المؤلفون: Bartoli, Florian, Streque, Jérémy, Ghanbaja, Jaafar, Pigeat, Philippe, Boulet, Pascal, Hage-Ali, Sami, Naumenko, Natalya, Redjaïmia, A., Aubert, Thierry, Elmazria, Omar

المساهمون: Institut Jean Lamour (IJL), Institut de Chimie - CNRS Chimie (INC-CNRS)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), National University of Science and Technology (MISIS), Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), ANR-15-CE08-0015,SALSA,Micro-capteur à ondes élastiques de surface à base de structures AlN/Saphir pour des températures extrêmes(2015), ANR-15-IDEX-0004,LUE,Isite LUE(2015)

المصدر: ISSN: 1424-8220 ; Sensors ; https://hal.science/hal-02916341 ; Sensors, 2020, 20 (16), pp.4630. ⟨10.3390/s20164630⟩.

مصطلحات موضوعية: ScAlN thin films, sputtering, hetero-epitaxial films, SAW sensors, [SPI.MAT]Engineering Sciences [physics]/Materials, [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], [SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph]

الاتاحة: https://hal.science/hal-02916341
https://hal.science/hal-02916341v1/document
https://hal.science/hal-02916341v1/file/sensors-20-04630.pdf
https://doi.org/10.3390/s20164630

المؤلفون: Florian, Bartoli, Jérémy, Streque, Jaafar, Ghanbaja, Philippe, Pigeat, Pascal, Boulet, Sami, Hage-Ali, Natalya, Naumenko, A, Redjaïmia, Thierry, Aubert, Omar, Elmazria

المصدر: Sensors (Basel, Switzerland)

مصطلحات موضوعية: ScAlN thin films, hetero-epitaxial films, SAW sensors, sputtering, Article

URL الوصول: https://explore.openaire.eu/search/publication?articleId=pmid________::edc2a01da4f35e8ef79a048e2432683b
https://pubmed.ncbi.nlm.nih.gov/32824582

المؤلفون: Akihiko TESHIGAHARA, Kazuhiko KANO, Keiko NISHIKUBO, Morito AKIYAMA, Tatsuo TABARU

المصدر: Journal of the Ceramic Society of Japan. 2010, 118(1384):1166