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1Report
المؤلفون: Shalashov, A. G., Vodopyanov, A. V., Abramov, I. S., Sidorov, A. V., Gospodchikov, E. D., Razin, S. V., Chkhalo, N. I., Salashchenko, N. N., Glyavin, M. Yu., Golubev, S. V.
المصدر: Appl. Phys. Lett. 113, 153502 (2018); https://doi.org/10.1063/1.5049126
مصطلحات موضوعية: Physics - Plasma Physics, Physics - Applied Physics
URL الوصول: http://arxiv.org/abs/1807.06836
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2Academic Journal
المؤلفون: Garakhin, S. A., Lopatin, A. Yu., Nechay, A. N., Perekalov, A. A., Pestov, A. E., Salashchenko, N. N., Tsybin, N. N., Chkhalo, N. I.
المصدر: Technical Physics; Jun2024, Vol. 69 Issue 6, p1568-1574, 7p
مصطلحات موضوعية: LASER plasmas, LASER beams, X-ray spectrometers, X-ray spectroscopy, PLASMA radiation
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3Conference
المؤلفون: Chkhalo, N. I., Malyshev, I. V., Pestov, A. E., Polkovnikov, V. N., Reunov, D. G., Salashchenko, N. N., Toropov, M. N., Chernov, V. A., Rakshun, Ia. V., Zolotarev, K. V., Shchelokov, I. A.
المصدر: AIP Conference Proceedings ; SYNCHROTRON AND FREE ELECTRON LASER RADIATION: Generation and Application (SFR-2020) ; volume 2299, page 060005 ; ISSN 0094-243X
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4Academic Journal
المؤلفون: Sertsu, M.G., Sokolov, A., Chkhalo, N., Polkovnikov, V., Salashchenko, N., Svechnikov, M., Schäfers, F.
مصطلحات موضوعية: Large scale facilities for research with photons neutrons and ions
وصف الملف: application/pdf
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5Academic Journal
المؤلفون: Lopatin, A. Ya., Luchin, V. I., Nachay, A. N., Perekalov, A. A., Pestov, A. E., Salashchenko, N. N., Soloviev, A. A., Tsybin, N. N., Chkhalo, N. I.
المصدر: Technical Physics; May2024, Vol. 69 Issue 5, p1259-1263, 5p
مصطلحات موضوعية: ND-YAG lasers, X-ray spectra, LASER beams, ULTRAVIOLET radiation, RADIOGRAPHIC films
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6Academic Journal
المصدر: Technical Physics; 2024, Vol. 69 Issue 4, p876-882, 7p
مصطلحات موضوعية: ULTRAVIOLET spectra, LASER plasmas, PLASMA jets, GAS lasers, PLASMA waves
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7Academic Journal
المصدر: Technical Physics; 2024, Vol. 69 Issue 4, p818-823, 6p
مصطلحات موضوعية: SYNCHROTRON radiation, X-ray optics, REFLECTANCE, OPTICS, LITHOGRAPHY
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8Academic Journal
المؤلفون: Barysheva, M. M., Garakhin, S. A., Lopatin, A. Ya., Luchin, V. I., Malyshev, I. V., Salashchenko, N. N., Tsybin, N. N., Chkhalo, N. I.
المصدر: Technical Physics; 2024, Vol. 69 Issue 4, p785-791, 7p
مصطلحات موضوعية: VISIBLE spectra, SOFT X rays, WAVELENGTHS, MONOMOLECULAR films, ABSORPTION
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9Academic Journal
المؤلفون: Shaposhnikov, R. A., Zuev, S. Yu., Polkovnikov, V. N., Salashchenko, N. N., Chkhalo, N. I.
المصدر: Technical Physics; 2024, Vol. 69 Issue 3, p713-718, 6p
مصطلحات موضوعية: RADIATION, LITHOGRAPHY, MIRRORS, X-rays, REFLECTANCE
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10Academic Journal
المؤلفون: Antyushin, E. S., Akhsakhalyan, A. A., Zuev, S. Yu., Lopatin, A. Ya., Malyshev, I. V., Nechay, A. N., Perekalov, A. A., Pestov, A. E., Salashchenko, N. N., Toropov, M. N., Ulasevich, B. A., Tsybin, N. N., Chkhalo, N. I., Soloviev, A. A., Starodubtsev, M. V.
المصدر: Technical Physics; 2024, Vol. 69 Issue 3, p480-484, 5p
مصطلحات موضوعية: DICHROIC filters, OPTICAL elements, IMAGING systems, PLASMA torch, RADIATION sources
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11Academic Journal
المؤلفون: Svechnikov, M., Chkhalo, N., Lopatin, A., Pleshkov, R., Polkovnikov, V., Salashchenko, N., Schäfers, F., Sertsu, M.G., Sokolov, A., Tsybin, N.
مصطلحات موضوعية: Large scale facilities for research with photons neutrons and ions
وصف الملف: application/pdf
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12Academic Journal
المؤلفون: Guseva, V. E., Mikhailenko, M. S., Nechai, A. N., Perekalov, A. A., Salashchenko, N. N., Chkhalo, N. I.
المصدر: Instruments & Experimental Techniques; Feb2024, Vol. 67 Issue 1, p67-74, 8p
مصطلحات موضوعية: LASER plasmas, LASER-induced breakdown spectroscopy, X-ray spectrometers, MOLECULAR spectra, SPECTROMETERS, Q-switched lasers, NOZZLES
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13Academic Journal
المؤلفون: Zuev, S. Yu., Lopatin, A. Ya., Luchin, V. I., Salashchenko, N. N., Tatarskiy, D. A., Tsybin, N. N., Chkhalo, N. I.
المصدر: Technical Physics; 2023 Suppl 3, Vol. 68, pS630-S636, 7p
مصطلحات موضوعية: THERMAL stability, THIN films, BERYLLIUM, POWER density, COMPARATIVE studies, EXTREME ultraviolet lithography
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14Academic Journal
المؤلفون: Chkhalo, N. I., Durov, K. V., Nechay, A. N., Perekalov, A. A., Polkovnikov, V. N., Salashchenko, N. N.
المصدر: Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques; 2023 Suppl 1, Vol. 17, pS226-S232, 7p
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15Academic Journal
المصدر: Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques; Dec2023, Vol. 17 Issue 6, p1323-1331, 9p
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16Academic Journal
المساهمون: Ministry of Science and Higher Education of the Russian Federation
المصدر: Applied Physics B ; volume 129, issue 10 ; ISSN 0946-2171 1432-0649
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17Academic Journal
المؤلفون: Nechay, A. N., Perekalov, A. A., Salashchenko, N. N., Chkhalo, N. I.
المساهمون: Ministry of Science and Higher Education of the Russian Federation
المصدر: Applied Physics B ; volume 129, issue 3 ; ISSN 0946-2171 1432-0649
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18Academic Journal
المؤلفون: Chkhalo, N. I., Garakhin, S. A., Lopatin, A. Ya., Nechay, A. N., Pestov, A. E., Polkovnikov, V. N., Salashchenko, N. N., Tsybin, N. N., Zuev, S. Yu.
المصدر: AIP Advances ; volume 8, issue 10 ; ISSN 2158-3226
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19Academic Journal
المؤلفون: Nechay, A. N., Chkhalo, N. I., Drozdov, M. N., Garakhin, S. A., Pariev, D. E., Polkovnikov, V. N., Salashchenko, N. N., Svechnikov, M. V., Vainer, Yu. A., Meltchakov, E., Delmotte, F.
المساهمون: Russian Foundation for Basic Research, Russian Science Foundation
المصدر: AIP Advances ; volume 8, issue 7 ; ISSN 2158-3226
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20Academic Journal
المؤلفون: Zuev, S. Yu., Lopatin, A. Ya., Luchin, V. I., Salashchenko, N. N., Tsybin, N. N., Chkhalo, N. I.
المصدر: Russian Microelectronics; Oct2023, Vol. 52 Issue 5, p344-355, 12p
مصطلحات موضوعية: LITHOGRAPHY, EXTREME ultraviolet lithography, LITERATURE reviews, THIN films, WAVELENGTHS