المؤلفون: Halbgewachs, Clemens, Kentischer, Thomas J., Sändig, Karsten, Baumgartner, Joerg, Bell, Alexander, Fischer, Andreas, Funk, Stefan, Heidecke, Frank, Scheiffelen, Thomas, Schmidt, Wolfgang, Spanner, Erwin, Speckbacher, Peter, von der Lühe, Oskar F.

المساهمون: Evans, Christopher J., Simard, Luc, Takami, Hideki

المصدر: SPIE Proceedings ; Ground-based and Airborne Instrumentation for Astronomy VI ; ISSN 0277-786X

الاتاحة: http://dx.doi.org/10.1117/12.2232297

المؤلفون: Hoffmann, Karl E., Asteiner, Michael, Speckbacher, Peter

المصدر: Microelectronic Engineering ; volume 143, page 1-4 ; ISSN 0167-9317

الاتاحة: http://dx.doi.org/10.1016/j.mee.2014.12.010
https://api.elsevier.com/content/article/PII:S0167931714005334?httpAccept=text/xml
https://api.elsevier.com/content/article/PII:S0167931714005334?httpAccept=text/plain

المؤلفون: Schatz, Thomas, Hauffe, Bertram, Dobereiner, Stefan, Bruck, Hans-Jurgen, Brendel, Bernd, Bettin, Lutz, Roth, Klaus-Dieter, Steinberg, Walter, Speckbacher, Peter, Sedlmeier, Wolfgang, Engel, Thomas, Hassler-Grohne, Wolfgang, Mirande, Werner, Bosse, Harald

المساهمون: Behringer, Uwe F. W.

المصدر: 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents ; SPIE Proceedings ; ISSN 0277-786X

الاتاحة: http://dx.doi.org/10.1117/12.514952
http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=767799

المؤلفون: Asteiner, Michael, Schlemmer, Christian, Speckbacher, Peter, Hoffmann, Karl E.

المصدر: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Jul/Aug2016, Vol. 34 Issue 4, p1-5, 5p

مصطلحات موضوعية: ELECTRON beam lithography, GAUSSIAN beams, SILICONES, PHOTOMASKS, MONTE Carlo method