المؤلفون: W. Bogaerts, D. Taillaert, B. Luyssaert, P. Dumon, J. Van Campenhout, P. Bienstman, D. Van Thourhout, R. Baets, V. Wiaux, S. Beckx

مصطلحات موضوعية: Medicine, Biotechnology, Virology, Space Science, Biological Sciences not elsewhere classified, media, oe, Optics Express, photonic, circuit, Basic, 19 April 2004, Silicon-on-insulator

Relation: https://figshare.com/articles/media/Media_1_Basic_structures_for_photonic_integrated_circuits_in_Silicon-on-insulator/4932416

الاتاحة: https://doi.org/10.1364/opex.12.001583.m001
https://figshare.com/articles/media/Media_1_Basic_structures_for_photonic_integrated_circuits_in_Silicon-on-insulator/4932416

المؤلفون: W. Bogaerts, D. Taillaert, B. Luyssaert, P. Dumon, J. Van Campenhout, P. Bienstman, D. Van Thourhout, R. Baets, V. Wiaux, S. Beckx

مصطلحات موضوعية: Medicine, Biotechnology, Virology, Space Science, Biological Sciences not elsewhere classified, media, oe, Optics Express, photonic, circuit, Basic, 19 April 2004, Silicon-on-insulator

Relation: https://figshare.com/articles/media/Media_2_Basic_structures_for_photonic_integrated_circuits_in_Silicon-on-insulator/4932428

الاتاحة: https://doi.org/10.1364/opex.12.001583.m002
https://figshare.com/articles/media/Media_2_Basic_structures_for_photonic_integrated_circuits_in_Silicon-on-insulator/4932428

المؤلفون: Guy Vereecke, Frank Holsteyns, Sophia Arnauts, S. Beckx, P. Jaenen, Karine Kenis, M. Lismont, Marcel Lux, Rita Vos, James Snow, Paul W. Mertens

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::73b55f7ef039125c3924af306c059c16
https://doi.org/10.4028/3-908451-06-x.141

المؤلفون: M. Claes, Vasile Paraschiv, S. Beckx, M. Demand, W. Deweerd, Sylvain Garaud, H. Kraus, Rita Vos, James Snow, Werner Boullart, Stefan De Gendt

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::65b09ceaf4ddce363638c3d170751362
https://doi.org/10.4028/3-908451-06-x.93

المؤلفون: M. Claes, V. Paraschiv, S. Beckx, M. Dem, W. Deweerd, S. Garaud, H. Kraus, R. Vos, J. Snow, W. Boullart, S. De Gendt

المساهمون: The Pennsylvania State University CiteSeerX Archives

المصدر: http://www.scientific.net/SSP.103-104.93.pdf.

مصطلحات موضوعية: high-k, metal gate, selective wet etching, dry etch residue removal

وصف الملف: application/pdf

Relation: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.698.8395; http://www.scientific.net/SSP.103-104.93.pdf

الاتاحة: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.698.8395
http://www.scientific.net/SSP.103-104.93.pdf

المؤلفون: P. Dumon, W. Bogaerts, D. Van Thourhout, G. Morthier, Roel Baets, S. Beckx, J. Wouters, P. Jaenen

المساهمون: The Pennsylvania State University CiteSeerX Archives

المصدر: http://leosbenelux.org/symp05/s05p105.pdf.

وصف الملف: application/pdf

Relation: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.570.6401; http://leosbenelux.org/symp05/s05p105.pdf

الاتاحة: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.570.6401
http://leosbenelux.org/symp05/s05p105.pdf

المؤلفون: P. Dumon, W. Bogaerts, D. Van Thourhout, G. Morthier, R. Baets, P. Jaenen, S. Beckx, J. Wouters, T. Farrell, N. Ryan, E. Grivas, E. Kyriakis-bitzaros, G. Halkias, I. Mckenzie

المساهمون: The Pennsylvania State University CiteSeerX Archives

المصدر: http://www.photonics.intec.ugent.be/download/pub_1972.pdf.

وصف الملف: application/pdf

Relation: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.508.9608; http://www.photonics.intec.ugent.be/download/pub_1972.pdf

الاتاحة: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.508.9608
http://www.photonics.intec.ugent.be/download/pub_1972.pdf

المؤلفون: M. Claes, V. Paraschiv, S. Beckx, M. Dem, W. Deweerd, S. Garaud, H. Kraus, R. Vos, J. Snow, W. Boullart, S. De Gendt

المساهمون: The Pennsylvania State University CiteSeerX Archives

المصدر: http://www.scientific.net/SSP.103-104.93.pdf.

مصطلحات موضوعية: high-k, metal gate, selective wet etching, dry etch residue removal

وصف الملف: application/pdf

Relation: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.430.8451; http://www.scientific.net/SSP.103-104.93.pdf

الاتاحة: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.430.8451
http://www.scientific.net/SSP.103-104.93.pdf

المؤلفون: G. Vereecke A, F. Holsteyns, S. Arnauts, S. Beckx, P. Jaenen, K. Kenis, M. Lismont, M. Lux, R. Vos, J. Snow, P. W. Mertens

المساهمون: The Pennsylvania State University CiteSeerX Archives

المصدر: http://www.scientific.net/SSP.103-104.141.pdf.

مصطلحات موضوعية: megasonic cleaning, nanoparticles, damage

وصف الملف: application/pdf

Relation: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.430.5513; http://www.scientific.net/SSP.103-104.141.pdf

الاتاحة: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.430.5513
http://www.scientific.net/SSP.103-104.141.pdf

المؤلفون: H.C. Lee, S. Vanhaelemeersch, S. Beckx

المصدر: 2nd International Symposium on Plasma Process-Induced Damage.

مصطلحات موضوعية: Fabrication, Materials science, Large Hadron Collider, Silicon, chemistry, Resist, Etching (microfabrication), Trench, chemistry.chemical_element, Electron, Atomic physics, Intensity (heat transfer)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::cee0808dc002e0cfb0d70d3b20d079e0
https://doi.org/10.1109/ppid.1997.596753

المؤلفون: S. Beckx, V. Paraschiv, Werner Boullart, Zsolt Tokei, Denis Shamiryan

المصدر: Electrochemical and Solid-State Letters. 9:G272

مصطلحات موضوعية: Diffraction, Materials science, General Chemical Engineering, fungi, technology, industry, and agriculture, macromolecular substances, Microstructure, law.invention, Amorphous solid, Etch pit density, law, Electrical resistivity and conductivity, Electrode, Electrochemistry, General Materials Science, Dry etching, Electrical and Electronic Engineering, Physical and Theoretical Chemistry, Crystallization, Composite material

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::36775fdcb88357870710e03cfa35a661
https://doi.org/10.1149/1.2208010

المؤلفون: B. Luyssaert, P. Vandersteegen, D. Taillaert, P. Dumon, W. Bogaerts, P. Bienstman, D. Van Thourhout, V. Wiaux, S. Beckx, R. Baets

المصدر: IEEE Photonics Technology Letters; Jan2005, Vol. 17 Issue 1, p73-75, 3p

المؤلفون: P. Sanchis, J. Garcia, J. Marti, W. Bogaerts, P. Dumon, D. Taillaert, R. Baets, V. Wiaux, J. Wouters, S. Beckx

المصدر: IEEE Photonics Technology Letters; Oct2004, Vol. 16 Issue 10, p2272-2274, 3p

المؤلفون: P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, R. Baets

المصدر: IEEE Photonics Technology Letters; May2004, Vol. 16 Issue 5, p1328-1330, 3p