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1Report
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2Academic Journal
المؤلفون: Boubekeur, H., Mikolajick, T., Pamler, W., Ho¨pfner, J., Frey, L., Ryssel, H.
المصدر: Journal of Applied Physics; 9/15/2002, Vol. 92 Issue 6, p3257, 9p, 1 Black and White Photograph, 3 Diagrams, 10 Graphs
مصطلحات موضوعية: PLATINUM electrodes, FERROELECTRICITY, BACKSCATTERING
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3Academic Journal
المؤلفون: Pamler, W., Marinero, E. E.
المصدر: Journal of Applied Physics. 3/15/1987, Vol. 61 Issue 6, p2294. 7p. 4 Graphs.
مصطلحات موضوعية: *TELLURIUM, *THIN films
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4Academic Journal
المؤلفون: Wendt, H., Cerva, H., Lehmann, V., Pamler, W.
المصدر: Journal of Applied Physics; 3/15/1989, Vol. 65 Issue 6, p2402, 4p
مصطلحات موضوعية: METAL inclusions, COPPER, SILICON oxide, DIFFUSION
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5Academic Journal
المؤلفون: Kohlhase, A., Mändl, M., Pamler, W.
المصدر: Journal of Applied Physics; 3/15/1989, Vol. 65 Issue 6, p2464, 6p
مصطلحات موضوعية: TITANIUM nitride, FRACTURE mechanics, DIFFUSION
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6Conference
المؤلفون: Schloesser, T., Jakubowski, F., Kluge, J. v., Graham, A., Slesazeck, S., Popp, M., Baars, P., Muemmler, K., Moll, P., Wilson, K., Buerke, A., Koehler, D., Radecker, J., Erben, E., Zimmermann, U., Vorrath, T., Fischer, B., Aichmayr, G., Agaiby, R., Pamler, W., Schuster, T., Bergner, W., Mueller, W.
المصدر: 2008 IEEE International Electron Devices Meeting
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7Conference
المؤلفون: Stich, A., Gabric, Z., Pamler, W., Schindler, G., Traving, M., Engelhardt, M.
المصدر: 2006 International Interconnect Technology Conference ; volume 2005, page 134-136
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8Conference
المؤلفون: Guedj, C., Arnal, V., Girault, V., Imbert, G., Daamen, R., Hoofman, R.J.O.M., Gaillard, F., Gosset, L., Assous, M., Bouchu, D., Mitard, J., Toffoli, A., Jousseaume, V., Favennec, L., Stich, A., Pamler, W., Gabric, Z., Torres, J., Passemard, G., Arnaud, L.
المصدر: 2006 International Interconnect Technology Conference ; volume 45, page 207-209
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9Conference
المؤلفون: Seidel, R., Graham, A.P., Unger, E., Duesberg, G.S., Liebau, M., Steinhoegl, W., Pamler, W., Kreupl, F.
المصدر: 4th IEEE Conference on Nanotechnology, 2004. ; page 7-9
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10Conference
المؤلفون: Rosner, W., Landgraf, E., Kretz, I., Dreeskomfeld, L., Schafer, H., Stadele, M., Schulz, T., Hofmann, F., Luyken, R.J., Specht, M., Hartwich, J., Pamler, W., Risch, L.
المصدر: International Semiconductor Device Research Symposium, 2003 ; volume 763, page 452-453
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11Conference
المؤلفون: Gabric, Z., Pamler, W., Schindler, G., Steinhogl, W., Traving, M.
المصدر: Proceedings of the IEEE 2004 International Interconnect Technology Conference (IEEE Cat. No.04TH8729) ; page 151-153
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12Conference
المؤلفون: Joswig, H., Pamler, W.
المصدر: Seventh International IEEE Conference on VLSI Multilevel Interconnection ; page 477
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13Conference
المؤلفون: Pamler, W.
المصدر: 2001 6th International Symposium on Plasma- and Process-Induced Damage (IEEE Cat. No.01TH8538) ; page 94-99
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14Conference
المؤلفون: Boubekeur, H., Mikolajick, T., Höpfner, J., Dehm, C., Pamler, W., Steiner, J., Kilian, G., Kolbesen, B.O., Bauer, A., Frey, L., Ryssel, H.
Time: 670, 620, 530, 669
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15Conference
المؤلفون: Kilian, G., Kolbesen, B.O., Rommel, M., Pamler, W., Unger, E., Höpfner, A.
مصطلحات موضوعية: TXRF, Elymat, contamination, silicon
Time: 670, 620, 530
Relation: Satellite Symposium on Crystalline Defects and Contamination - Their Impact and Control in Device Manufacturing (DECON) 2001; European Solid-State Device Research Conference (ESSDERC) 2001; Crystalline defects and contamination. Their impact and control in device manufacturing III; https://publica.fraunhofer.de/handle/publica/339341
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16Conference
المؤلفون: Bollmann, D., Braun, R., Buchner, R., Cao-Minh, U., Engelhardt, M., Errmann, G., Grabl, T., Hieber, K., Hubner, H., Kawala, G., Kleiner, M., Klumpp, A., Kuhn, S., Landesberger, C., Lezec, H., Muth, W., Pamler, W., Popp, R., Renner, E., Ruhl, G., Sanger, A., Scheler, U., Schmidt, C., Schwarzl, S., Weber, J., Weber, W., Ramm, P.
المصدر: European Workshop Materials for Advanced Metallization, ; page 94-98
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17Conference
المؤلفون: Bertagnolli, E., Bollmann, D., Braun, R., Buchner, R., Engelhardt, M., Grassl, T., Hieber, K., Kawala, G., Kleiner, M., Klumpp, A., Kuhn, S., Landesberger, C., Pamler, W., Popp, R., Ramm, P., Renner, E., Ruhl, G., Scheler, U., Schmidt, C., Schwarzl, S., Weber, J., Sänger, A.
مصطلحات موضوعية: CMOS integrated circuits, integrated circuit design, integrated circuit interconnections, integrated circuit metallisation, integrated circuit packaging, integrated circuit reliability, wafer bonding
Relation: International Symposium on Semiconductor Wafer Bonding 1997; Fourth International Symposium on Semiconductor Wafer Bonding 1997. Proceedings. Science, technology, and applications; https://publica.fraunhofer.de/handle/publica/330659
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18Conference
المؤلفون: Engelhardt, M., Hübner, H., Jacobs, H., Kleiner, M., Kühn, S., Pamler, W., Renner, E., Sänger, A., Scheler, U., Schmidt, C., Schwarzl, S., Weber, W., Braun, R., Grassl, T., Hieber, K., Kawala, G., Klumpp, A., Landesberger, C., Popp, R., Ramm, P., Ruhl, G., Weber, J.
Relation: International Colloquium on Plasma Processes (CIP) 1997; CIP '97. 11th International Colloquium on Plasma Processes. Proceedings; https://publica.fraunhofer.de/handle/publica/329259
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19Conference
المؤلفون: Bollmann, D., Braun, R., Buchner, R., Cao-Minh, U., Engelhardt, M., Errmann, G., Grassl, T., Hieber, K., Hübner, H., Kawala, G., Kleiner, M., Klumpp, A., Kuhn, S., Landesberger, C., Lezec, H., Muth, W., Pamler, W., Popp, R., Renner, E., Ruhl, G., Scheler, U., Schmidt, C., Schwarzl, S., Weber, J., Weber, W., Ramm, P., Sänger, A.
مصطلحات موضوعية: integrated circuit interconnections, integrated circuit metallisation, thermal analysis, wafer bonding
Relation: European Workshop on Materials for Advanced Metallization (MAM) 1997; MAM '97. Abstracts booklet; https://publica.fraunhofer.de/handle/publica/329153
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20Academic Journal
المؤلفون: Weber, W.M., Geelhaar, Graham, A.P., L., Unger, E., Duesber, G.S., Liebau, M., Pamler, W., Cheze, C., Riechert, H., Lugli, P.
مصطلحات موضوعية: info:eu-repo/classification/ddc
Relation: https://mediatum.ub.tum.de/1237957