المؤلفون: Tanmay Ghosh (1681387), Eva-Corinna Fritz (2568982), Deepan Balakrishnan (11959857), Ziyu Zhang (3505355), Nandi Vrancken (1435555), Utkarsh Anand (1343049), Hong Zhang (25820), N. Duane Loh (1343046), XiuMei Xu (1853821), Frank Holsteyns (1853809), Christian A. Nijhuis (1511410), Utkur Mirsaidov (1343040)

مصطلحات موضوعية: Physiology, Immunology, Environmental Sciences not elsewhere classified, Biological Sciences not elsewhere classified, Chemical Sciences not elsewhere classified, Physical Sciences not elsewhere classified, plasma treatment right, phase deposition method, based processes used, systematically evaluated sams, easily removed using, vertical semiconductor nanostructures, next fabrication step, induced pattern collapse, vertical silicon, pattern collapse, nanofabrication processes, effective method, induced collapse, damage induced, test structures, sams ), main challenges, main cause, largest contribution, identified h, greatly reduced, gentle air, energy storage, drying step

Relation: https://figshare.com/articles/journal_contribution/Preventing_the_Capillary-Induced_Collapse_of_Vertical_Nanostructures/18621660

الاتاحة: https://doi.org/10.1021/acsami.1c17781.s001

المؤلفون: Arslan, Aysu, Steiger, Wolfgang, Roose, Patrice, Van den Bergen, Hugues, Gruber, Peter, Zerobin, Elise, Gantner, Franziska, Guillaume, Olivier, Ovsianikov, Aleksandr, Van Vlierberghe, Sandra, Dubruel, Peter

المصدر: MATERIALS TODAY ; ISSN: 1369-7021 ; ISSN: 1873-4103

مصطلحات موضوعية: Chemistry, 2-PHOTON POLYMERIZATION, MECHANICAL-PROPERTIES, BIOCOMPATIBLE PHOTOPOLYMERS, PATTERN COLLAPSE, TISSUE, FABRICATION, SCAFFOLDS, ACRYLATES, KINETICS, POLYESTERS

وصف الملف: application/pdf

Relation: https://biblio.ugent.be/publication/8704568; http://hdl.handle.net/1854/LU-8704568; http://dx.doi.org/10.1016/j.mattod.2020.10.005; https://biblio.ugent.be/publication/8704568/file/8711368

الاتاحة: https://biblio.ugent.be/publication/8704568
http://hdl.handle.net/1854/LU-8704568
https://doi.org/10.1016/j.mattod.2020.10.005
https://biblio.ugent.be/publication/8704568/file/8711368

المؤلفون: Utkarsh Anand (1343049), Tanmay Ghosh (1681387), Zainul Aabdin (1343043), Nandi Vrancken (1435555), Hongwei Yan (1774468), XiuMei Xu (1853821), Frank Holsteyns (1853809), Utkur Mirsaidov (1343040)

مصطلحات موضوعية: Biophysics, Cell Biology, Biotechnology, Space Science, Environmental Sciences not elsewhere classified, Biological Sciences not elsewhere classified, Physical Sciences not elsewhere classified, 3 D Nanofabrication, HAR, surface SiO 2 layer, machine learning-based approach, Deep Learning-Based High Throughput., pattern collapse, Next Generation Transistors Densely, nanostructure, future microelectronics components, nanoscale semiconductor devices

Relation: https://figshare.com/articles/journal_contribution/Deep_Learning-Based_High_Throughput_Inspection_in_3D_Nanofabrication_and_Defect_Reversal_in_Nanopillar_Arrays_Implications_for_Next_Generation_Transistors/14188728

الاتاحة: https://doi.org/10.1021/acsanm.0c03283.s001

المؤلفون: Tanmay Ghosh, Eva-Corinna Fritz, Deepan Balakrishnan, Ziyu Zhang, Nandi Vrancken, Utkarsh Anand, Hong Zhang, N. Duane Loh, XiuMei Xu, Frank Holsteyns, Christian A. Nijhuis, Utkur Mirsaidov

المساهمون: Hybrid Materials for Opto-Electronics, MESA+ Institute

المصدر: ACS Applied Materials and Interfaces, 14(4), 5537-5544. American Chemical Society

مصطلحات موضوعية: pattern collapse, high-aspect-ratio nanostructures, silane, 2023 OA procedure, self-assembled monolayers, capillary forces, General Materials Science

وصف الملف: application/pdf

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0e511b910597e5b160d4f8d136847cf2
https://doi.org/10.1021/acsami.1c17781

المؤلفون: Jun Matsushita, Kiyokazu Nagahara, Kounosuke Hayashi, Kunihiro Miyazaki, Yuji Nagashima, 宮崎 邦浩, 松下 淳, 林 航之介, 永原 聖万, 長嶋 裕次

المصدر: JSAP Annual Meetings Extended Abstracts. 2019, :321

المؤلفون: Takeshi HATTORI, 服部 毅

المصدر: 表面と真空 / Vacuum and Surface Science. 2018, 61(2):56

المؤلفون: Yeh, Wei-Ming

مصطلحات موضوعية: Photoresists, Pattern collapse, Polymers, Nanolithography, Nanotechnology, Nanostructured materials

الاتاحة: http://hdl.handle.net/1853/47696

المؤلفون: UTKARSH ANAND, TANMAY GHOSH, ZAINUL AABDIN, Nandi Vrancken, YAN HONGWEI, XiuMei Xu, Frank Holsteyns, UTKUR MIRZIYODOVICH MIRSAIDOV

المساهمون: BIOLOGICAL SCIENCES, DEPT OF PHYSICS

مصطلحات موضوعية: liquid-phase TEM, machine learning, nanofabrication, nanostructures, pattern collapse

Relation: UTKARSH ANAND, TANMAY GHOSH, ZAINUL AABDIN, Nandi Vrancken, YAN HONGWEI, XiuMei Xu, Frank Holsteyns, UTKUR MIRZIYODOVICH MIRSAIDOV (2021-03-09). Deep Learning-Based High Throughput Inspection in 3D Nanofabrication and Defect Reversal in Nanopillar Arrays: Implications for Next Generation Transistor. ACS Applied Nano Materials. ScholarBank@NUS Repository. https://doi.org/10.1021/acsanm.0c03283; https://scholarbank.nus.edu.sg/handle/10635/187520

الاتاحة: https://scholarbank.nus.edu.sg/handle/10635/187520

المؤلفون: Makoto Nakajima, Rikimaru Sakamoto, Ryuji Onishi, Satoshi Takeda, Shuhei Shigaki, Wataru Shibayama

المصدر: Journal of Photopolymer Science and Technology. 2016, 29(1):69

المؤلفون: Kazuma Yamamoto, Tatsuro Nagahara, Tomoyasu Yashima, Yuriko Matsuura

المصدر: Journal of Photopolymer Science and Technology. 2016, 29(5):745

المؤلفون: Hideo NAMATSU, 生津 英夫

المصدر: 表面技術 / Journal of The Surface Finishing Society of Japan. 2005, 56(2):92

المؤلفون: Han-Ku Cho, Hyun-Woo Kim, Myoung-Ho Jung, Sang-Gyun Woo, Sung-Ho Lee, Woo-Sung Han

المصدر: Journal of Photopolymer Science and Technology. 2003, 16(3):463

المؤلفون: Geunsu Lee, Ki-Soo Shin

المصدر: Journal of Photopolymer Science and Technology. 2003, 16(3):363

المؤلفون: Hiroshi Yanazawa, Takuya Fukuda, Yukiko Kikuchi

المصدر: Journal of Photopolymer Science and Technology. 2003, 16(3):369

المؤلفون: Akira Kawai, Atsushi Ishikawa, Makoto Sakata

المصدر: Journal of Photopolymer Science and Technology. 2004, 17(3):457

المؤلفون: Akira Kawai, Kenta Suzuki

المصدر: Journal of Photopolymer Science and Technology. 2005, 18(6):679

المؤلفون: Akira Kawai, Kazutoshi Kurano, Takahiro Kishioka, Takuya Ohashi, Yoshiomi Hiroi

المصدر: Journal of Photopolymer Science and Technology. 2007, 20(6):827

المؤلفون: Akira Kawai, Kazutoshi Kurano, Takahiro Kishioka, Takuya Ohashi, Yoshiomi Hiroi

المصدر: Journal of Photopolymer Science and Technology. 2007, 20(6):825

المؤلفون: Cecily Audes, Cheng Bai Xu, Deyan Wang, George Barclay, Kap-Soo Cheon, Peter Trefonas, Stefan Caporale

المصدر: Journal of Photopolymer Science and Technology. 2007, 20(5):687

المؤلفون: Chua Lin, Gino Marcuccilli, Gustaf Winroth, Katsumi Neishi, Roel Gronheid, Ryota Harukawa

المصدر: Journal of Photopolymer Science and Technology. 2011, 24(2):233