المؤلفون: Xing Jian Chen, Guo Feng Yao, Li Zhang, Xiao Ming He, Toney Chang

المصدر: ECS Transactions. 60:305-311

مصطلحات موضوعية: chemistry.chemical_compound, Materials science, Silicon nitride, chemistry, business.industry, Etching (microfabrication), Optoelectronics, Wafer, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::be00f9e815f3d3e0e69748bd5880448b
https://doi.org/10.1149/06001.0305ecst