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    المؤلفون: Capmany, José, author, Pérez, Daniel, author

    المصدر: Programmable Integrated Photonics, 2020, ill.

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    المساهمون: Danmarks Tekniske Universitet = Technical University of Denmark (DTU), Science et Ingénierie des Matériaux et Procédés (SIMaP), Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes (UGA), European Project: 899679,SiComb

    المصدر: Shi, X, Lu, Y, Chaussende, D, Rottwitt, K & Ou, H 2023, ' Wet-Oxidation-Assisted Chemical Mechanical Polishing and High-Temperature Thermal Annealing for Low-Loss 4H-SiC Integrated Photonic Devices ', Materials, vol. 16, no. 6 . https://doi.org/10.3390/ma16062324
    Materials; Volume 16; Issue 6; Pages: 2324
    Materials
    Materials, 2023, 16 (6), pp.2324. ⟨10.3390/ma16062324⟩

    وصف الملف: application/pdf