المؤلفون: Tee Lin, Omid Ali Zargar, Che-Yu Lin, Ting-Jun Lai, Yang-Cheng Shih, Shih-Cheng Hu, Graham Leggett

المصدر: International Journal of Thermofluids, Vol 16, Iss , Pp 100223- (2022)

مصطلحات موضوعية: Smoke flow visualization, Particle image velocimetry (PIV), Flow isolation device (FID), Stocker room, Cleanroom, Wafer masks, Heat, QC251-338.5

وصف الملف: electronic resource

Relation: http://www.sciencedirect.com/science/article/pii/S2666202722000866; https://doaj.org/toc/2666-2027

URL الوصول: https://doaj.org/article/77b66e08640349ba896e820af9943662