المؤلفون: Harutaka Mekaru, Michiru Yamashita, Noriaki Sato, Osamu Shimada, Shinji Kusumi, Tadashi Hattori, 久住 真治, 佐藤 憲昭, 山下 満, 嶋田 修, 服部 正, 銘苅 春隆

المصدر: Proceedings of JSPE Semestrial Meeting. 2004, :479

المؤلفون: Harutaka Mekaru, Masami Shimizu, Michiru Yamashita, Noriaki Sato, Osamu Shimada, Shinji Kusumi, Tadashi Hattori, 久住 真治, 佐藤 憲昭, 山下 満, 嶋田 修, 服部 正, 清水 正巳, 銘苅 春隆

المصدر: Proceedings of JSPE Semestrial Meeting. 2005, :51

المؤلفون: Harutaka Mekaru, Masami SHIMIZU, Michiru YAMASHITA, Noriaki SATO, Osamu SHIMADA, Shinji KUSUMI, Tadashi HATTORI, 久住 真治, 佐藤 憲昭, 山下 満, 嶋田 修, 服部 正, 清水 正巳, 銘苅 春隆

المصدر: The Proceedings of the Machine Design and Tribology Division meeting in JSME. 2004, :67

المؤلفون: Harutaka MEKARU, Michiru YAMASHITA, Noriaki SATO, Osamu SHIMADA, Shinji KUSUMI, Tadashi HATTORI, 久住 真治, 佐藤 憲昭, 山下 満, 嶋田 修, 服部 正, 銘苅 春隆

المصدر: The Proceedings of the Materials and processing conference. 2003, :287

المؤلفون: Harutaka MEKARU, Masami SHIMIZU, Michiru YAMASHITA, Noriaki SATO, Osamu SHIMADA, Shinji KUSUMI, Tadashi HATTORI

المصدر: JSME International Journal Series A Solid Mechanics and Material Engineering. 2006, 49(1):74

المؤلفون: Harutaka Mekaru, Masami Shimizu, Michiru Yamashita, Noriaki Sato, Osamu Shimada, Shinji Kusumi, Tadashi Hattori, 久住 真治, 佐藤 憲昭, 山下 満, 嶋田 修, 服部 正, 清水 正巳, 銘苅 春隆

المصدر: 電気学会論文誌Ｃ（電子・情報・システム部門誌） / IEEJ Transactions on Electronics, Information and Systems. 2007, 127(2):160

المؤلفون: Hiroaki Mochizuki, Tadashi Hattori, Noriaki K. Sato, Harutaka Mekaru, Masami Shimizu, Osamu Shimada, Michiru Yamashita, Shinji Kusumi

المصدر: Microsystem Technologies. 13:547-550

مصطلحات موضوعية: Engineering, business.industry, Electrical engineering, Mechanical engineering, Microcoil, Condensed Matter Physics, Electronic, Optical and Magnetic Materials, Microactuator, Hardware and Architecture, Electromagnetism, Miniaturization, X-ray lithography, Electrical and Electronic Engineering, Actuator, Energy source, LIGA, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::57df6722d0d6f4f5a9dfc14474b3efe8
https://doi.org/10.1007/s00542-006-0230-z

المؤلفون: Shinji Kusumi, Tadashi Hattori, Michiru Yamashita, Harutaka Mekaru, Noriaki K. Sato, Masami Shimizu, Osamu Shimada

المصدر: Microsystem Technologies. 13:393-402

مصطلحات موضوعية: Fabrication, Materials science, business.industry, Electrical engineering, Molding (process), Microcoil, Condensed Matter Physics, Isotropic etching, Electronic, Optical and Magnetic Materials, Hardware and Architecture, Optoelectronics, X-ray lithography, Electrical and Electronic Engineering, business, LIGA, Lithography, Spiral

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e2789c24c779969a00377267fca38d05
https://doi.org/10.1007/s00542-006-0202-3

المؤلفون: Harutaka Mekaru, Shinji Kusumi, Tadashi Hattori, Noriaki K. Sato, Osamu Shimada, Michiru Yamashita

المصدر: Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference.

مصطلحات موضوعية: Fabrication, Materials science, business.industry, General Engineering, General Physics and Astronomy, Synchrotron radiation, Microcoil, medicine.disease_cause, Optics, Resist, Mold, medicine, Optoelectronics, X-ray lithography, business, Lithography, Next-generation lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::14d427e1ab2089eb79deb34c5c22bd0d
https://doi.org/10.1109/imnc.2003.1268623

المؤلفون: Tadashi Hattori, M. Yamashita, M. Shimizu, N. Sato, Harutaka Mekaru, Shinji Kusumi, Osamu Shimada

المصدر: Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004..

مصطلحات موضوعية: Materials science, Nanotechnology, X-ray lithography, Microcoil, Composite material, LIGA, Spiral

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9fcf1cc926f5fca9ab00967e94b857b7
https://doi.org/10.1109/imnc.2004.245630

المؤلفون: Ichiro Matsubara, Shinji Kusumi, Ryoji Funahashi, Toru Ogura, Hiroshi Yamashita, Lucangelo Dimesso

المصدر: Journal of Applied Physics. 76:4891-4893

مصطلحات موضوعية: Superconductivity, Materials science, Electrical resistivity and conductivity, Whisker, Whiskers, Composite number, Metallurgy, General Physics and Astronomy, Sintering, Metal powder, Composite material, Current density

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::07737172b33bf94c627bc241312adc10
https://doi.org/10.1063/1.357266

المؤلفون: Harutaka Mekaru, Tadashi Hattori, Masami Shimizu, Osamu Shimada, Noriaki K. Sato, Shinji Kusumi, Michiru Yamashita

المصدر: Japanese Journal of Applied Physics. 44:5749

مصطلحات موضوعية: Materials science, business.industry, General Engineering, General Physics and Astronomy, Nanotechnology, Microcoil, Isotropic etching, Optoelectronics, Wafer, X-ray lithography, business, Electroplating, LIGA, Lithography, Spiral

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::544a32e974d2e956b5caf47b94330c4c
https://doi.org/10.1143/jjap.44.5749

المؤلفون: Harutaka Mekaru, M. Yamashita, N. Sato, Shinji Kusumi, Tadashi Hattori, Osamu Shimada, M. Shimizu

المصدر: The Proceedings of the JSME Materials and Processing Conference (M&P). 2005:44

مصطلحات موضوعية: Materials science, Fabrication, Manufacturing process, Process (computing), Mechanical engineering, LIGA, Spiral, Micro coil

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9cc720254a281be7bf361280d415a0de
https://doi.org/10.1299/jsmeintmp.2005.44_5

المؤلفون: Hiroaki Mochizuki, Harutaka Mekaru, Shinji Kusumi, Noriaki Sato, Masami Shimizu, Michiru Yamashita, Osamu Shimada, Tadashi Hattori

المصدر: Microsystem Technologies; Mar2007, Vol. 13 Issue 5/6, p547-550, 4p

مصطلحات موضوعية: MICROACTUATORS, AUTOMATIC control systems, X-ray lithography, FORCE & energy

المؤلفون: Harutaka Mekaru¹, Shinji Kusumi², Noriaki Sato³, Masami Shimizu³, Michiru Yamashita⁴, Osamu Shimada², Tadashi Hattori⁵

المصدر: Microsystem Technologies. Feb2007, Vol. 13 Issue 3, p393-402. 10p.

مصطلحات موضوعية: *THREE-dimensional imaging, *LITHOGRAPHY, *MICROSTRUCTURE, *ELECTROPLATING