, Nagatomo, Tatsuya, Yamana, Mitsuharu

المصدر: Proceedings of SPIE; October 2020, Vol. 11518 Issue: 1 p115180B-115180B-9, 1036630p