المؤلفون: Sadayuki Hirayama, Tatsunori Nakahara, Takashi Fujikawa, Kohei Yano, Noriko Tani, Yuji Maruyama, Masakatsu Hirano, Kimiyuki Maruyama

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Wavelength, Optics, Materials science, business.industry, Broadband, Resolution (electron density), Miniaturization, business, Line (formation)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::563082561b416822efd7e463a987f171
https://doi.org/10.1117/12.2279552