المؤلفون: Vladimir Vitalevitch Ivanov, V. M. Krivtsun, Konstantin Nikolaevitch Koshelev, O. F. Yakushev, Alexey Kiselev, Alexander Lash, M. S. Krivokorytov, Vyacheslav Medvedev, Denis Glushkov, Eugene Gorsky, Samir Ellwi, Alexander Vinokhodov, Vladimir Gubarev

المصدر: International Conference on Extreme Ultraviolet Lithography 2021.

مصطلحات موضوعية: Physics, Water window, Liquid metal, Brightness, Optics, Light source, business.industry, Product (mathematics), Extreme ultraviolet lithography, Laser power scaling, Radiation, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::7081e7dc277027962a99833412a62382
https://doi.org/10.1117/12.2601008

المؤلفون: Yuri Sidelnikov, Konstantin Nikolaevitch Koshelev, Alexander Lash, Vyacheslav Medvedev, Samir Ellwi, V. M. Krivtsun, Dimitri Abramenko, Rainer Lebert, Vladimir Vitalevitch Ivanov, Alexey Yakushkin, Denis Glushkov, M. S. Krivokorytov, O. F. Yakushev, Pavel Viktorovich Seroglazov, Alexander Vinokhodov

المصدر: International Conference on Extreme Ultraviolet Lithography 2018.

مصطلحات موضوعية: Brightness, Scanner, business.industry, Computer science, Extreme ultraviolet lithography, Laser, law.invention, Metrology, Optics, Light source, law, Microscopy, business, Efficient energy use

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::12a3131a80600e4b94b3cc41790b576a
https://doi.org/10.1117/12.2501812

المؤلفون: V.M. Krivtsun, Samir Ellwi, Konstantin N Koshelev, A. Vinokhodov, V. Bushuev, M. S. Krivokorytov, Denis Alexandrovich Glushkov, Yu. V. Sidelnikov, Viacheslav Medvedev

المصدر: The Review of scientific instruments. 87(10)

مصطلحات موضوعية: 010302 applied physics, Jet (fluid), Brightness, Materials science, business.industry, Extreme ultraviolet lithography, 02 engineering and technology, Plasma, 021001 nanoscience & nanotechnology, Laser, 01 natural sciences, law.invention, symbols.namesake, Optics, Operating temperature, law, Extreme ultraviolet, 0103 physical sciences, symbols, Rayleigh scattering, 0210 nano-technology, business, Instrumentation

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::49566b4bbc59533221f0bdc4818bcc7a
https://pubmed.ncbi.nlm.nih.gov/27802692

المؤلفون: Samir Ellwi, Hans-Joachim Kunze, Željko Andreić

المصدر: Physics Letters A. 334:37-41

مصطلحات موضوعية: Physics, Capillary action, business.industry, General Physics and Astronomy, Population inversion, Instability, Conductor, Physics::Fluid Dynamics, Wavelength, Optics, Physics::Plasma Physics, Ablative case, Atomic physics, business, EUV laser, ablative capillary discharge, Lasing threshold, Charge exchange

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a0433b34a209ede507693b775e6cf1ae
https://doi.org/10.1016/j.physleta.2004.10.081

المؤلفون: Samir Ellwi, Hans-Joachim Kunze, Sanda Pleslić, Željko Andreić

المصدر: Vacuum. 71:229-232

مصطلحات موضوعية: Chemistry, Capillary action, Extreme ultraviolet lithography, Analytical chemistry, Plasma, EUV source, Ablative capillary discharge, 13.5 nm source, Radiation, Condensed Matter Physics, Spectral line, Surfaces, Coatings and Films, Ion, Thermalisation, Capillary Plasma, Instrumentation

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5cd92f4487d91b353ee5b1ed9c2bc90d
https://doi.org/10.1016/s0042-207x(02)00742-x

المؤلفون: C. Fleurier, Samir Ellwi, Jean-Michel Pouvesle, J. Pons, Raymond Viladrosa, Remi Dussart, S. Götze, Hans-Joachim Kunze, Željko Andreić

المصدر: Physics Letters A. 299:571-576

مصطلحات موضوعية: Physics, Capillary action, business.industry, medicine.medical_treatment, General Physics and Astronomy, Plasma, Ablation, body regions, Optics, Extreme ultraviolet, Ablative case, medicine, Pinhole (optics), Plasma column, Spectroscopy, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c06bf2159e8a4d18008b191eaf7da015
https://doi.org/10.1016/s0375-9601(02)00749-1

المؤلفون: Hans-Joachim Kunze, Samir Ellwi, Larissa Juschkin, A. Chuvatin, S. V. Zakharov

المصدر: Journal of Physics D: Applied Physics. 35:219-227

مصطلحات موضوعية: Range (particle radiation), Acoustics and Ultrasonics, Plasma parameters, Krypton, chemistry.chemical_element, Plasma, Radiation, Condensed Matter Physics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Ion, Xenon, chemistry, Plasma diagnostics, Atomic physics

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b5d604e216d940222de0224468ab5f96
https://doi.org/10.1088/0022-3727/35/3/309

المؤلفون: Ian Henderson, Reza S. Abhari, Andrea Z. Giovannini, Samir Ellwi, Oran Morris

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Brightness, business.industry, Extreme ultraviolet lithography, Contamination, Laser, Metrology, law.invention, Optics, law, Extreme ultraviolet, Optoelectronics, Environmental science, Laser beam quality, business, Focus (optics)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a7b86c63cbd4a17cf7f2c7eaf3f09893
https://doi.org/10.1117/12.879598

المؤلفون: Željko Andreić, Hans-Joachim Kunze, Samir Ellwi

مصطلحات موضوعية: Shock wave, business.industry, Capillary action, Chemistry, Radiant energy, Plasma, Kink instability, law.invention, Optics, law, Rise time, Pinch, Gas-filled tube, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2f65b22a4ebed98c0f2086ad86a6bdc8
https://doi.org/10.1117/3.613774.ch18

المؤلفون: Michael Brownell, Andrew J. Comley, Samir Ellwi

مصطلحات موضوعية: Engineering, business.industry, Extreme ultraviolet lithography, Energy conversion efficiency, Semiconductor device, Laser, USable, Multiplexing, law.invention, Optics, law, Scalability, Photolithography, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9b02a8d7e46c9a14b994bd959dab95f3
https://doi.org/10.1117/3.613774.ch20

المؤلفون: Paul M. Harrison, Samir Ellwi

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Materials science, business.industry, Surface engineering, engineering.material, Laser, Flat panel display, law.invention, Power (physics), Optics, Coating, law, engineering, Thin film, business, Pulse-width modulation, Gaussian beam

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::703978eb50a8db5e7191770bc02db413
https://doi.org/10.1117/12.814857

المؤلفون: Kazutoshi Takenoshita, Tobias Schmid, Simi A. George, Jose Cunado, Martin C. Richardson, Ben Fulford, Ian Henderson, Nick Hay, Samir Ellwi

المصدر: Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies.

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e6cb62984fa6dea0419bc39d89e28c62
https://doi.org/10.1364/phast.2007.pthc7

المؤلفون: N. Hay, Andrew Comley, Samir Ellwi, Ian Henderson, Michael Brownell

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Materials science, business.industry, Extreme ultraviolet lithography, Pulse duration, chemistry.chemical_element, Modular design, Laser, Multiplexing, Power (physics), law.invention, Xenon, Optics, chemistry, law, Extreme ultraviolet, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::147c8d162ee4fea946ee4f720bb6edd4
https://doi.org/10.1117/12.598721

المؤلفون: Hans-Joachim Kunze, Samir Ellwi, Sanda Pleslić, Željko Andreić

مصطلحات موضوعية: Physics, Full width at half maximum, Narrow band, Optics, Capillary action, business.industry, EUV sources, Ablative capillary discharge, Extreme ultraviolet, Extreme ultraviolet lithography, Energy conversion efficiency, General Physics and Astronomy, Radiation, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e151157ec963b33ebc183d6a93703155
https://www.bib.irb.hr/187634

المؤلفون: Samir Ellwi, Andy J. Comley, Michael F. Brownell, N. Hay

المصدر: High-Power Laser Ablation V.

مصطلحات موضوعية: Materials science, business.industry, Extreme ultraviolet lithography, Energy conversion efficiency, chemistry.chemical_element, Plasma, Laser, law.invention, Power (physics), Optics, Xenon, chemistry, law, Extreme ultraviolet, Optoelectronics, business, Cost of ownership

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a3d2ca638e11bfbc1eea1332a5cb404c
https://doi.org/10.1117/12.549228

المؤلفون: Nicolas Powerlase Ltd Hay, Michael F. Brownell, Samir Ellwi, Andrew Comley

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Materials science, business.industry, Extreme ultraviolet lithography, Energy conversion efficiency, Short pulse laser, chemistry.chemical_element, Plasma, Laser, law.invention, Power (physics), Optics, Xenon, chemistry, law, Extreme ultraviolet, Optoelectronics, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a14be9524e8ed5f1526e82284e653f86
https://doi.org/10.1117/12.534015

المؤلفون: Hans-Joachim Kunze, Željko Andreić, Samir Ellwi

المساهمون: Kunze, H.-J., El-Khalafawy, T., Hegazy, H.

مصطلحات موضوعية: Materials science, x-ray lasing, Capillary action, General Physics and Astronomy, Plasma, Population inversion, Laser, capillary plasma discharge, soft x-ray laser, Instability, Ion, law.invention, Wavelength, law, Atomic physics, Lasing threshold

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d14a917907d9e049b584f1c9eadea382
https://www.bib.irb.hr/451029

المؤلفون: Terrance Nowell, Samir Ellwi, Peter Raven, Ian P. Mercer, Duncan Parsons-Karavassilis, Ian Henderson, Michael Egan, Andrew Comley, Sebastian Davis-Ansted, Michael Mason, Paul Harrison, Matt Kelly, Ian Morris, Alan G. Taylor, Mark Middleton, David R. Klug, Adrain Russel

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Materials science, business.industry, Extreme ultraviolet lithography, Energy conversion efficiency, Plasma, Radiation, Laser, law.invention, Optics, law, Extreme ultraviolet, Scalability, Optoelectronics, Laser power scaling, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4817a53e9905fa66943aa92bd4c4953a
https://doi.org/10.1117/12.482129

المؤلفون: Sanda Pleslić, Samir Ellwi, Željko Andreić, Hans-Joachim Kunze

مصطلحات موضوعية: Ablative capillary discharge, XUV radiation source, business.industry, Capillary action, Chemistry, Radiant energy, Surfaces and Interfaces, Radiation, Condensed Matter Physics, Surfaces, Coatings and Films, Wavelength, Full width at half maximum, Optics, Extreme ultraviolet, Materials Chemistry, Optoelectronics, business, Lithography, Intensity (heat transfer)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5bf7b70d69b6b3a1a032d01d3a8e3756
https://www.bib.irb.hr/124116

المؤلفون: Hans-Joachim Kunze, Larissa Juschkin, E. Louis, Samir Ellwi, Konstantin N Koshelev, S. Ferri

المساهمون: Ruhr-Universität Bochum [Bochum]

المصدر: Journal of Physics D: Applied Physics
Journal of Physics D: Applied Physics, IOP Publishing, 2001, 34 (3), pp.336-339. ⟨10.1088/0022-3727/34/3/315⟩
Journal of Physics D-Applied Physics, 34, 336-339

مصطلحات موضوعية: 010302 applied physics, Amplified spontaneous emission, Acoustics and Ultrasonics, Chemistry, Capillary action, X-ray, Balmer series, Condensed Matter Physics, 01 natural sciences, Instability, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Ion, symbols.namesake, Physics::Plasma Physics, [PHYS.PHYS.PHYS-PLASM-PH]Physics [physics]/Physics [physics]/Plasma Physics [physics.plasm-ph], 0103 physical sciences, symbols, Atomic physics, 010306 general physics, Lasing threshold, Line (formation)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::759db17b2c557f39654b2e95450aa11b
https://hal.archives-ouvertes.fr/hal-01178568