المؤلفون: Mayer, Andre, Pourdavoud, Neda, Doukkali, Zineb, Brinkmann, Kai, Rond, Johannes, Staabs, Johannes, Swertz, Ann-Christin, van gen Hassend, Frederic, Görrn, Patrick, Riedl, Thomas, Scheer, Hella-Christin

المساهمون: Deutsche Forschungsgemeinschaft, Bergische Universität Wuppertal

المصدر: Applied Physics A ; volume 127, issue 4 ; ISSN 0947-8396 1432-0630

الاتاحة: http://dx.doi.org/10.1007/s00339-021-04366-3
https://link.springer.com/content/pdf/10.1007/s00339-021-04366-3.pdf
https://link.springer.com/article/10.1007/s00339-021-04366-3/fulltext.html

المؤلفون: Mayer, Andre, Haeger, Tobias, Runkel, Manuel, Rond, Johannes, Staabs, Johannes, van gen Hassend, Frederic, Röttger, Arne, Görrn, Patrick, Riedl, Thomas, Scheer, Hella-Christin

المساهمون: deutsche forschungsgemeinschaft, Bergische Universität Wuppertal

المصدر: Applied Physics A ; volume 127, issue 9 ; ISSN 0947-8396 1432-0630

الاتاحة: http://dx.doi.org/10.1007/s00339-021-04830-0
https://link.springer.com/content/pdf/10.1007/s00339-021-04830-0.pdf
https://link.springer.com/article/10.1007/s00339-021-04830-0/fulltext.html

المؤلفون: Pourdavoud, Neda, Haeger, Tobias, Becker‐Koch, David, Stein, Markus, Cehovski, Marko, Charfi, Ouacef, Johannes, Hans‐Hermann, Rogalla, Detlef, Lemme, Max C., Koch, Martin, Vaynzof, Yana, Meerholz, Klaus, Mayer, Andre, Kowalsky, Wolfgang, Scheer, Hella‐Christin, Görrn, Patrick, Riedl, Thomas, Cegielski, Piotr Jacek, Giesecke, Anna Lena, Heiderhoff, Ralf, Olthof, Selina, Zaefferer, Stefan, Shutsko, Ivan, Henkel, Andreas

المصدر: Advanced materials 2019, 1903717 (2019). doi:10.1002/adma.201903717

مصطلحات موضوعية: info:eu-repo/classification/ddc/660

جغرافية الموضوع: DE

Relation: info:eu-repo/semantics/altIdentifier/issn/1521-4095; info:eu-repo/semantics/altIdentifier/pmid/pmid:31402527; info:eu-repo/semantics/altIdentifier/wos/WOS:000480446900001; info:eu-repo/semantics/altIdentifier/issn/0935-9648; https://publications.rwth-aachen.de/record/767142; https://publications.rwth-aachen.de/search?p=id:%22RWTH-2019-08591%22

الاتاحة: https://publications.rwth-aachen.de/record/767142
https://publications.rwth-aachen.de/search?p=id:%22RWTH-2019-08591%22

المؤلفون: Zimmer, Klaus, Zajadacz, Joachim, Lorenz, Pierre, Mayer, Andre, Papenheim, Marc, Scheer, Hella-Christin

المساهمون: Deutsche Forschungsgemeinschaft

المصدر: Journal of Micromechanics and Microengineering ; volume 30, issue 2, page 025008 ; ISSN 0960-1317 1361-6439

الاتاحة: http://dx.doi.org/10.1088/1361-6439/ab60bd
https://iopscience.iop.org/article/10.1088/1361-6439/ab60bd
https://iopscience.iop.org/article/10.1088/1361-6439/ab60bd/pdf

المؤلفون: Riedl, Thomas J., Pourdavoud, Neda, Mayer, Andre, Haeger, Tobias, Heiderhoff, Ralf, Shutsko, Ivan, Scheer, Hella-Christin, Görrn, Patrick

المساهمون: Bronstein, Hugo A., Deschler, Felix

المصدر: Physical Chemistry of Semiconductor Materials and Interfaces XVII

الاتاحة: http://dx.doi.org/10.1117/12.2319364

المؤلفون: Zimmer, Klaus, Zajadacz, Joachim, Frost, Frank, Mayer, Andre, Steinberg, Christian, Chang, Hui-Fang, Cheng, Ji-Yen, Scheer, Hella-Christin

المساهمون: German Research Foundation

المصدر: Applied Surface Science ; volume 470, page 639-644 ; ISSN 0169-4332

الاتاحة: http://dx.doi.org/10.1016/j.apsusc.2018.11.105
https://api.elsevier.com/content/article/PII:S0169433218331842?httpAccept=text/xml
https://api.elsevier.com/content/article/PII:S0169433218331842?httpAccept=text/plain

المؤلفون: Pourdavoud, Neda, Mayer, Andre, Wang, Si, Hu, Ting, Zhao, Jie, Brinkmann, Kai, Heiderhoff, Ralf, Marianovich, André, Kowalsky, Wolfgang, Scheer, Hella-Christin, Riedl, Thomas J.

المساهمون: Bronstein, Hugo A., Deschler, Felix

المصدر: Physical Chemistry of Semiconductor Materials and Interfaces XVI

الاتاحة: http://dx.doi.org/10.1117/12.2273186

المؤلفون: Pourdavoud, Neda, Mayer, André, Buchmüller, Maximilian, Brinkmann, Kai, Häger, Tobias, Hu, Ting, Heiderhoff, Ralf, Shutsko, Ivan, Görrn, Patrick, Chen, Yiwang, Scheer, Hella‐Christin, Riedl, Thomas

المساهمون: Bundesministerium für Bildung und Forschung, Deutsche Forschungsgemeinschaft, European Research Council

المصدر: Advanced Materials Technologies ; volume 3, issue 4 ; ISSN 2365-709X 2365-709X

الاتاحة: http://dx.doi.org/10.1002/admt.201700253
https://api.wiley.com/onlinelibrary/tdm/v1/articles/10.1002%2Fadmt.201700253
https://onlinelibrary.wiley.com/doi/pdf/10.1002/admt.201700253

المؤلفون: Schröer, Miriam, Scheer, Hella-Christin

المصدر: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Jan2021, Vol. 39 Issue 1, p1-10, 10p

مصطلحات موضوعية: SURFACE cracks, MECHANICAL behavior of materials, SURFACE hardening, POLYDIMETHYLSILOXANE, SURFACE properties

المؤلفون: Steinberg, Christian, Rumler, Maximilian, Runkel, Manuel, Papenheim, Marc, Wang, Si, Mayer, Andre, Becker, Marco, Rommel, Mathias, Scheer, Hella-Christin

مصطلحات موضوعية: SU-8, CAR44, UV-PDMS, 3D structures, VUV treatment, thermal imprint, sacrificial mould technique

Time: 621

Relation: Microelectronic engineering; https://publica.fraunhofer.de/handle/publica/247002

الاتاحة: https://publica.fraunhofer.de/handle/publica/247002
https://doi.org/10.1016/j.mee.2017.01.009

المؤلفون: Förthner, Michael, Papenheim, Marc, Rumler, Maximilian, Stumpf, Florian, Baier, Leander, Rommel, Mathias, Scheer, Hella-Christin, Frey, Lothar

مصطلحات موضوعية: nanoimprint lithography, soft lithography, stamp deformation, hybrid polymer

Time: 530

Relation: Journal of applied physics; FR-713/10-1; https://publica.fraunhofer.de/handle/publica/250143

الاتاحة: https://publica.fraunhofer.de/handle/publica/250143
https://doi.org/10.1063/1.5001463

المؤلفون: Pourdavoud, Neda, Wang, Si, Mayer, André, Hu, Ting, Chen, Yiwang, Marianovich, André, Kowalsky, Wolfgang, Heiderhoff, Ralf, Scheer, Hella‐Christin, Riedl, Thomas

المساهمون: Bundesministerium für Bildung und Forschung

المصدر: Advanced Materials ; volume 29, issue 12 ; ISSN 0935-9648 1521-4095

الاتاحة: http://dx.doi.org/10.1002/adma.201605003
https://api.wiley.com/onlinelibrary/tdm/v1/articles/10.1002%2Fadma.201605003
https://onlinelibrary.wiley.com/doi/pdf/10.1002/adma.201605003

المؤلفون: Mayer, Andre, Blenskens, Dainel, Rond, Johannes, Steinberg, Christian, Papenheim, Marc, Wang, Si, Zajadacz, Joachim, Zimmer, Klaus, Scheer, Hella-Christin

المصدر: Microelectronic Engineering ; volume 176, page 94-100 ; ISSN 0167-9317

الاتاحة: http://dx.doi.org/10.1016/j.mee.2017.02.003
https://api.elsevier.com/content/article/PII:S0167931717300515?httpAccept=text/xml
https://api.elsevier.com/content/article/PII:S0167931717300515?httpAccept=text/plain

المؤلفون: Heiderhoff, Ralf, Haeger, Tobias, Pourdavoud, Neda, Hu, Ting, Al-Khafaji, Mine, Mayer, Andre, Chen, Yiwang, Scheer, Hella-Christin, Riedl, Thomas

المساهمون: Bundesministerium f?r Bildung und Forschung, Deutsche Forschungsgemeinschaft

المصدر: The Journal of Physical Chemistry C ; volume 121, issue 51, page 28306-28311 ; ISSN 1932-7447 1932-7455

الاتاحة: http://dx.doi.org/10.1021/acs.jpcc.7b11495
https://pubs.acs.org/doi/pdf/10.1021/acs.jpcc.7b11495

المؤلفون: Wang, Si, Rond, Johannes, Steinberg, Christian, Papenheim, Marc, Scheer, Hella-Christin

المصدر: Applied Physics A ; volume 122, issue 2 ; ISSN 0947-8396 1432-0630

الاتاحة: http://dx.doi.org/10.1007/s00339-016-9640-7
http://link.springer.com/content/pdf/10.1007/s00339-016-9640-7.pdf
http://link.springer.com/article/10.1007/s00339-016-9640-7/fulltext.html
http://link.springer.com/content/pdf/10.1007/s00339-016-9640-7

المؤلفون: Steinberg, Christian, Papenheim, Marc, Wang, Si, Scheer, Hella-Christin

المساهمون: Deutsche Forschungsgemeinschaft (DFG)

المصدر: Microelectronic Engineering ; volume 155, page 14-18 ; ISSN 0167-9317

الاتاحة: http://dx.doi.org/10.1016/j.mee.2016.01.036
https://api.elsevier.com/content/article/PII:S0167931716300363?httpAccept=text/xml
https://api.elsevier.com/content/article/PII:S0167931716300363?httpAccept=text/plain

المؤلفون: Papenheim, Marc, Eidemüller, Wolfgang, Wang, Si, Steinberg, Christian, Scheer, Hella-Christin

المساهمون: Deutsche Forschungsgesellschaft

المصدر: Microelectronic Engineering ; volume 155, page 79-84 ; ISSN 0167-9317

الاتاحة: http://dx.doi.org/10.1016/j.mee.2016.02.048
https://api.elsevier.com/content/article/PII:S0167931716300909?httpAccept=text/xml
https://api.elsevier.com/content/article/PII:S0167931716300909?httpAccept=text/plain

المؤلفون: Förthner, Michael, Papenheim, Marc, Rumler, Maximilian, Stumpf, Florian, Baier, Leander, Rommel, Mathias, Schlachter, Florian, Hornung, Michael, Scheer, Hella-Christin, Frey, Lothar

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::95482544c6a3aa32357eeb4ceee79ce2

المؤلفون: Scheer, Hella-Christin

المساهمون: Thienpont, Hugo, Mohr, Jürgen, Zappe, Hans, Nakajima, Hirochika

المصدر: Micro-Optics 2012 ; SPIE Proceedings ; ISSN 0277-786X

الاتاحة: http://dx.doi.org/10.1117/12.922722

المؤلفون: Mayer, Andre, Dhima, Khalid, Möllenbeck, Saskia, Wang, Si, Scheer, Hella-Christin

المساهمون: Behringer, Uwe F.W., Maurer, Wilhelm

المصدر: SPIE Proceedings ; 28th European Mask and Lithography Conference ; ISSN 0277-786X

الاتاحة: http://dx.doi.org/10.1117/12.918037