المؤلفون: Goldberg, Kenneth A., Mochi, Iacopo, Benk, Markus P., Lin, Chihcheng, Allezy, Arnaud, Dickinson, Michael, Cork, Carl W., Macdougall, James B., Anderson, Erik H., Chao, Weilun, Salmassi, Farhad, Gullikson, Eric M., Zehm, Daniel, Vytla, Vamsi, Cork, William, DePonte, Jason, Picchi, Gino, Pekedis, Ahmet, Katayanagi, Takeshi, Jones, Michael S., Martin, Elizabeth, Naulleau, Patrick P., Rekawa, Senajith B.

المساهمون: Faure, Thomas B., Ackmann, Paul W.

المصدر: SPIE Proceedings ; Photomask Technology 2013 ; ISSN 0277-786X

الاتاحة: http://dx.doi.org/10.1117/12.2026496

المؤلفون: Faure, Thomas B., Ackmann, Paul W., Goldberg, Kenneth A., Mochi, Iacopo, Benk, Markus P., Lin, Chihcheng, Allezy, Arnaud P., Dickinson, Michael, Cork, Carl W., Macdougall, James B., Anderson, Erik H., Chao, Weilun, Salmassi, Farhad, Gullikson, Eric M., Zehm, Daniel, Vytla, Vamsi, Cork, William, DePonte, Jason, Picchi, Gino, Pekedis, Ahmet, Katayanagi, Takeshi, Jones, Michael S., Martin, Elizabeth, Naulleau, Patrick P., Rekawa, Senajith B.

المصدر: Proceedings of SPIE; September 2013, Vol. 8880 Issue: 1 p88800T-88800T-9, 799210p