المؤلفون: Dirk Basting, Uwe Stamm

المساهمون: The Pennsylvania State University CiteSeerX Archives

المصدر: http://www.riken.go.jp/lab-www/library/publication/review/pdf/No_43/43_014.pdf.

وصف الملف: application/pdf

Relation: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.222.9227; http://www.riken.go.jp/lab-www/library/publication/review/pdf/No_43/43_014.pdf

الاتاحة: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.222.9227
http://www.riken.go.jp/lab-www/library/publication/review/pdf/No_43/43_014.pdf

المؤلفون: Berndt Brenner, Jörg Bretschneider, Jens Standfuss, Uwe Stamm, Gunter Kirchhoff, Martina Zimmermann

المصدر: Advanced Materials Research. :1397-1402

مصطلحات موضوعية: Materials science, business.industry, Powertrain, General Engineering, Process (computing), Stiffness, Laser beam welding, Welding, Structural engineering, engineering.material, law.invention, law, medicine, engineering, Multi axial, Cast iron, medicine.symptom, Composite material, business, Laser beams

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::1fa463b847e554045fb7d0d94b1ea393
https://doi.org/10.4028/www.scientific.net/amr.891-892.1397

المؤلفون: Alberto Pirati, Joerg Mallmann, Uwe Stamm, Rudy Peeters, Martijn van Noordenburg, Daniel Smith, Sjoerd Lok, Eric Verhoeven, Hans Meiling, Herman Boom, Christian Wagner, Jan-Willem van der Horst, Geert Fisser, Michael Purvis, Igor V. Fomenkov, Arthur Winfried Eduardus Minnaert, Jo Finders, Carmen Zoldesi, Roderik van Es, Judon Stoeldraijer, David C. Brandt, Daniel Brown, Henk Meijer

المصدر: Extreme Ultraviolet (EUV) Lithography VII

مصطلحات موضوعية: 010302 applied physics, Resist, Computer science, Extreme ultraviolet lithography, 0103 physical sciences, Reticle, Nanotechnology, Wafer, 02 engineering and technology, 021001 nanoscience & nanotechnology, 0210 nano-technology, 01 natural sciences, Reliability engineering

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::67088a8590536dca9229abeb7c5d1194

المؤلفون: Vladimir M. Borisov, Uwe Stamm, Kai Dr. Gäbel, M. Darscht, O B Khristoforov, Guido Schriever, Aleksandr Yu. Vinokhodov

المصدر: Microelectronic Engineering. :83-88

مصطلحات موضوعية: business.industry, Extreme ultraviolet lithography, Energy conversion efficiency, chemistry.chemical_element, Plasma, Condensed Matter Physics, Laser, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Electric discharge in gases, law.invention, Optics, Xenon, chemistry, W band, law, Optoelectronics, Laser power scaling, Electrical and Electronic Engineering, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::342826a29cca267a3c1348a9517d6f62
https://doi.org/10.1016/s0167-9317(02)00514-2

المؤلفون: J. Kleinschmidt, K. Vogler, D. Basting, F. Voβ, Uwe Stamm, I. Tassy, S. Govorkov, R. Pätzel, R. Osmanov, T Schroeder, I. Bragin

المصدر: Microelectronic Engineering. 53:149-152

مصطلحات موضوعية: Excimer laser, business.industry, Chemistry, Semiconductor chip, medicine.medical_treatment, Condensed Matter Physics, Laser, Excimer, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, Wavelength, Optics, law, medicine, Optoelectronics, Electrical and Electronic Engineering, Photolithography, business, Lithography, Next-generation lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::44b10105918c66ed41349db3f26ddf54
https://doi.org/10.1016/s0167-9317(00)00284-7

المؤلفون: Dirk Basting, Heinrich Endert, Michael Scaggs, Uwe Stamm

المصدر: Journal of Laser Applications. 11:1-6

مصطلحات موضوعية: Materials science, Excimer laser, business.industry, medicine.medical_treatment, Biomedical Engineering, chemistry.chemical_element, Laser, medicine.disease_cause, Neodymium, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, law.invention, Optical pumping, Optics, chemistry, law, Nd:YAG laser, Diode-pumped solid-state laser, medicine, Optoelectronics, business, Instrumentation, Tunable laser, Ultraviolet

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e3e9ff1ffa5a3e0f0031f888f090575d
https://doi.org/10.2351/1.521873

المؤلفون: Jürgen Dr. Kleinschmidt, Guido Schriever, Uwe Stamm

مصطلحات موضوعية: Resist, Computer science, Continuous operation, business.industry, Z-pinch, Extreme ultraviolet lithography, Scalability, Electrical engineering, business, Chip, Throughput (business), Lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e5d2642645fdca588ad1c426ed4fe639
https://doi.org/10.1117/3.613774.ch14

المؤلفون: Kai Dr. Gäbel, Uwe Stamm

مصطلحات موضوعية: Engineering, business.industry, Extreme ultraviolet lithography, Electrical engineering, Joint venture, Thermal load, Laser, Chip, law.invention, law, Scalability, business, Throughput (business), Lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::f4041c9fc98e1ef5129cbbf6a370b87f
https://doi.org/10.1117/3.613774.ch19

المؤلفون: M. Kempe, B. Wilhelmi, Uwe Stamm

المصدر: Optics Communications. 89:119-125

مصطلحات موضوعية: Materials science, business.industry, Astrophysics::Instrumentation and Methods for Astrophysics, Physics::Optics, Pulse duration, Laser, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, law.invention, Lens (optics), Transformation (function), Cardinal point, Optics, law, Femtosecond, Optoelectronics, Monochromatic color, Electrical and Electronic Engineering, Physical and Theoretical Chemistry, business, Annular aperture

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a5c62ecb90e3abc2e37caf54bd516f68
https://doi.org/10.1016/0030-4018(92)90143-f

المؤلفون: Jürgen Dr. Kleinschmidt, Max C. Schürmann, Masaki Yoshioka, Guido Schriever, Vladimir M. Borisov, Uwe Stamm, Guido Hergenhan, Christian Ziener

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Materials science, business.industry, Semiconductor device fabrication, Extreme ultraviolet lithography, Energy conversion efficiency, Laser, Chip, Electric discharge in gases, law.invention, Optics, law, Z-pinch, Extreme ultraviolet, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::332d58dbd40481965ad8ca1fff357f3d
https://doi.org/10.1117/12.712136

المؤلفون: Klaus Bergmann, Joseph Pankert, Willi Neff, Bernhard Jagle, Juergen Kleinschmidt, Uwe Stamm, Andre Egbert, Christian Ziener, Vivek Bakshi, Guido Schriever, Rainer Lebert, Christian Wies, Marc Corthout, Deborah Gustafson

المصدر: 23rd European Mask and Lithography Conference.

مصطلحات موضوعية: Materials science, business.industry, Extreme ultraviolet lithography, Metrology, law.invention, Optics, Resist, law, Extreme ultraviolet, Low-power electronics, Optoelectronics, Photomask, Photolithography, business, Lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d84d001f9b62ec4d371095711051f81b
https://doi.org/10.1117/12.737183

المؤلفون: Guido Hergenhan, Jürgen Dr. Kleinschmidt, Guido Schriever, Uwe Stamm, Max C. Schürmann, D. Bolshukhin, B. Nikolaus, Vladimir M. Borisov, Christian H. Ziener, Vladimir Korobotchko, Jesko Dr. Brudermann

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Engineering, Reliability (semiconductor), Duty cycle, Semiconductor device fabrication, business.industry, Range (aeronautics), Extreme ultraviolet lithography, Energy conversion efficiency, Electrical engineering, business, Chip, Power (physics)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::bf68be2be67910708dbd607c01b4a2d0
https://doi.org/10.1117/12.652989

المؤلفون: Uwe Stamm

المصدر: SPIE Newsroom.

مصطلحات موضوعية: Materials science, business.industry, Extreme ultraviolet, Optoelectronics, business, Chip

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ac5f080c2f3b2c5d5fa104fa2e4af337
https://doi.org/10.1117/2.1200604.0223

المؤلفون: Uwe Stamm, W. Zschocke, D. Basting, T. Schroder, N. Deutsch

المصدر: CLEO '97., Summaries of Papers Presented at the Conference on Lasers and Electro-Optics.

مصطلحات موضوعية: Range (particle radiation), Materials science, business.industry, Second-harmonic generation, Laser, law.invention, Power (physics), Optics, Electricity generation, Solid-state laser, law, High harmonic generation, Optoelectronics, business, Diode

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4351481025bca56a12a553604903f41a
https://doi.org/10.1109/cleo.1997.603473

المؤلفون: Uwe Stamm

المصدر: Excimer Laser Technology ISBN: 3540200568

مصطلحات موضوعية: Materials science, Optics, business.industry, Extreme ultraviolet lithography, Extreme ultraviolet, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6445f6bcfcbf100443060d052919a2b0
https://doi.org/10.1007/3-540-26667-4_31

المؤلفون: Rainer Lebert, Andre Egbert, Willi Neff, Juergen Kleinschmidt, Bernhard Jagle, Uwe Stamm, Christian Wies, Klaus Bergmann, Joseph Pankert, Guido Schriever, Kai Gaebel

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Engineering, business.industry, Extreme ultraviolet lithography, law.invention, Metrology, Optics, law, Low-power electronics, Extreme ultraviolet, Computer data storage, Photomask, Photolithography, business, Lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::5484b7a8e045a03fe707f41a755f47b0
https://doi.org/10.1117/12.637333

المؤلفون: R. de Bruijn, Jürgen Dr. Kleinschmidt, Uwe Stamm, K. Gabel, D. Bolshukhin, Jens Ringling, Guido Schriever, Chinh Duc Prof. Tran, Björn Mader, S. Gotze, A. Keller, Guido Hergenhan, Jesko Dr. Brudermann, V. Korobotchko, A. Geier, C. Ziener, I. Ahmad

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Materials science, Etendue, business.industry, Extreme ultraviolet lithography, chemistry.chemical_element, Pulsed power, Electric discharge in gases, Metrology, Optics, Xenon, chemistry, Extreme ultraviolet, Z-pinch, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::7662785b065c89b0f7d50f384bf4e6ee
https://doi.org/10.1117/12.599560

المؤلفون: I. Ahmad, R. de Bruijn, Jens Ringling, K. Gabel, T. D. Chin, Björn Mader, Jürgen Dr. Kleinschmidt, Guido Schriever, V. Korobotchko, D. Bolshukhin, S. Gotze, T. Brauner, A. Keller, Uwe Stamm, Jesko Dr. Brudermann, C. Ziener, A. Geier, Guido Hergenhan

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Materials science, business.industry, Amplifier, Extreme ultraviolet lithography, Energy conversion efficiency, chemistry.chemical_element, Pulsed power, Laser, Electric discharge in gases, law.invention, Optics, Xenon, chemistry, law, Extreme ultraviolet, Optoelectronics, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9658561778eb09171fbd6328430d00a2
https://doi.org/10.1117/12.599544

المؤلفون: Vladimir Dr. Korobochko, Bjoern Mader, Kai Gaebel, Juergen Kleinschmidt, Henry Birner, Guido Hergenhan, Jesko Dr. Brudermann, Sven Goetze, Denis Bolshukhin, Uwe Stamm, Imtiaz Ahmad, Diethard Kloepfel, Guido Schriever, Frank Flohrer, Rainer Mueller, Tran Duc Chinh, Christian Ziener, Jens Ringling

المصدر: High-Power Laser Ablation V.

مصطلحات موضوعية: Materials science, business.industry, Etendue, Extreme ultraviolet lithography, Energy conversion efficiency, Laser, Electric discharge in gases, law.invention, Optics, law, Extreme ultraviolet, Laser power scaling, business, Lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::097b00202bce4b9e309d1da2e1a34eff
https://doi.org/10.1117/12.548385

المؤلفون: Juergen Kleinschmidt, Tran Duc Chinh, Guido Hergenhan, Guido Schriever, Vladimir Korobotchko, Sven Goetze, Henry Birner, Imtiaz Ahmad, Rainer Mueller, Jens Ringling, Christian Ziener, Frank Flohrer, Uwe Stamm, Diethard Kloepfel, Björn Mader, Kai Gaebel, Denis Bolshukhin, Jesko Dr. Brudermann

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Materials science, business.industry, Etendue, Extreme ultraviolet lithography, Energy conversion efficiency, Laser, Electric discharge in gases, law.invention, Optics, law, Extreme ultraviolet, Laser power scaling, business, Lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a620b775326f27a8daf5d146b1880766
https://doi.org/10.1117/12.535410