المؤلفون: Pierre Edinger, Gaehun Jo, Chris Nguyen, Alain Takabayashi, Carlos Errando-Herranz, Cleitus Antony, Giuseppe Talli, Peter Verheyen, Umar Khan, Simon Bleiker

مصطلحات موضوعية: Uncategorized, Integrated Optics

Relation: https://figshare.com/articles/journal_contribution/Supplementary_document_for_A_vacuum-sealed_silicon_photonic_MEMS_tunable_ring_resonator_with_independent_control_over_coupling_an_phase_-_6216392_pdf/21770828

الاتاحة: https://doi.org/10.6084/m9.figshare.21770828.v2
https://figshare.com/articles/journal_contribution/Supplementary_document_for_A_vacuum-sealed_silicon_photonic_MEMS_tunable_ring_resonator_with_independent_control_over_coupling_an_phase_-_6216392_pdf/21770828

المؤلفون: Simon Bleiker, Maaike Visser Taklo, Nicolas Lietaer, Andreas Vogl, Thor Bakke, Frank Niklaus

المصدر: Micromachines; Volume 7; Issue 10; Pages: 192

مصطلحات موضوعية: micro electro-mechanical systems (MEMS), imaging sensor, packaging, adhesive wafer bonding, benzocyclobutene (BCB)

وصف الملف: application/pdf

Relation: https://dx.doi.org/10.3390/mi7100192

الاتاحة: https://doi.org/10.3390/mi7100192