المؤلفون: Feigl, Torsten, Perske, Marco, Pauer, Hagen, Fiedler, Tobias, Zeitner, Uwe, Leitel, Robert, Eckstein, Hans Christoph, Schleicher, Philipp, Schröder, Sven, Trost, Marcus, Risse, Stefan, Steinkopf, Ralf, Scholze, F., Laubis, C.

Relation: Conference "Extreme Ultraviolet (EUV) Lithography" 2015; Extreme Ultraviolet (EUV) Lithography VI; https://publica.fraunhofer.de/handle/publica/388762

الاتاحة: https://publica.fraunhofer.de/handle/publica/388762
https://doi.org/10.1117/12.2175666

المؤلفون: Feigl, Torsten, Perske, Marco, Pauer, Hagen, Fiedler, Tobias, Yulin, Sergiy, Kaiser, Norbert, Tünnermann, Andreas, Böwering, Nobert R., Ershov, Alex I., Dea, Silvia de, Hoffmann, Kay, Fontaine, Bruno la, Fomenkov, Igor V., Brandt, David

مصطلحات موضوعية: EUV collector mirror, multilayer mirror coating, collector lifetime

Time: 620

Relation: Conference "Extreme Ultraviolet (EUV) Lithography" 2013; Extreme Ultraviolet (EUV) Lithography IV; https://publica.fraunhofer.de/handle/publica/379880

الاتاحة: https://publica.fraunhofer.de/handle/publica/379880
https://doi.org/10.1117/12.2015492

المؤلفون: Feigl, Torsten, Perske, Marco, Pauer, Hagen, Fiedler, Tobias, Yulin, Sergiy, Trost, Marcus, Schroeder, Sven, Duparré, Angela, Kaiser, Norbert, Tünnermann, Andreas, Böwering, Norbert, Ershov, Alex, Hoffmann, Kay, La Fontaine, Bruno, Cummings, Kevin D.

مصطلحات موضوعية: EUV source, EUV collector mirror, multilayer mirror coating, collector lifetime, optics lifetime, roughness, light scattering, power spectral density, HSFR

Time: 620

Relation: Conference "Extreme Ultraviolet (EUV) Lithography" 2012; Extreme Ultraviolet (EUV) Lithography III; https://publica.fraunhofer.de/handle/publica/375643

الاتاحة: https://publica.fraunhofer.de/handle/publica/375643
https://doi.org/10.1117/12.919735

المؤلفون: Feigl, Torsten, Yulin, Sergiy, Perske, Marco, Pauer, Hagen, Schürmann, Mark, Kaiser, Norbert, Böwering, Norbert R., Khodykin, Oleg V., Fomenkov, Igor V., Brandt, David C.

المساهمون: Goto, Shunji, Khounsary, Ali M., Morawe, Christian

المصدر: SPIE Proceedings ; Advances in X-Ray/EUV Optics and Components III ; ISSN 0277-786X

الاتاحة: http://dx.doi.org/10.1117/12.802322

المؤلفون: Perske, Marco, Pauer, Hagen, Yulin, Sergiy, Trost, Marcus, Schröder, Sven, Duparré, Angela, Feigl, Torsten, Kaiser, Norbert

المصدر: Vakuum in Forschung und Praxis ; volume 22, issue 4, page 17-21 ; ISSN 0947-076X 1522-2454

الاتاحة: http://dx.doi.org/10.1002/vipr.201090031
https://api.wiley.com/onlinelibrary/tdm/v1/articles/10.1002%2Fvipr.201090031
https://onlinelibrary.wiley.com/doi/pdf/10.1002/vipr.201090031

المؤلفون: Wood, Obert R., Panning, Eric M., Feigl, Torsten, Perske, Marco, Pauer, Hagen, Fiedler, Tobias, Zeitner, Uwe, Leitel, Robert, Eckstein, Hans-Christoph, Schleicher, Philipp, Schröder, Sven, Trost, Marcus, Risse, Stefan, Steinkopf, Ralf, Scholze, Frank, Laubis, Christian

المصدر: Proceedings of SPIE; March 2015, Vol. 9422 Issue: 1 p94220E-94220E-7, 847988p

المؤلفون: Naulleau, Patrick P., Feigl, Torsten, Perske, Marco, Pauer, Hagen, Fiedler, Tobias, Yulin, Sergiy, Kaiser, Norbert, Tünnermann, Andreas, Böwering, Norbert R., Ershov, Alex I., de Dea, Silvia, Hoffmann, Kay, La Fontaine, Bruno, Fomenkov, Igor V., Brandt, David C.

المصدر: Proceedings of SPIE; April 2013, Vol. 8679 Issue: 1 p86790C-86790C-9, 781120p