المؤلفون: Jaan Aarik1, Jussi Aav2, Esko Ahvenniemi2, Andrew R Akbashev3, Saima Ali2, Mikhael Bechelany4, Maria Berdova2, Ivan Bodalyov5, Stefan Boyadjiev6, David Cameron7, Nikolai Chekurov8, Rong Chen9, Mikhail Chubarov10, Véronique Cremers11, Anjana Devi12, Victor E. Drozd5, Liliya Elnikova13, Gloria Gottardi, Aristeidis Goulas15, Kestutis Grigoras16, Dennis Hausmann17, Cheol Seong Hwang18, Shih-Hui Jen19, Marcel Junige20, Tanja Kallio2, Jaana Kanervo2, Ivan Khmelnitskiy21, Do Han Kim22, Lev Klibanov23, Yury Koshtyal24, Outi Krause2, Jakob Kuhs11, Irina Kärkkänen25, Marja-Leena Kääriäinen26, Tommi O. Kääriäinen26, Luca Lamagna27, Adam Łapicki28, Markku Leskelä29, Harri Lipsanen2, Anatolii Malkov5, Anatoly Malygin5, Felix Mattelaer11, Abdelkader Mennad30, Christian Militzer31, Jyrki Molarius16, Małgorzata Norek32, Cagla OzgitAkgun33, Mikhail Panov21, Hendrik Pedersen34, Luis Fabián Peña35, Fabien Piallat36, Georgi Popov29, Riikka L. Puurunen2, Alexander Pyymäki Perros2, Geert Rampelberg11, Robin H. A. Ras2, Erwan Rauwel37, Fred Roozeboom38, 39, Timo Sajavaara40, Hossein Salami41, Hele Savin2, Nathanaelle Schneider42, Thomas E. Seidel43, Pia Sundberg2, Jonas Sundqvist44, Dmitry Suyatin45, Massimo Tallarida46, Tobias Törndahl47, Mikko Utriainen16, J. Ruud van Ommen15, Thomas Waechtler31, 48, Timo Weckman2, Claudia Wiemer49, Jihong Yim2, Oili M. E. Ylivaara16, Oksana Yurkevich50

المساهمون: Aarik1, Jaan, Aav2, Jussi, Ahvenniemi2, Esko, R Akbashev3, Andrew, Ali2, Saima, Bechelany4, Mikhael, Berdova2, Maria, Bodalyov5, Ivan, Boyadjiev6, Stefan, Cameron7, David, Chekurov8, Nikolai, Chen9, Rong, Chubarov10, Mikhail, Cremers11, Véronique, Devi12, Anjana, Drozd5, Victor E., Elnikova13, Liliya, Gottardi, Gloria, Goulas15, Aristeidi, Grigoras16, Kestuti, Hausmann17, Denni, Seong Hwang18, Cheol, Jen19, Shih-Hui, Junige20, Marcel, Kallio2, Tanja, Kanervo2, Jaana, Khmelnitskiy21, Ivan, Han Kim22, Do, Klibanov23, Lev, Koshtyal24, Yury, Krause2, Outi, Kuhs11, Jakob, Kärkkänen25, Irina, Kääriäinen26, Marja-Leena, Kääriäinen26, Tommi O., Lamagna27, Luca, Łapicki28, Adam, Leskelä29, Markku, Lipsanen2, Harri, Malkov5, Anatolii, Malygin5, Anatoly, Mattelaer11, Felix, Mennad30, Abdelkader, Militzer31, Christian, Molarius16, Jyrki, Norek32, Małgorzata, Ozgitakgun33, Cagla, Panov21, Mikhail, Pedersen34, Hendrik, Fabián Peña35, Lui, Piallat36, Fabien, Popov29, Georgi, Puurunen2, Riikka L., Pyymäki Perros2, Alexander, Rampelberg11, Geert, Ras2, Robin H. A., Rauwel37, Erwan, Roozeboom38, Fred, 39, Sajavaara40, Timo, Salami41, Hossein, Savin2, Hele, Schneider42, Nathanaelle, Seidel43, Thomas E., Sundberg2, Pia, Sundqvist44, Jona, Suyatin45, Dmitry, Tallarida46, Massimo, Törndahl47, Tobia, Utriainen16, Mikko, Ruud van Ommen15, J., Waechtler31, Thoma, 48, Weckman2, Timo, Wiemer49, Claudia, Yim2, Jihong, Ylivaara16, Oili M. E., Yurkevich50, Oksana

Relation: ispartofbook:Proceedings of EuroCVD 22 - Baltic ALD 16; EuroCVD 22 - Baltic ALD 16; http://hdl.handle.net/11582/318789

الاتاحة: http://hdl.handle.net/11582/318789

المؤلفون: Jaan Aarik1, Jussi Aav2, Esko Ahvenniemi2, Andrew R Akbashev3, Saima Ali2, Mikhael Bechelany4, Maria Berdova2, Ivan Bodalyov5, Stefan Boyadjiev6, David Cameron7, Nikolai Chekurov8, Rong Chen9, Mikhail Chubarov10, Véronique Cremers11, Anjana Devi12, Victor E. Drozd5, Liliya Elnikova13, Gloria Gottardi, Aristeidis Goulas15, Kestutis Grigoras16, Dennis Hausmann17, Cheol Seong Hwang18, Shih-Hui Jen19, Marcel Junige20, Tanja Kallio2, Jaana Kanervo2, Ivan Khmelnitskiy21, Do Han Kim22, Lev Klibanov23, Yury Koshtyal24, Outi Krause2, Jakob Kuhs11, Irina Kärkkänen 25, Marja-Leena Kääriäinen26, Tommi O. Kääriäinen26, Luca Lamagna27, Adam Łapicki28, Markku Leskelä29, Harri Lipsanen2, Anatolii Malkov5, Anatoly Malygin5, Felix Mattelaer11, Abdelkader Mennad30, Christian Militzer31, Jyrki Molarius16, Małgorzata Norek32, Cagla Ozgit-Akgun33, Mikhail Panov21, Hendrik Pedersen34, Luis Fabián Peña35, Fabien Piallat36, Georgi Popov29, Riikka L. Puurunen2, Alexander Pyymäki Perros2, Geert Rampelberg11, Robin H. A. Ras2, Erwan Rauwel37, Fred Roozeboom38, 39, Timo Sajavaara40, Hossein Salami41, Hele Savin2, Nathanaelle Schneider42, Thomas E. Seidel43, Pia Sundberg2, Jonas Sundqvist44, Dmitry Suyatin45, Massimo Tallarida46, Tobias Törndahl47, Mikko Utriainen16, J. Ruud van Ommen15, Thomas Waechtler31, 48, Timo Weckman2, Claudia Wiemer49, Jihong Yim2, Oili M. E. Ylivaara16, Oksana Yurkevich50

المساهمون: Aarik1, Jaan, Aav2, Jussi, Ahvenniemi2, Esko, R Akbashev3, Andrew, Ali2, Saima, Bechelany4, Mikhael, Berdova2, Maria, Bodalyov5, Ivan, Boyadjiev6, Stefan, Cameron7, David, Chekurov8, Nikolai, Chen9, Rong, Chubarov10, Mikhail, Cremers11, Véronique, Devi12, Anjana, Drozd5, Victor E., Elnikova13, Liliya, Gottardi, Gloria, Goulas15, Aristeidi, Grigoras16, Kestuti, Hausmann17, Denni, Seong Hwang18, Cheol, Jen19, Shih-Hui, Junige20, Marcel, Kallio2, Tanja, Kanervo2, Jaana, Khmelnitskiy21, Ivan, Han Kim22, Do, Klibanov23, Lev, Koshtyal24, Yury, Krause2, Outi, Kuhs11, Jakob, Kärkkänen 25, Irina, Kääriäinen26, Marja-Leena, Kääriäinen26, Tommi O., Lamagna27, Luca, Łapicki28, Adam, Leskelä29, Markku, Lipsanen2, Harri, Malkov5, Anatolii, Malygin5, Anatoly, Mattelaer11, Felix, Mennad30, Abdelkader, Militzer31, Christian, Molarius16, Jyrki, Norek32, Małgorzata, Ozgit-Akgun33, Cagla, Panov21, Mikhail, Pedersen34, Hendrik, Fabián Peña35, Lui, Piallat36, Fabien, Popov29, Georgi, Puurunen2, Riikka L., Pyymäki Perros2, Alexander, Rampelberg11, Geert, Ras2, Robin H. A., Rauwel37, Erwan, Roozeboom38, Fred, 39, Sajavaara40, Timo, Salami41, Hossein, Savin2, Hele, Schneider42, Nathanaelle, Seidel43, Thomas E., Sundberg2, Pia, Sundqvist44, Jona, Suyatin45, Dmitry, Tallarida46, Massimo, Törndahl47, Tobia, Utriainen16, Mikko, Ruud van Ommen15, J., Waechtler31, Thoma, 48, Weckman2, Timo, Wiemer49, Claudia, Yim2, Jihong, Ylivaara16, Oili M. E., Yurkevich50, Oksana

Relation: ispartofbook:Proceedings of 19th International Conference on Atomic Layer Deposition (ALD 2019); 19th International Conference on Atomic Layer Deposition (ALD 2019); http://hdl.handle.net/11582/318788

الاتاحة: http://hdl.handle.net/11582/318788