المؤلفون: M. S. Krivokorytov, Il’ya Pavlovich Tsygvintsev, Pavel Vital’evich Krainov, V. M. Krivtsun, Konstantin N Koshelev, M. V. Spiridonov, A. D. Solomyannaya, D B Abramenko, Dmitrii Andreevich Kim, D.I. Astakhov, Yu. V. Sidelnikov, A N Ryabtsev, P. S. Antsiferov, Aleksandr Sergeevich Grushin, L. A. Dorokhin, O. F. Yakushev, Vladimir Ivanov, B. V. Lakatosh, A. A. Yakushkin, Vyacheslav Medvedev, R R Gayazov, Il’ya Yur’evich Vichev, E.P. Snegirev, Aleksandr Yur’evich Vinokhodov, A A Lash

المصدر: Uspekhi Fizicheskih Nauk. 189:323-334

مصطلحات موضوعية: Materials science, Optics, business.industry, Extreme ultraviolet, medicine, General Physics and Astronomy, Mask inspection, Plasma, Radiation, business, medicine.disease_cause, Lithography, Ultraviolet

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::21eade8e3b549e3f5406134fc0496aca
https://doi.org/10.3367/ufnr.2018.06.038447