المؤلفون: Adriaan J. M. Mackus, Erik Heijdra, Wouter J. H. van Gennip, Tahsin Faraz, Wilhelmus M. M. Kessels, Marcel A. Verheijen, Yuri G. P. Verstappen, Javier Escandon Lopez, Nicholas J. Chittock

المساهمون: Plasma & Materials Processing, Applied Physics and Science Education, Selective atomic-scale processing for nanoelectronics, Atomic scale processing, Processing of low-dimensional nanomaterials, EIRES

المصدر: Journal of Applied Physics, 128(21):213301. American Institute of Physics

مصطلحات موضوعية: 010302 applied physics, Materials science, Plasma etching, business.industry, Physics::Instrumentation and Detectors, General Physics and Astronomy, Biasing, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Ion, Computer Science::Other, Sputtering, Etching (microfabrication), Physics::Plasma Physics, 0103 physical sciences, Remote plasma, Optoelectronics, Waveform, Thin film, 0210 nano-technology, business

وصف الملف: application/pdf

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e96a8c1f129832cb6fcd25b4bbdfe1ea
https://doi.org/10.1063/5.0028033

المؤلفون: Luc van Ravenstein, Rob van der Linde, M.J. Krupers, Robert D. van de Grampel, Hans Niemantsverdriet, Weihua Ming, Wouter J. H. van Gennip

المساهمون: Materials and Interface Chemistry

المصدر: Polymer Bulletin, 47(3-4), 321-328. Springer

مصطلحات موضوعية: chemistry.chemical_classification, Materials science, Polymers and Plastics, Double bond, Chemical modification, chemistry.chemical_element, General Chemistry, Condensed Matter Physics, Oligomer, Surface energy, chemistry.chemical_compound, X-ray photoelectron spectroscopy, chemistry, Polymer chemistry, Materials Chemistry, Fluorine, Nanometre, Photoinitiator

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cd543ab5c19aad9b56ba5308f8a01a3e
https://doi.org/10.1007/s289-001-8188-7

المؤلفون: Ralf Linke, J.W. Niemantsverdriet, Marco J. P. Hopstaken, Wouter J. H. van Gennip

المصدر: ChemInform. 34

مصطلحات موضوعية: Chemistry, Analytical chemistry, General Medicine, Mass spectrometry, Catalysis

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e649650c31b957e2449829c7cc1b93af
https://doi.org/10.1002/chin.200307279