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1Academic JournalMathematical Modeling and Analysis of MEMS Deformable Mirror Actuated by Electrostatic Piston Array.
المؤلفون: UNO, A. K. I. K. O.1, HIRAI, Y. O. S. H. I. K. A. Z. U.1, TSUCHIYA, T. O. S. H. I. Y. U. K. I.1, TABATA, O. S. A. M. U.1
المصدر: Electrical Engineering in Japan. Jul2018, Vol. 204 Issue 2, p50-60. 11p. 4 Color Photographs, 7 Diagrams, 3 Charts, 2 Graphs.
مصطلحات موضوعية: *MICROELECTROMECHANICAL systems, *DEFORMABLE mirrors, *ELECTROSTATICS, *WAVEFRONTS (Optics), *MATHEMATICAL optimization, *MATHEMATICAL models