المؤلفون: Yu. B. Vasiliev, N. A. Verezub, M. V. Mezhenniy, V. S. Prosolovitch, A. I. Prostomolotov, V. Ya. Reznik, Ю. Б. Васильев, Н. А. Верезуб, М. В. Меженный, В. С. Просолович, А. И. Простомолотов, В. Я. Резник

المصدر: Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering; № 2 (2012); 43-50 ; Известия высших учебных заведений. Материалы электронной техники; № 2 (2012); 43-50 ; 2413-6387 ; 1609-3577 ; 10.17073/1609-3577-2012-2

مصطلحات موضوعية: межузельный атом, microdefect, mathematical modeling, getter, vacancy, interstitial atom, микродефект, математическое моделирование, геттер, вакансия

وصف الملف: application/pdf

Relation: https://met.misis.ru/jour/article/view/111/104; Falster, R. Rapid thermal processing and control of oxygen precipitation behavior in silicon wafers / R. Falster, V. V. Voronkov // Mater. Sci. Forum. − 2008. − V. 573—574. − P. 45—60.; Мильвидский, М. Г. Современное состояние технологии полупроводникового кремния / М. Г. Мильвидский / Материаловедение. − 2006. − № 11. − С. 15—26.; Pat. USA N 6250914 / H. Katsumata, H. Ito, H. Takahashi, T. Ohashi, S. Tobashi, K. Iwata; 2000.; Pat. USA N 6032724 / M. Hatta; 1997.; Pat. USA N 5791895 / Н.−S. Kyung, W.−S. Choi, J.−H. Shin; 1996.; Pat. USA N 6002109 / K. E. Johnsgard, B. S.Mattson, J. McDiarmid; 1995.; Fisher, A. Slip−free processing of 300 mm silicon batch wafers / A. Fisher, G. Richter, W. Kurner, P. Kucher // J. Appl. Phys. − 2000. − V. 87. − P. 1543; Kulkarni, M. S. Dynamics of point defects and formation of microdefects in Czochralski crystal growth: modeling, simulation and experiments / M. S. Kulkarni, V. Voronkov, R. Falster // Electrochem. Soc. Proc. − 1998. − V. 98−1. − P. 468.; Prostomolotov, A. Thermal optimization of Cz bulk growth and wafer annealing for crystalline dislocation−free silicon / A. Prostomolotov, N. Verezub, M. Mezhennyi, V. Resnik // J. Cryst. Growth. − 2011. − V. 318, N 1. − P. 187—192.; https://met.misis.ru/jour/article/view/111

الاتاحة: https://met.misis.ru/jour/article/view/111
https://doi.org/10.17073/1609-3577-2012-2-43-50

المؤلفون: N. A. Verezub, V. Ya. Reznik, Yu. B. Vasil’ev, M. V. Mezhennyi, V. S. Prosolovich, A. I. Prostomolotov

المصدر: Russian Microelectronics. 42:467-476

مصطلحات موضوعية: Materials science, Silicon, chemistry.chemical_element, Thermal treatment, Condensed Matter Physics, Electronic, Optical and Magnetic Materials, law.invention, chemistry, Optical microscope, Transmission electron microscopy, Getter, law, Vacancy defect, Materials Chemistry, Wafer, Electrical and Electronic Engineering, Composite material, Single crystal

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8284e0fe47414a91bd4bfa38c16f24fb
https://doi.org/10.1134/s1063739713080155

المؤلفون: V. Ya. Reznik, M. V. Mezhennyi, M. G. Mil’vidskii

المصدر: Russian Microelectronics. 40:553-558

مصطلحات موضوعية: Argon, Materials science, business.industry, Doping, chemistry.chemical_element, Condensed Matter Physics, Electronic, Optical and Magnetic Materials, law.invention, chemistry, Optical microscope, Getter, Electrical resistivity and conductivity, law, Transmission electron microscopy, Microscopy, Materials Chemistry, Optoelectronics, Wafer, Electrical and Electronic Engineering, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::37da4010e7fd52c69793bb0b39c5bbf0
https://doi.org/10.1134/s1063739711080166

المؤلفون: M. V. Mezhennyi, Robert V. Goldstein, V. Ya. Reznik, M. G. Mil’vidskii, P. S. Shushpannikov, Konstantin Ustinov

المصدر: Physics of the Solid State. 53:527-538

مصطلحات موضوعية: Materials science, Silicon, Solid-state physics, Condensed matter physics, Plane (geometry), chemistry.chemical_element, Radius, Condensed Matter Physics, Physics::Geophysics, Electronic, Optical and Magnetic Materials, Monocrystalline silicon, Condensed Matter::Materials Science, chemistry, Dislocation, Anisotropy, Physics::Atmospheric and Oceanic Physics, Solid solution

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6899443fb6f1ded14733115b7d3b607a
https://doi.org/10.1134/s1063783411030103

المؤلفون: V. Ya. Reznik, N. A. Verezub, M. V. Mezhennii, A. I. Prostomolotov

المصدر: Journal of Crystal Growth. 318:187-192

مصطلحات موضوعية: Materials science, Condensed matter physics, Silicon, business.industry, Annealing (metallurgy), chemistry.chemical_element, Condensed Matter Physics, Crystallographic defect, Inorganic Chemistry, Crystal, Optics, chemistry, Transmission electron microscopy, Vacancy defect, Heat transfer, Materials Chemistry, Wafer, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::bcfd8f8336b852bd23e3fd3e1f451c38
https://doi.org/10.1016/j.jcrysgro.2010.11.080

المؤلفون: M. V. Mezhennyi, V. Ya. Reznik, M. G. Mil’vidskii

المصدر: Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 3:747-751

مصطلحات موضوعية: inorganic chemicals, Materials science, Doping, Chemical process of decomposition, Metallurgy, technology, industry, and agriculture, chemistry.chemical_element, Nitrogen, Oxygen, Surfaces, Coatings and Films, chemistry, Thermal, Wafer, Thin film, Dislocation

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e3bde5dfa0268b92a80a2d060fa4e242
https://doi.org/10.1134/s1027451009050140

المؤلفون: M. G. Mil’vidskii, V. I. Vdovin, V. Ya. Reznik, T. A. Torack, Lu Fei, Robert J. Falster

المصدر: physica status solidi c. 4:3043-3047

مصطلحات موضوعية: Materials science, business.industry, Relaxation (NMR), Nucleation, Stacking, chemistry.chemical_element, Heterojunction, Condensed Matter Physics, Isotropic etching, chemistry, Optoelectronics, Dislocation, business, Layer (electronics), Carbon

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::910e352eae6686d48351a539ef6c3129
https://doi.org/10.1002/pssc.200675495

المؤلفون: A. N. Tereshchenko, E. A. Steinman, Robert J. Falster, V. Ya. Reznik

المصدر: physica status solidi (a). 204:2238-2247

مصطلحات موضوعية: Photoluminescence, Materials science, Annealing (metallurgy), Analytical chemistry, Nucleation, chemistry.chemical_element, Surfaces and Interfaces, Condensed Matter Physics, Oxygen, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, Crystallography, Optical microscope, chemistry, Transmission electron microscopy, law, Materials Chemistry, Electrical and Electronic Engineering, Dislocation, Luminescence

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0acbeb66a5ecdc1f769e255083a687a1
https://doi.org/10.1002/pssa.200675454

المؤلفون: A. N. Tereshchenko, E. A. Steinman, V. Ya. Reznik

المصدر: Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 1:318-322

مصطلحات موضوعية: Materials science, Photoluminescence, Silicon, chemistry.chemical_element, Molecular physics, Surfaces, Coatings and Films, Crystallography, chemistry, Transmission electron microscopy, Dislocation, Thin film, Luminescence, Radiant intensity, Intensity (heat transfer)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e9b9feecc8784de6143d7bc1f06113db
https://doi.org/10.1134/s1027451007030160

المؤلفون: M. V. Mezhennyi, N. A. Verezub, V. Ya. Reznik, M. G. Mil’vidskii, A. I. Prostomolotov

المصدر: Crystallography Reports. 50:S159-S167

مصطلحات موضوعية: Materials science, Silicon, chemistry.chemical_element, Crucible, General Chemistry, Atmospheric temperature range, Condensed Matter Physics, Crystallographic defect, law.invention, Crystal, Crystallography, chemistry, law, Vacancy defect, General Materials Science, Wafer, Crystallization, Composite material

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8f69040af043d07ad7365fcc983cb1ac
https://doi.org/10.1134/1.2133994

المؤلفون: V. Ya. Reznik, M. G. Mil’vidskii, Robert J. Falster, M. V. Mezhennyi

المصدر: physica status solidi (c). 2:1968-1972

مصطلحات موضوعية: Stress (mechanics), Crystallography, Materials science, Oxygen precipitates, Silicon, chemistry, Mechanical strength, Stacking, chemistry.chemical_element, Wafer, Composite material, Dislocation

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c3dafc0bed4cf720df6cdbfb7c0d3ac5
https://doi.org/10.1002/pssc.200460538

المؤلفون: V. Ya. Reznik, S. Yu. Matsnev, V. T. Bublik, M. G. Mil’vidskii, K. D. Shcherbachev, M. V. Mezhennyi

المصدر: Physics of the Solid State. 45:1918-1925

مصطلحات موضوعية: Materials science, Solid-state physics, Silicon, Annealing (metallurgy), Scattering, Oxide, chemistry.chemical_element, Condensed Matter Physics, Molecular physics, Electronic, Optical and Magnetic Materials, chemistry.chemical_compound, chemistry, Impurity, Wafer, Solid solution

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::48f689f74c81499e52016525bd9b8be1
https://doi.org/10.1134/1.1620095

المؤلفون: Robert J. Falster, M. V. Mezhennyi, M G Milvidski, V. Ya. Reznik

المصدر: Journal of Physics: Condensed Matter. 14:12903-12908

مصطلحات موضوعية: Dislocation creep, Supersaturation, Materials science, Silicon, chemistry.chemical_element, Bending, Condensed Matter Physics, Crystal, Condensed Matter::Materials Science, Crystallography, chemistry, Condensed Matter::Superconductivity, General Materials Science, Wafer, Physics::Chemical Physics, Dislocation, Composite material, Solid solution

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c6d3e76e06d65600d72737e9efe742a1
https://doi.org/10.1088/0953-8984/14/48/331

المؤلفون: M. V. Mezhennyi, Robert J. Falster, V. Ya. Reznik, M. G. Mil’vidskii

المصدر: Journal of Physics: Condensed Matter. 14:12909-12915

مصطلحات موضوعية: Cz silicon, Crystallography, Materials science, Oxygen precipitates, Getter, Annealing (metallurgy), Thermal, General Materials Science, Wafer, Composite material, Dislocation, Condensed Matter Physics

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::73ac5a961281abcdea8b2c450784e499
https://doi.org/10.1088/0953-8984/14/48/332

المؤلفون: V. Ya. Reznik, M. V. Mezhennyi, M. G. Mil’vidskii

المصدر: Physics of the Solid State. 44:1278-1283

مصطلحات موضوعية: Dislocation creep, Materials science, Silicon, Solid-state physics, Condensed matter physics, Doping, chemistry.chemical_element, Atmospheric temperature range, Condensed Matter Physics, Electronic, Optical and Magnetic Materials, Stress (mechanics), Condensed Matter::Materials Science, chemistry, Dislocation, Solid solution

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::5af60c940d121a517c5ab4834251b342
https://doi.org/10.1134/1.1494622

المؤلفون: V. Ya. Reznik, M. V. Mezhennyi, V. F. Pavlov, M. G. Mil’vidskii

المصدر: Physics of the Solid State. 44:1284-1290

مصطلحات موضوعية: Materials science, Silicon, Annealing (metallurgy), Nanocrystalline silicon, Nucleation, chemistry.chemical_element, Strained silicon, Condensed Matter Physics, Electronic, Optical and Magnetic Materials, chemistry, Getter, Wafer, Composite material, Dislocation

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::acc3dadec211dec3d9d8cda7e50746ca
https://doi.org/10.1134/1.1494623

المؤلفون: V. F. Pavlov, M. V. Mezhennyi, V. Ya. Reznik, M. G. Mil’vidskii

المصدر: Physics of the Solid State. 43:47-50

مصطلحات موضوعية: Materials science, Etch pit density, Solid-state physics, Heat treated, Czochralski method, Wafer, Bending, Dislocation, Composite material, Condensed Matter Physics, Oxygen content, Electronic, Optical and Magnetic Materials

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e8920d8eeae1c1ac96c0782feb7875a8
https://doi.org/10.1134/1.1340185

المؤلفون: Konstantin Ustinov, M. G. Mil’vidskiĭ, V. Ya. Reznik, M. V. Mezhennyi, P. S. Shushpannikov, Robert V. Goldstein

المصدر: Technical Physics Letters. 34:106-108

مصطلحات موضوعية: Materials science, Physics and Astronomy (miscellaneous), business.industry, technology, industry, and agriculture, chemistry.chemical_element, Fraction (chemistry), Thermal treatment, Oxygen, Silicon based, Semiconductor, Chemical engineering, chemistry, Wafer, Matrix substance, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b986d9c0a8fc84cd09ed306e565e8839
https://doi.org/10.1134/s1063785008020065