المؤلفون: Kwang Hwan Jung, Soobang Kim, Kyungsu Park, Kyu-Sang Yu, Sung Yup An, Jwa Soon Kim, Won Ja Min

المصدر: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 450:310-314

مصطلحات موضوعية: Nuclear and High Energy Physics, Range (particle radiation), Materials science, Hydrogen, Silicon, business.industry, 010401 analytical chemistry, Analytical chemistry, chemistry.chemical_element, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Charged particle, 0104 chemical sciences, Elastic recoil detection, Time of flight, chemistry.chemical_compound, Semiconductor, chemistry, Silicon nitride, 0210 nano-technology, business, Instrumentation

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::434be8f7236ecfffa67b459d4b2b6118
https://doi.org/10.1016/j.nimb.2018.11.005