المؤلفون: Daisuke Ogawa, Dima Lubomirsky, Hideo Sugai, Keiji Nakamura, Masaya Hotta, Satoru Kobayashi, Soonam Park, スーナム パーク, ディマ ルボミルスキー, 中村 圭二, 堀田 将也, 小川 大輔, 小林 理, 菅井 秀郎

المصدر: JSAP Annual Meetings Extended Abstracts. 2017, :1673

المؤلفون: Daisuke Ogawa, Dima Lubomirsky, Hideo Sugai, Keiji Nakamura, Masaya Hotta, Satoru Kobayashi, Soonam Park, Yuichi Hasegawa, スーナム パーク, ディマ ルボミルスキー, 中村 圭二, 堀田 将也, 小川 大輔, 小林 理, 菅井 秀郎, 長谷川 雄一

المصدر: JSAP Annual Meetings Extended Abstracts. 2017, :1710

المؤلفون: Daisuke Ogawa, Hideo Sugai, Keiji Nakamura, Satoru Kobayashi, Soonam Park, Yuichi Hasegawa, パーク スーナム, 中村 圭二, 小川 大輔, 小林 理, 菅井 秀郎, 長谷川 雄一

المصدر: JSAP Annual Meetings Extended Abstracts. 2016, :1672

المؤلفون: Daisuke Ogawa, Hideo Sugai, Keiji Nakamura, Satoru Kobayashi, Soonam Park, Yuichi Hasegawa, パーク スーナム, 中村 圭二, 小川 大輔, 小林 理, 菅井 秀郎, 長谷川 雄一

المصدر: JSAP Annual Meetings Extended Abstracts. 2016, :1624

المؤلفون: Daisuke Ogawa, Hideo Sugai, Keiji Nakamura, Satoru Kobayashi, Soonam Park, Yuichi Hasegawa, スーナム パーク, 中村 圭二, 小川 大輔, 小林 理, 菅井 秀郎, 長谷川 雄一

المصدر: JSAP Annual Meetings Extended Abstracts. 2015, :1592

المؤلفون: Dima Lubomirsky, Ramesh Bokka, Tae Seung Cho, Soonam Park, Shankar Venkataraman, Yi-Heng Sen

المصدر: IEEE Transactions on Plasma Science. 42:1636-1639

مصطلحات موضوعية: Nuclear and High Energy Physics, Glow discharge, Neon lamp, Materials science, Brush discharge, Dielectric barrier discharge, Condensed Matter Physics, Cathode, law.invention, Electric arc, law, Torr, Remote plasma, Atomic physics

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d2311c1a7b34c4df62a7c0e13ad49d72
https://doi.org/10.1109/tps.2014.2321172

المؤلفون: Soonam Park, Qing Han, Dima Lubomirsky, Shankar Venkataraman, Tae Seung Cho

المصدر: 2016 IEEE International Conference on Plasma Science (ICOPS).

مصطلحات موضوعية: Materials science, business.industry, Semiconductor device fabrication, education, technology, industry, and agriculture, Plasma, Cathode, law.invention, Optics, law, Plasma torch, Electrode, Remote plasma, Optoelectronics, Wafer, business, Plasma processing

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::fd7d8458bf76e294f455ee0cef676815
https://doi.org/10.1109/plasma.2016.7534008

المؤلفون: Steven L. Girshick, Michael R. Zachariah, Soonam Park, Feng Liao, J.M. Larson

المصدر: Plasma Chemistry and Plasma Processing. 24:353-372

مصطلحات موضوعية: Hybrid physical-chemical vapor deposition, Chemistry, General Chemical Engineering, Analytical chemistry, General Chemistry, Chemical vapor deposition, Combustion chemical vapor deposition, Condensed Matter Physics, Mass spectrometry, Electron beam physical vapor deposition, Surfaces, Coatings and Films, Pulsed laser deposition, Plasma-enhanced chemical vapor deposition, Plasma processing

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0f3631be8a6fe0594bece3530cfd3825
https://doi.org/10.1007/s11090-004-2273-1

المؤلفون: Masaya Hotta, Dima Lubomirsky, Keiji Nakamura, Yuichi Hasegawa, Kobayashi Satoru, Soonam Park, Hideo Sugai

المصدر: Japanese Journal of Applied Physics. 56:116002

مصطلحات موضوعية: 010302 applied physics, Materials science, Physics and Astronomy (miscellaneous), business.industry, General Engineering, General Physics and Astronomy, 02 engineering and technology, Resonant cavity, 021001 nanoscience & nanotechnology, 01 natural sciences, Ion source, Optics, Amplitude, 0103 physical sciences, 0210 nano-technology, business, Microwave cavity

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::5859b5abe15e952a0cc2b59feef9eb1b
https://doi.org/10.7567/jjap.56.116002

المؤلفون: Kobayashi Satoru, Dima Lubomirsky, Keiji Nakamura, Yuichi Hasegawa, Soonam Park, Hideo Sugai

المصدر: Japanese Journal of Applied Physics. 56:046203

مصطلحات موضوعية: 010302 applied physics, Materials science, Angular frequency, Physics and Astronomy (miscellaneous), Oscillation, business.industry, General Engineering, General Physics and Astronomy, 02 engineering and technology, Plasma, Low frequency, 021001 nanoscience & nanotechnology, Rotation, 01 natural sciences, Optics, 0103 physical sciences, 0210 nano-technology, business, Frequency modulation, Microwave, Microwave cavity

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6bb309e0027d6d7fdd987ed61964f262
https://doi.org/10.7567/jjap.56.046203

المؤلفون: Shankar Venkataraman, Tae Seung Cho, Soonam Park, Dongqing Yang, Dima Lubomirsky, Qing Han

المصدر: Japanese Journal of Applied Physics. 55:056201

مصطلحات موضوعية: 010302 applied physics, Glow discharge, Materials science, business.industry, General Engineering, Analytical chemistry, General Physics and Astronomy, High voltage, Plasma, 01 natural sciences, Cathode, 010305 fluids & plasmas, law.invention, law, 0103 physical sciences, Electrode, Remote plasma, Optoelectronics, Breakdown voltage, Wafer, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2f9631337bfecc65b3260eb2c557575f
https://doi.org/10.7567/jjap.55.056201

المؤلفون: Soonam Park, Feng Liao, John M. Larson, Steven L. Girshick, Michael R. Zachariah

المصدر: Plasma Chemistry & Plasma Processing; Sep2004, Vol. 24 Issue 3, p353-372, 20p

المؤلفون: Yuichi Hasegawa, Keiji Nakamura, Dima Lubomirsky, Soonam Park, Satoru Kobayashi, Hideo Sugai

المصدر: Japanese Journal of Applied Physics; Apr2017, Vol. 56 Issue 4, p1-1, 1p

المؤلفون: Tae S. Cho, Qing Han, Dongqing Yang, Soonam Park, Dima Lubomirsky, Shankar Venkataraman

المصدر: Japanese Journal of Applied Physics; May2016, Vol. 55 Issue 5, p1-1, 1p