المؤلفون: Tuomas Pensala, Panu Pekko, James Dekker, Mika Prunnila, Antti Jaakkola

المصدر: Jaakkola, A, Prunnila, M, Pensala, T, Dekker, J R & Pekko, P 2016, ' Design rules for temperature compensated degerately n-type-doped silicon MEMS resonators ', Journal of Microelectromechanical Systems, vol. 24, no. 6, pp. 1832-1839 . https://doi.org/10.1109/JMEMS.2015.2443379

مصطلحات موضوعية: radiofrequency microelectromechanical systems, Materials science, ta214, Silicon, ta114, ta213, Mechanical Engineering, Doping, Analytical chemistry, Resonance, chemistry.chemical_element, acoustic waves, Resonator, design for manufacture, Flexural strength, chemistry, Sensitivity (control systems), Electrical and Electronic Engineering, Atomic physics, temperature dependence, Temperature coefficient, Beam (structure), micromechanical devices

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4f091f455b2a1dd043098f433dd77e57
https://doi.org/10.1109/JMEMS.2015.2443379

المؤلفون: Sami Ruotsalainen, Aarne Oja, Mika Suhonen, Jaakko Saarilahti, Heikki Seppä, Anu Kärkkäinen, Jukka Kyynäräinen, Heikki Kuisma, Markku Tilli, Panu Pekko, Tor Meinander, Hannu Kattelus

المصدر: Kyynäräinen, J, Saarilahti, J, Kattelus, H, Kärkkäinen, A, Meinander, T, Oja, A, Pekko, P, Seppä, H, Suhonen, M, Kuisma, H, Ruotsalainen, S & Tilli, M 2008, ' A 3D micromechanical compass ', Sensors and Actuators A: Physical, vol. 142, no. 2, pp. 561-568 . https://doi.org/10.1016/j.sna.2007.08.025

مصطلحات موضوعية: Materials science, Resonant sensors, Magnetometer, Silicon on insulator, Direct bonding, law.invention, Resonator, law, Wafer, Electrical and Electronic Engineering, Instrumentation, Microelectromechanical systems, business.industry, Metals and Alloys, Electrical engineering, Condensed Matter Physics, Magnetometers, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Magnetic field, MEMS, Electromagnetic coil, Optoelectronics, Micromechanics, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::506011544e527e8bf562c74c7008eca2
https://doi.org/10.1016/j.sna.2007.08.025

المؤلفون: Hannu Kattelus, Jaakko Saarilahti, Heikki Kuisma, Mika Suhonen, Aarne Oja, M. Tilli, Jukka Kyynäräinen, Tor Meinander, Panu Pekko, Heikki Seppä, S. Ruotsalainen

المصدر: Kyynäräinen, J, Saarilahti, J, Kattelus, H, Meinander, T, Suhonen, M, Oja, A, Seppä, H, Pekko, P, Kuisma, H, Ruotsalainen, S & Tilli, M 2007, ' 3D micromechanical compass ', Sensor Letters, vol. 5, no. 1, pp. 126-129 . https://doi.org/10.1166/sl.2007.040

مصطلحات موضوعية: Microelectromechanical systems, Materials science, Magnetometer, Acoustics, Micromechanics, Magnetometers, Atomic and Molecular Physics, and Optics, law.invention, Resonator, MEMS, law, Compass, Magnetic sensors, Resonators, Electrical and Electronic Engineering

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a40977d7a1d65f1adc1e46973b58306e
https://cris.vtt.fi/en/publications/1e8b3e4f-e7e4-439d-b469-1144fb4f15a9

المؤلفون: Mika Prunnila, James Dekker, Antti Jaakkola, Tuomas Pensala, Panu Pekko

المصدر: 2015 Joint Conference of the IEEE International Frequency Control Symposium & the European Frequency and Time Forum.

مصطلحات موضوعية: Microelectromechanical systems, Materials science, Silicon, business.industry, Doping, chemistry.chemical_element, Atmospheric temperature range, Temperature measurement, Resonator, chemistry, Condensed Matter::Superconductivity, Electronic engineering, Optoelectronics, Thermal stability, business, Coupling coefficient of resonators

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::fbb77b78ae962d0ca690868470ba57d4
https://doi.org/10.1109/fcs.2015.7138871

المؤلفون: Mika Suhonen, Anu Kärkkäinen, Jukka Kyynäräinen, Aarne Oja, Nadine Pesonen, Panu Pekko, Heikki Seppä, James Dekker

المصدر: Kärkkäinen, A, Pekko, P, Dekker, J, Pesonen, N, Suhonen, M, Oja, A, Kyynäräinen, J & Seppä, H 2005, ' Stable SOI micromachined electrostatic AC voltage reference ', Microsystem Technologies, vol. 12, no. 1-2, pp. 169-172 . https://doi.org/10.1007/s00542-005-0005-y

مصطلحات موضوعية: SOI, Fabrication, Materials science, business.industry, capacitors, Electrical engineering, Silicon on insulator, Condensed Matter Physics, Electronic, Optical and Magnetic Materials, law.invention, Metrology, Capacitor, metrology, Hardware and Architecture, law, Electrode, Optoelectronics, Crystalline silicon, Electrical and Electronic Engineering, business, Voltage reference, Voltage

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::59fa1646c0120eb096447fb55072ad69
https://doi.org/10.1007/s00542-005-0005-y

المؤلفون: Heikki Seppä, Anu Kärkkäinen, Jukka Kyynäräinen, Aarne Oja, Panu Pekko, Shakil Awan

المصدر: Kärkkäinen, A, Awan, S A, Kyynäräinen, J, Pekko, P, Oja, A & Seppä, H 2005, ' Optimized design and process for making a DC voltage reference based on MEMS ', IEEE Transactions on Instrumentation and Measurement, vol. 54, no. 2, pp. 563-566 . https://doi.org/10.1109/TIM.2004.843097

مصطلحات موضوعية: Electromagnetics, Materials science, feedback electronics, Capacitive sensing, Silicon on insulator, Hardware_PERFORMANCEANDRELIABILITY, law.invention, law, Hardware_GENERAL, Component (UML), Electronic engineering, Hardware_INTEGRATEDCIRCUITS, Electronics, Electrical and Electronic Engineering, micromachining, Instrumentation, Microelectromechanical systems, SOI, business.industry, Process (computing), Electrical engineering, silicon-on-insulator, Capacitor, MEMS, capacitive sensors, microelectromechanical systems, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7f3fea3fc2508d4cdf2c898ea15cff63
https://cris.vtt.fi/en/publications/8001f9ef-0065-41ef-9c05-922cb620983e

المؤلفون: Sergey Gorelick, Mika Prunnila, Antti Jaakkola, Tuomas Pensala, Panu Pekko, James Dekker

المصدر: Jaakkola, A, Gorelick, S, Prunnila, M, Dekker, J, Pensala, T & Pekko, P 2014, Long term stability and quality factors of degenerately n-type doped silicon resonators . in IEEE International Frequency Control Symposium (FCS 2014) ., 6859866, IEEE Institute of Electrical and Electronic Engineers, IEEE International Frequency Control Symposium, IFCS 2014, Taipei, Taiwan, Province of China, 19/05/14 . https://doi.org/10.1109/FCS.2014.6859866

مصطلحات موضوعية: inorganic chemicals, Range (particle radiation), Materials science, Silicon, business.industry, Doping, Degenerate energy levels, technology, industry, and agriculture, chemistry.chemical_element, law.invention, Resonator, Quality (physics), chemistry, law, Electronic engineering, Optoelectronics, lipids (amino acids, peptides, and proteins), Wafer, Tuning fork, business, human activities

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4c4c9d7bd0349d14222bfb631f60af42
https://doi.org/10.1109/fcs.2014.6859866

المؤلفون: Asko Anttila, Panu Pekko, Yrj T. Konttinen, Seppo Santavirta, Reijo Lappalainen

المصدر: Clinical Orthopaedics and Related Research. 369:92-102

مصطلحات موضوعية: musculoskeletal diseases, medicine.medical_specialty, Surface Properties, 02 engineering and technology, Surface finish, Prosthesis Design, Corrosion, 03 medical and health sciences, chemistry.chemical_compound, 0302 clinical medicine, Coated Materials, Biocompatible, Hardness, medicine, Humans, Orthopedics and Sports Medicine, Cubic zirconia, Ceramic, Composite material, Joint (geology), 030222 orthopedics, business.industry, Acetabulum, Femur Head, General Medicine, Polyethylene, Tribology, 021001 nanoscience & nanotechnology, Bone cement, Prosthesis Failure, Surgery, Equipment Failure Analysis, chemistry, visual_art, visual_art.visual_art_medium, Chromium Alloys, Hip Prosthesis, Diamond, 0210 nano-technology, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0c43f5ccf3c11b39a10777c2f9587549
https://doi.org/10.1097/00003086-199912000-00010

المؤلفون: Antti Jaakkola, James Dekker, Tuomas Pensala, Panu Pekko, Mika Prunnila

المصدر: Jaakkola, A, Prunnila, M, Pensala, T, Dekker, J & Pekko, P 2013, Experimental determination of the temperature dependency of the elastic constants of degenerately doped silicon . in Joint European Frequency and Time Forum & International Frequency Control Symposium, EFTF/IFC 2013 . IEEE Institute of Electrical and Electronic Engineers, pp. 421-424, Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013, Prague, Czech Republic, 21/07/13 . https://doi.org/10.1109/EFTF-IFC.2013.6702116

مصطلحات موضوعية: Microelectromechanical systems, Materials science, Silicon, Doping, Analytical chemistry, chemistry.chemical_element, Resonance, Condensed Matter::Materials Science, Resonator, chemistry, Condensed Matter::Superconductivity, Thermal, Condensed Matter::Strongly Correlated Electrons, Wafer, Microfabrication

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::46b08305e4617f65d9018438c01ab0be
https://doi.org/10.1109/eftf-ifc.2013.6702116

المؤلفون: Anna Rissanen, Panu Pekko, Riikka L. Puurunen, Jyrki Kiihamäki, Jaakko Saarilahti, Martti Blomberg, Hannu Kattelus, Heini Ritala, Mari Laamanen

المساهمون: Gusev, Evgeni, Garfunkel, Eric, Dideikin, Arthur

المصدر: Kiihamäki, J, Kattelus, H, Blomberg, M, Puurunen, R, Laamanen, M, Pekko, P, Saarilahti, J, Ritala, H & Rissanen, A 2010, Low-Temperature Processes for MEMS Device Fabrication . in E Gusev, E Garfunkel & A Dideikin (eds), Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators . Springer, NATO Science for Peace and Security Series B: Physics and Biophysics, pp. 167-178, NATO Advanced Research Workshop on Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators, St. Petersburg, Russian Federation, 29/06/09 . https://doi.org/10.1007/978-90-481-3807-4_13
NATO Science for Peace and Security Series B: Physics and Biophysics ISBN: 9789048138050

مصطلحات موضوعية: Microelectromechanical systems, Fabrication, Materials science, business.industry, Wafer bonding, Analytical chemistry, thin film technology, Chemical vapor deposition, fusion bonding, Atomic layer deposition, MEMS, amorphous metals, Sputtering, Etching (microfabrication), Optoelectronics, Thin film, business, HF-vapour etching

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d711014490079f2af05cf8a10c828349
https://cris.vtt.fi/en/publications/093d0ad5-3160-45a0-85ee-b3609898b756

المؤلفون: Panu Pekko, Ismo Luusua, Kimmo Henttinen, Tapani Vehmas

المصدر: Luusua, I, Henttinen, K, Pekko, P & Vehmas, T 2007, ' Fabrication and characterization of IC compatible through-wafer polysilicon interconnects ', ECS Transactions, vol. 2, no. 25, pp. 27-31 .

مصطلحات موضوعية: Microelectromechanical systems, Bulk micromachining, MEMS, Materials science, Fabrication, business.industry, Through-Wafer Interconnects, Optoelectronics, Wafer, business, Characterization (materials science)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9d35c4e51c04cf0c8be2356d63a31310
https://cris.vtt.fi/en/publications/96e2661c-db4b-4fc7-b8f2-61d7a2199ee0

المؤلفون: Panu Pekko, Kimmo Henttinen, Hannu Luoto, Tapani Vehmas, Ismo Luusua

مصطلحات موضوعية: Bulk micromachining, Fabrication, Materials science, Silicon, business.industry, Polysilicon depletion effect, chemistry.chemical_element, Policide, Microbiology, bulk micromachining, MEMS, chemistry, Etching (microfabrication), through-wafer interconnects, Chemical-mechanical planarization, Optoelectronics, Wafer, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::82203cd362ec545cda300527fcd302d2
https://cris.vtt.fi/en/publications/c1cb4ca6-dbbb-48e5-84a6-9cdf4625f20b

المؤلفون: Tauno Vähä-Heikkilä, M. Lahdes, Nadine Pesonen, Heikki Seppä, Anu Kärkkäinen, Panu Pekko, Jukka Kyynäräinen, James Dekker, Ari Alastalo

المصدر: Alastalo, A, Kyynäräinen, J, Seppä, H, Kärkkäinen, A, Pesonen, N, Lahdes, M, Vähä-Heikkilä, T, Pekko, P & Dekker, J 2004, Wideband microwave power sensor based on MEMS technology . in 2004 Conference on Precision Electromagnetic Measurements Digest . IEEE Institute of Electrical and Electronic Engineers, pp. 115-116, 2004 Conference on Precision Electromagnetic Measurements, CPEM 2004, London, United Kingdom, 27/06/04 . https://doi.org/10.1109/CPEM.2004.305487

مصطلحات موضوعية: Microelectromechanical systems, Materials science, business.industry, Microwave power, RF power amplifier, Bandwidth (signal processing), dBm, Electrical engineering, ComputerApplications_COMPUTERSINOTHERSYSTEMS, Hardware_PERFORMANCEANDRELIABILITY, Hardware_GENERAL, Thermal, Hardware_INTEGRATEDCIRCUITS, Radio frequency, Wideband, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2a843a407bbf9e691c88682903d93b4d
https://doi.org/10.1109/cpem.2004.305487

المؤلفون: Timo Aalto, Panu Pekko, Janne Simonen, Päivi Heimala, Sanna Yliniemi, Konstantins Jefimovs, Tero Uusitupa

المساهمون: Righini, Giancarlo C.

المصدر: Yliniemi, S, Aalto, T, Heimala, P, Pekko, P, Jefimovs, K & Uusitupa, T 2003, Fabrication of photonic crystal waveguide elements on SOI . in G C Righini (ed.), Integrated Optical Devices : Fabrication and Testing . International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 4944, pp. 23-31, Photonics Fabrication Europe 2002 (PFE'02), Bruges, Belgium, 30/10/02 . https://doi.org/10.1117/12.468303

مصطلحات موضوعية: SOI, Materials science, Fabrication, business.industry, Finite-difference time-domain method, Physics::Optics, ICP, Yablonovite, law.invention, Crystal, silicon-on-insulator, Wavelength, Optics, law, photonic crystals, Cylinder, e-beam, inductively coupled plasma etching, business, Waveguide, Photonic crystal

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::30619d547c932c85a094b5a95e3c2f08
https://cris.vtt.fi/en/publications/d8f21b5f-f48b-4e1b-9c8e-918ac51753a5

المؤلفون: Jari Halme, Teuvo Sillanpää, Panu Pekko, Mikko Heikkinen, Aarne Oja

المصدر: Halme, J, Sillanpää, T, Pekko, P, Heikkinen, M & Oja, A 2002, ' Micromechanical acoustic emission sensors for condition monitoring ', Paper presented at 15th International Congress on Condition Monitoring and Diagnostic Engineering Management, COMADEM 2002, Birmingham, United Kingdom, 2/09/02-4/09/02 .
VTT Technical Research Centre of Finland-PURE

URL الوصول: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::c158fa7d74e4ce2da44e3b4127524009
https://cris.vtt.fi/en/publications/85764c70-64eb-4a55-bc0a-5fd93fda7d76

المؤلفون: Based On Mems, Anu Kärkkäinen, Shakil A. Awan, Jukka Kyynäräinen, Panu Pekko, Aarne S. Oja

المساهمون: The Pennsylvania State University CiteSeerX Archives

المصدر: http://lib.tkk.fi/Diss/2006/isbn9513868605/article4.pdf.

وصف الملف: application/pdf

Relation: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.518.1253; http://lib.tkk.fi/Diss/2006/isbn9513868605/article4.pdf

الاتاحة: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.518.1253
http://lib.tkk.fi/Diss/2006/isbn9513868605/article4.pdf

المؤلفون: Panu Pekko, Kirsi Tappura, Heikki Seppä

المصدر: Tappura, K, Pekko, P & Seppä, H 2011, ' High-Q micromechanical resonators for mass sensing in dissipative media ', Journal of Micromechanics and Microengineering, vol. 21, no. 6, 065002 . https://doi.org/10.1088/0960-1317/21/6/065002

مصطلحات موضوعية: MEMS resonator, Atmospheric pressure, lateral bulk acoustic wave, Chemistry, business.industry, Mechanical Engineering, quality factor, mass sensor, Mechanics, Dissipation, Finite element method, Electronic, Optical and Magnetic Materials, Resonator, Optics, Mechanics of Materials, Drag, Dissipative system, wine-glass mode, Sensitivity (control systems), Acoustic radiation, Electrical and Electronic Engineering, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a9b9406d79aa5da1490a8bfd49f13c7b
https://doi.org/10.1088/0960-1317/21/6/065002

المؤلفون: Anu Krkkinen, Panu Pekko, James Dekker, Nadine Pesonen, Mika Suhonen, Aarne Oja, Jukka Kyynrinen, Heikki Sepp

المصدر: Microsystem Technologies; Dec2005, Vol. 12 Issue 1/2, p169-172, 4p

المؤلفون: Jaakko Saarilahti, Teuvo Sillanpää, Panu Pekko, Jyrki Kiihamäki

المصدر: VTT Technical Research Centre of Finland-PURE
Saarilahti, J, Sillanpää, T, Pekko, P & Kiihamäki, J 2004, Manufacturing and applications of surface-micromachined and SOI-based cMUTs . in 4th International Workshop on Micromachined Ultrasonic Trasducers (MUT-2004) : Florence, Italy, June 17-18, 2004 . ESAOTE .

مصطلحات موضوعية: transducer, ultrasonic, cMUT, micromachined, MUT

URL الوصول: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::ffe37c4e57438b3cb2a6bdab27f366ba
https://cris.vtt.fi/en/publications/adf1dd78-25d9-422f-a151-ad9bf8a57d33

المؤلفون: Teuvo Sillanpää, Panu Pekko, Aarne Oja, Mikko Heikkinen, Jyrki Kiihamäki, Jari Halme, Heikki Seppä

المصدر: VTT Technical Research Centre of Finland-PURE
Sillanpää, T, Pekko, P, Oja, A, Heikkinen, M, Kiihamäki, J, Halme, J & Seppä, H 2002, Micromechanical acoustic emission sensor . in Eurosensors XVI Book of Abstracts . vol. Part 1, Czech Technical University, pp. 205-206, 16th European Conference on Solid-State Transducers, Eurosensors XVI, Prague, Czech Republic, 15/09/02 .

مصطلحات موضوعية: LTCC package, vibration sensor, acoustic emission

URL الوصول: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::30d28fcbf27ed0349fd0c443aa54eef0
https://cris.vtt.fi/en/publications/a7862577-01bf-413a-8be9-6c310573c831