المؤلفون: Yeom, H J, Kim, J H, Choi, D H, Choi, E S, Yoon, M Y, Seong, D J, You, Shin Jae, Lee, Hyo-Chang

المساهمون: Korea Research Institute of Standard and Science, R&D Convergence Program

المصدر: Plasma Sources Science and Technology ; volume 29, issue 3, page 035016 ; ISSN 0963-0252 1361-6595

الاتاحة: http://dx.doi.org/10.1088/1361-6595/ab62d9
https://iopscience.iop.org/article/10.1088/1361-6595/ab62d9
https://iopscience.iop.org/article/10.1088/1361-6595/ab62d9/pdf

المؤلفون: Lee, Hyo-Chang, Seo, B. H., Kwon, Deuk-Chul, Kim, J. H., Seong, D. J., Oh, S. J., Chung, C.-W., You, K. H., Shin, ChaeHo

المصدر: Applied Physics Letters, 110(1), Art. No. 014106, (2017-01-02)

Relation: https://doi.org/10.1063/1.4971980; eprintid:73327

الاتاحة: https://doi.org/10.1063/1.4971980

المؤلفون: Kim, D.-W., You, S.-J., Kim, J.-H., Seong, D.-J., Chang, H.-Y., Oh, W.-Y.

المصدر: Journal of Instrumentation ; volume 10, issue 11, page T11001-T11001 ; ISSN 1748-0221

الاتاحة: http://dx.doi.org/10.1088/1748-0221/10/11/t11001
http://stacks.iop.org/1748-0221/10/i=11/a=T11001/pdf
http://stacks.iop.org/1748-0221/10/i=11/a=T11001?key=crossref.4fa339a409c862de42b741313b720b43

المؤلفون: You, K. H., Schulze, Julian, Derzsi, Aranka, Donkó, Zoltán, Yeom, H. J., Kim, J. H., Seong, D. J., Lee, Hyo-Chang

مصطلحات موضوعية: QC Physics / fizika

وصف الملف: text

Relation: http://real.mtak.hu/99200/1/POP_2019_Oxygen_gap_variation.pdf; You, K. H. and Schulze, Julian and Derzsi, Aranka and Donkó, Zoltán and Yeom, H. J. and Kim, J. H. and Seong, D. J. and Lee, Hyo-Chang (2019) Experimental and computational investigations of the effect of the electrode gap on capacitively coupled radio frequency oxygen discharges. Physics of Plasmas, 26. 013503. ISSN 1070-664X

الاتاحة: http://real.mtak.hu/99200/
http://real.mtak.hu/99200/1/POP_2019_Oxygen_gap_variation.pdf
https://doi.org/10.1063/1.5063543

المؤلفون: YEOM, H J, CHOI, D H, LEE, Y S, KIM, J H, SEONG, D J, YOU, S J, LEE, H C

المساهمون: R&D Convergence Program of National Research Council of Science and Technology (NST) of Republic of Korea

المصدر: Plasma Science and Technology ; volume 21, issue 6, page 064007 ; ISSN 1009-0630

الاتاحة: http://dx.doi.org/10.1088/2058-6272/ab0bd3
http://iopscience.iop.org/article/10.1088/2058-6272/ab0bd3
http://iopscience.iop.org/article/10.1088/2058-6272/ab0bd3/pdf
https://iopscience.iop.org/article/10.1088/2058-6272/ab0bd3/pdf
https://iopscience.iop.org/article/10.1088/2058-6272/ab0bd3

المؤلفون: Lee, Hyo-Chang, Chung, Chin-Wook, Kim, J. H., Seong, D. J.

المساهمون: R&D Convergence Program of Korea

المصدر: Applied Physics Letters ; volume 115, issue 6 ; ISSN 0003-6951 1077-3118

الاتاحة: http://dx.doi.org/10.1063/1.5110219
https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/1.5110219/13562598/064102_1_online.pdf

المؤلفون: Choi, Daehan, Kim, Tae-Wan, Shahzad, Rauf, Park, Hyeji, Yeom, H J, Kim, J H, Seong, D J, Kang, Sang-Woo, Yoon, Euijoon, Lee, Hyo-Chang

المساهمون: the National Research Foundation of Korea, R&D Convergence Program

المصدر: Plasma Sources Science and Technology ; volume 27, issue 11, page 114002 ; ISSN 1361-6595

الاتاحة: http://dx.doi.org/10.1088/1361-6595/aae8f6
http://stacks.iop.org/0963-0252/27/i=11/a=114002?key=crossref.542e7cae4ece2a3b6654db6eedab1ed8
http://iopscience.iop.org/article/10.1088/1361-6595/aae8f6/pdf
http://stacks.iop.org/0963-0252/27/i=11/a=114002/pdf
http://iopscience.iop.org/article/10.1088/1361-6595/aae8f6

المؤلفون: You, K. H., You, S. J., Na, B. K., Kim, D. W., Kim, J. H., Seong, D. J., Chang, H. Y.

المساهمون: Korea Research Institute of Standards and Science

المصدر: Physics of Plasmas ; volume 25, issue 1 ; ISSN 1070-664X 1089-7674

الاتاحة: http://dx.doi.org/10.1063/1.5006734
https://pubs.aip.org/aip/pop/article-pdf/doi/10.1063/1.5006734/12728749/013518_1_online.pdf

المؤلفون: You, K. H., You, S. J., Kim, D. W., Na, B. K., Seo, B. H., Kim, J. H., Seong, D. J., Chang, H. Y.

المساهمون: Chungnam National University, Korea Research Institute of Standards and Science, National Research Foundation of Korea

المصدر: Physics of Plasmas ; volume 23, issue 5 ; ISSN 1070-664X 1089-7674

الاتاحة: http://dx.doi.org/10.1063/1.4951029
https://pubs.aip.org/aip/pop/article-pdf/doi/10.1063/1.4951029/15941010/053515_1_online.pdf

المؤلفون: Lee, Hyo-Chang, Chung, Chin-Wook, Kim, J. H., Seong, D. J.

المصدر: Applied Physics Letters; 8/5/2019, Vol. 115 Issue 6, pN.PAG-N.PAG, 5p, 1 Diagram, 3 Graphs

مصطلحات موضوعية: ELECTRON distribution, ELECTRON plasma, RADIO frequency, ELECTRIC fields, ENERGY function

المؤلفون: Baek, I. G., Park, C. J., Ju, H., Seong, D. J., Ahn, H. S., Kim, J. H., Yang, M. K., Song, S. H., Kim, E. M., Park, S. O., Park, C. H., Song, C. W., Jeong, G. T., Choi, S., Kang, H. K., Chung, C.

المصدر: 2011 International Electron Devices Meeting ; page 31.8.1-31.8.4

الاتاحة: http://dx.doi.org/10.1109/iedm.2011.6131654
http://xplorestaging.ieee.org/ielx5/6123666/6131464/06131654.pdf?arnumber=6131654

المؤلفون: Seo, B. H., Kim, J. H., You, S. J., Seong, D. J.

المساهمون: Chungnam National University, Korea Research Council of Fundamental Science and Technology, Korea Research Institute of Standards and Science, Ministry of Science, ICT and Future Planning, Ministry of Trade, Industry and Energy

المصدر: Physics of Plasmas ; volume 22, issue 12 ; ISSN 1070-664X 1089-7674

الاتاحة: http://dx.doi.org/10.1063/1.4936288
https://pubs.aip.org/aip/pop/article-pdf/doi/10.1063/1.4936288/13974642/123502_1_online.pdf

المؤلفون: Lee, J., Lee, W., Jo, M., Park, J., Seong, D.-J., Jung, S., Kim, S., Shin, J., Park, S., Hwang, H.

المصدر: 2009 International Semiconductor Device Research Symposium ; page 1-2

الاتاحة: http://dx.doi.org/10.1109/isdrs.2009.5378123
http://xplorestaging.ieee.org/ielx5/5372454/5378000/05378123.pdf?arnumber=5378123

المؤلفون: Dong, R., Hasan, M., Choi, H. J., Lee, D. S., Pyun, M. B., Seong, D. J., Hwang, Hyunsang

المصدر: 2008 9th International Conference on Solid-State and Integrated-Circuit Technology ; page 901-904

الاتاحة: http://dx.doi.org/10.1109/icsict.2008.4734691
http://xplorestaging.ieee.org/ielx5/4700819/4734459/04734691.pdf?arnumber=4734691

المؤلفون: Seo, BH Seo, Byong-Hoon, You, SJ You, S. J., Kim, JH Kim, J. H., Seong, DJ Seong, D. J., Shin, YH Shin, Y. H., Chang, HY Chang, Hong-Young

الاتاحة: http://hdl.handle.net/10203/188480
https://doi.org/10.1016/j.tsf.2013.05.011

المؤلفون: You, KH You, Kwang-Ho, You, SJ You, S. J., Kim, DW Kim, D. W., Na, BK Na, Byung-Keun, Seo, BH Seo, Byong-Hoon, Kim, JH Kim, J. H., Shin, YH Shin, Y. H., Seong, DJ Seong, D. J., Chang, HY Chang, Hong-Young

الاتاحة: http://hdl.handle.net/10203/188472
https://doi.org/10.1016/j.tsf.2013.01.026

المؤلفون: Seo, BH Seo, Byong-Hoon, You, SJ You, S. J., Kim, JH Kim, J. H., Seong, DJ Seong, D. J., Chang, HY Chang, Hong-Young

الاتاحة: http://hdl.handle.net/10203/174785
https://doi.org/10.1063/1.4798587

المؤلفون: Seo, BH Seo, B. H., You, SJ You, S. J., You, GH You, G. H., Kim, JH Kim, J. H., Yoo, YS Yoo, Y. S., Seong, DJ Seong, D. J., Chang, HY Chang, H. Y.

الاتاحة: http://hdl.handle.net/10203/103175
https://doi.org/10.1088/1748-0221/7/01/C01049

المؤلفون: You, SJ You, S. J., Park, GY Park, G. Y., Kwon, JH Kwon, J. H., Kim, JH Kim, J. H., Chang, HY Chang, Hong-Young, Lee, JK Lee, J. K., Seong, DJ Seong, D. J., Shin, YH Shin, Y. H.

الاتاحة: http://hdl.handle.net/10203/99583
http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=000275588000022&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=395d0a69a77a4892902e43d8987013d5
https://doi.org/10.1063/1.3309589

المؤلفون: Dong, R., Lee, D. S., Pyun, M. B., Hasan, M., Choi, H. J., Jo, M. S., Seong, D. J., Chang, M., Heo, S. H., Lee, J. M., Park, H. K., Hwang, Hyunsang

المصدر: Applied Physics A ; volume 93, issue 2, page 409-414 ; ISSN 0947-8396 1432-0630

الاتاحة: http://dx.doi.org/10.1007/s00339-008-4782-x
http://link.springer.com/content/pdf/10.1007/s00339-008-4782-x.pdf
http://link.springer.com/article/10.1007/s00339-008-4782-x/fulltext.html
http://link.springer.com/content/pdf/10.1007/s00339-008-4782-x