المؤلفون: Shin-Chuan Chen, 陳信全

Thesis Advisors: 蔡坤諭

وصف الملف: 93

الاتاحة: http://ndltd.ncl.edu.tw/handle/29878392878960489265

المؤلفون: Hsin-Hung Pan, Hsing-Hong Chen, Shin-Chuan Chen, Kuen-Yu Tsai, Sheng-Yung Chen

المصدر: Japanese Journal of Applied Physics. 49:06GE05

مصطلحات موضوعية: Microelectromechanical systems, Materials science, Fabrication, business.industry, General Engineering, Process (computing), General Physics and Astronomy, Nanotechnology, Design for manufacturability, Hardware_INTEGRATEDCIRCUITS, Optoelectronics, Systems design, business, Throughput (business), Lithography, Massively parallel

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e2e237ff38f91a31603570d6a0cc07d3
https://doi.org/10.1143/jjap.49.06ge05