-
1Academic Journal
المؤلفون: Speulmanns, Jan, Bönhardt, Sascha, Weinreich, Wenke, Adelhelm, Philipp
المساهمون: Bundesministerium für Wirtschaft und Klimaschutz
المصدر: Small ; ISSN 1613-6810 1613-6829
-
2Academic Journal
المؤلفون: Lederer, Maximilian, Mart, C., Kämpfe, Thomas, Lehninger, David, Seidel, Konrad, Czernohorsky, Malte, Weinreich, Wenke, Volkmann, B., Eng, L.M.
Relation: Applied Physics Letters; https://publica.fraunhofer.de/handle/publica/464035
-
3Academic Journal
المؤلفون: Speulmanns, Jan, Bönhardt, Sascha, Weinreich, Wenke, Adelhelm, Philipp
المصدر: Small; 10/17/2024, Vol. 20 Issue 42, p1-14, 14p
-
4Academic Journal
المؤلفون: Schwinge, Caroline, Kühnel, Kati, Emara, Jennifer, Roy, Lisa, Biedermann, Kati, Weinreich, Wenke, Kolodinski, Sabine, Wiatr, Maciej, Gerlach, Gerald, Wagner-Reetz, Maik
المساهمون: Bundesministerium für Wirtschaft und Energie
المصدر: Applied Physics Letters ; volume 120, issue 3 ; ISSN 0003-6951 1077-3118
-
5Academic Journal
المساهمون: Fraunhofer-Gesellschaft
المصدر: Small ; volume 17, issue 34 ; ISSN 1613-6810 1613-6829
-
6Academic Journal
المؤلفون: Mart, Clemens, Kohlenbach, Nico-Dominik, Kühnel, Kati, Eßlinger, Sophia, Czernohorsky, Malte, Ali, Tarek, Weinreich, Wenke, Eng, Lukas M.
المصدر: physica status solidi (RRL) – Rapid Research Letters ; volume 15, issue 5 ; ISSN 1862-6254 1862-6270
-
7Academic Journal
المؤلفون: M. Kia, Alireza, Speulmanns, Jan, Bönhardt, Sascha, Emara, Jennifer, Kühnel, Kati, Haufe, Nora, Weinreich, Wenke
المصدر: Applied Surface Science ; volume 564, page 150457 ; ISSN 0169-4332
-
8Academic Journal
المؤلفون: Mart, Clemens, Kämpfe, Thomas, Kühnel, Kati, Czernohorsky, Malte, Kolodinski, Sabine, Wiatr, Maciej, Weinreich, Wenke, Eng, Lukas M.
المساهمون: Bundesministerium für Wirtschaft und Energie, Freistaat Sachsen
المصدر: APL Materials ; volume 9, issue 5 ; ISSN 2166-532X
-
9
المؤلفون: Speulmanns, Jan, Bönhardt, Sascha, Weinreich, Wenke, Adelhelm, Philipp
-
10Academic Journal
المؤلفون: Mart, Clemens, Kämpfe, Thomas, Hoffmann, Raik, Eßlinger, Sophia, Kirbach, Sven, Kühnel, Kati, Czernohorsky, Malte, Eng, Lukas M., Weinreich, Wenke
المساهمون: Sächsische Aufbaubank
المصدر: Advanced Electronic Materials ; volume 6, issue 3 ; ISSN 2199-160X 2199-160X
-
11Academic Journal
المساهمون: Fraunhofer-Gesellschaft
المصدر: ACS Applied Materials & Interfaces ; volume 12, issue 35, page 39252-39260 ; ISSN 1944-8244 1944-8252
-
12Academic Journal
المؤلفون: Kia, Alireza M., Haufe, Nora, Esmaeili, Sajjad, Mart, Clemens, Utriainen, Mikko, Puurunen, Riikka L., Weinreich, Wenke
المصدر: Kia , A M , Haufe , N , Esmaeili , S , Mart , C , Utriainen , M , Puurunen , R L & Weinreich , W 2019 , ' ToF-SIMS 3d analysis of thin films deposited in high aspect ratio structures via atomic layer deposition and chemical vapor deposition ' , Nanomaterials , vol. 9 , no. 7 , 1035 . https://doi.org/10.3390/nano9071035
مصطلحات موضوعية: Compositional depth profiling, High aspect ratio (HAR) structures, Lateral high aspect ratio (LHAR), Silicon doped hafnium oxide (HSO) ALD deposition, ToF-SIMS 3D imaging, ToF-SIMS analysis, OtaNano
-
13Academic Journal
المصدر: Kia , A M , Weinreich , W , Utriainen , M , Puurunen , R L & Haufe , N 2019 , Dopant Concentration Analysis of ALD Thin Films in 3D Structures by ToF-SIMS . in ALD 2019 Technical Program & Abstracts . American Vacuum Society (AVS) , pp. 61-61 , 19th International Conference on Atomic Layer Deposition, ALD 2019 , Washington , Washington , United States , 21/07/19 . < https://www.pathlms.com/avstechnicallibrary/events/1550/slide_presentations/138429 >
مصطلحات موضوعية: OtaNano
-
14Academic Journal
المؤلفون: Kia, Alireza M., Bönhardt, Sascha, Zybell, Sabine, Kühnel, Kati, Haufe, Nora, Weinreich, Wenke
المساهمون: Sächsische Aufbaubank
المصدر: physica status solidi (a) ; volume 217, issue 13 ; ISSN 1862-6300 1862-6319
-
15Conference
المؤلفون: Weinreich, Wenke, Lederer, Maximilian, Czernohorsky, Malte
مصطلحات موضوعية: energy harvesting, energy storage, ferroelectric antiferroelectric HfO 2, infrared sensor, piezoelectricity, pyro-electricity
Relation: International Conference on IC Design and Technology 2022; #PLACEHOLDER_PARENT_METADATA_VALUE#; IEEE International Conference on IC Design and Technology, ICICDT 2022; https://publica.fraunhofer.de/handle/publica/447966
-
16Conference
المؤلفون: Kia, Alireza, M., Mart, Clemens, Haufe, Nora, Utriainen, Mikko, Puurunen, Riikka L., Weinreich, Wenke
المصدر: Kia , A M , Mart , C , Haufe , N , Utriainen , M , Puurunen , R L & Weinreich , W 2019 , ' Depth spectroscopy analysis of La-doped HfO2 ALD thin films in 3D structures by HAXPES and ToF-SIMS ' , 18th European Conference on Applications of Surface and Interface Analysis (ECASIA) , Dresden , Germany , 15/09/19 - 20/09/19 .
مصطلحات موضوعية: La-doped HfO2, ALD, ToF-SIMS, high aspect ratio structures, hard-XPS, OtaNano
-
17Conference
Time: 621
وصف الملف: application/pdf
Relation: Fachtagung "Vakuum & Plasma" 2019; https://publica.fraunhofer.de/handle/publica/408865
-
18Conference
المؤلفون: Mart, Clemens, Kämpfe, Thomas, Müller, Johannes, Pätzold, Björn, Rudolph, Matthias, Czernohorsky, Malte, Weinreich, Wenke
Time: 621
وصف الملف: application/pdf
Relation: International Symposium on Applications of Ferroelectrics (ISAF) 2019; https://publica.fraunhofer.de/handle/publica/408847
-
19Academic Journal
المؤلفون: Mukundan, Vineetha, Consiglio, Steven, Triyoso, Dina H., Tapily, Kandabara, Schujman, Sandra, Mart, Clemens, Kämpfe, Thomas, Weinreich, Wenke, Jordan-Sweet, Jean, Clark, Robert D., Leusink, Gert J., Diebold, Alain C.
المصدر: Applied Physics Letters ; volume 117, issue 26 ; ISSN 0003-6951 1077-3118
-
20Conference
المؤلفون: Utriainen, Mikko, Puurunen, Riikka L., Kia, Alireza, M., Esmaeli, Sajjad, Mart, Clemens, Haufe, Nora, Weinreich, Wenke
المصدر: Utriainen , M , Puurunen , R L , Kia , A M , Esmaeli , S , Mart , C , Haufe , N & Weinreich , W 2018 , ' 3D Analysis of Thin Layers by ToF-SIMS ' , 6th Dresden Nanoanalysis Symposium: Materials challenges for automotive industry - Micro- and nanoscale characterization , Dresden , Germany , 31/01/19 - 31/01/19 .