المؤلفون: Josephine Gutekunst, Rainer Fettig, Elias Hamann, Marcus Zuber, Joachim Schulz

المصدر: e-Journal of Nondestructive Testing, Vol 29, Iss 3 (2024)

مصطلحات موضوعية: Technology

وصف الملف: electronic resource

Relation: https://www.ndt.net/search/docs.php3?id=29256; https://doaj.org/toc/1435-4934

URL الوصول: https://doaj.org/article/29076faf9789429d9bdcb24233598e91

المؤلفون: Kyowon Kim, Ming Ke, Matthew A. Greenhouse, Alexander S. Kutyrev, Rainer Fettig, Stephan R. McCandliss, Carl A. Kotecki, Regis P. Brekosky, Gang Hu, Beth M. Paquette, Timothy M. Miller, Frederick H. Wang, Nicholas P. Costen, Samelys Rodriguez, Vorachai Kluengpho, Knute A. Ray, Eduardo J. Aguayo, Kenneth M. Simms, Meng-Ping Chang

المصدر: 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS).

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4967ca453dfccf21020b1f452742792a
https://doi.org/10.1109/mems51670.2022.9699595

المؤلفون: Ming Ke, Alexander S. Kutyrev, Carl A. Kotecki, Kyowon Kim, Matthew A. Greenhouse, Meng-Ping Chang, Rainer Fettig, Regis P. Brekosky, Yongjie Hu

المصدر: Sensors and Actuators A: Physical. 343:113661

مصطلحات موضوعية: Metals and Alloys, Electrical and Electronic Engineering, Condensed Matter Physics, Instrumentation, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::7e76880696b9170755c6b1d8194d5a9c
https://doi.org/10.1016/j.sna.2022.113661

المؤلفون: Phillip Seidel, Patrick A. Kearney, Klaus Edinger, Rainer Fettig, Kenneth A. Goldberg, Anton Barty, Hakseung Han, Obert R. Wood

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Defect repair, Materials science, business.industry, Atomic force microscopy, Extreme ultraviolet lithography, macromolecular substances, Blank, Reflectivity, law.invention, Optics, law, Extreme ultraviolet, Reticle, Optoelectronics, Photolithography, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::93504e562e3889d17c534e0382d1f040
https://doi.org/10.1117/12.712202

المؤلفون: William J. Dauksher, Klaus Edinger, Rainer Fettig, Douglas J. Resnick, S. R. Young, Gerard M. Schmid

المصدر: 23rd European Mask and Lithography Conference.

مصطلحات موضوعية: Fabrication, Template, Subtractive color, Materials science, law, Etching (microfabrication), Nanotechnology, Photolithography, Photomask, Lithography, law.invention, Nanoimprint lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6744963ed0d05383fe7a89085e4f069d
https://doi.org/10.1117/12.736921

المؤلفون: Sven Achenbach, Jeanine Kando, Rainer Fettig, Timo Mappes, Juergen Mohr

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Materials science, Fabrication, Silicon, business.industry, chemistry.chemical_element, Optics, chemistry, Resist, Electroforming, X-ray lithography, Photonics, business, Lithography, Photonic crystal

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3df9ddbe6271d8d2e14aa3381628ce8a
https://doi.org/10.1117/12.546030

المؤلفون: Minoru M. Freund, D. Brent Mott, Alex Bier, Tina Chen, Barbara Campano, Rainer Fettig, Jim Loughlin, Harvey Moseley

المساهمون: The Pennsylvania State University CiteSeerX Archives

المصدر: http://www.sofia.usra.edu/det_workshop/papers/session5/3-39freund_edjw020613.pdf.

وصف الملف: application/pdf

Relation: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.518.7438; http://www.sofia.usra.edu/det_workshop/papers/session5/3-39freund_edjw020613.pdf

الاتاحة: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.518.7438
http://www.sofia.usra.edu/det_workshop/papers/session5/3-39freund_edjw020613.pdf

المؤلفون: Conor A. Nixon, John C. Brasunas, Brook Lakew, Rainer Fettig, Donald E. Jennings, Ronald Carlson, Virgil G. Kunde

المساهمون: The Pennsylvania State University CiteSeerX Archives

المصدر: http://www.astro.umd.edu/~nixon/papers-pdf/nixon-04-tdw.pdf.

وصف الملف: application/pdf

Relation: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.472.1862; http://www.astro.umd.edu/~nixon/papers-pdf/nixon-04-tdw.pdf

الاتاحة: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.472.1862
http://www.astro.umd.edu/~nixon/papers-pdf/nixon-04-tdw.pdf

المؤلفون: Eberhard Grün, D. Maas, M. Rachev, Ralf Srama, Rainer Fettig, Uwe Köhler

المصدر: Review of Scientific Instruments. 76:064502

مصطلحات موضوعية: Physics, Transmission (telecommunications), Electric field, Electron multiplier, Particle, Dynode, Electron, Astrophysics, Instrumentation, Cosmic dust, Ion, Computational physics

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::45f86d8fb8fa14d9f1faa515e17e0adb
https://doi.org/10.1063/1.1935448