المؤلفون: R. de Bruijn, Jürgen Dr. Kleinschmidt, Uwe Stamm, K. Gabel, D. Bolshukhin, Jens Ringling, Guido Schriever, Chinh Duc Prof. Tran, Björn Mader, S. Gotze, A. Keller, Guido Hergenhan, Jesko Dr. Brudermann, V. Korobotchko, A. Geier, C. Ziener, I. Ahmad

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Materials science, Etendue, business.industry, Extreme ultraviolet lithography, chemistry.chemical_element, Pulsed power, Electric discharge in gases, Metrology, Optics, Xenon, chemistry, Extreme ultraviolet, Z-pinch, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::7662785b065c89b0f7d50f384bf4e6ee
https://doi.org/10.1117/12.599560

المؤلفون: I. Ahmad, R. de Bruijn, Jens Ringling, K. Gabel, T. D. Chin, Björn Mader, Jürgen Dr. Kleinschmidt, Guido Schriever, V. Korobotchko, D. Bolshukhin, S. Gotze, T. Brauner, A. Keller, Uwe Stamm, Jesko Dr. Brudermann, C. Ziener, A. Geier, Guido Hergenhan

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Materials science, business.industry, Amplifier, Extreme ultraviolet lithography, Energy conversion efficiency, chemistry.chemical_element, Pulsed power, Laser, Electric discharge in gases, law.invention, Optics, Xenon, chemistry, law, Extreme ultraviolet, Optoelectronics, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9658561778eb09171fbd6328430d00a2
https://doi.org/10.1117/12.599544

المؤلفون: D. Klopfel, Uwe Stamm, P. Kohler, S. Gotze, Guido Schriever, J. Ringling, Kai Dr. Gäbel, V. Korobotchko, F. Flohrer, Jürgen Dr. Kleinschmidt, I. Ahmad

المصدر: Summaries of Papers Presented at the Lasers and Electro-Optics. CLEO '02. Technical Diges.

مصطلحات موضوعية: Materials science, business.industry, Extreme ultraviolet lithography, chemistry.chemical_element, Plasma, medicine.disease_cause, Laser, Electric discharge in gases, law.invention, Optics, Xenon, chemistry, law, Extreme ultraviolet, Z-pinch, medicine, Optoelectronics, business, Ultraviolet

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::60fdbb722f13d74146a17438a472308a
https://doi.org/10.1109/cleo.2002.1034176