المؤلفون: Zaima, Kazunori, Tsuda, Hirotaka, Manabe, Yuta, Omura, Mitsuhiro

المساهمون: Altamirano-Sánchez, Efrain, Mohanty, Nihar

المصدر: Advanced Etch Technology and Process Integration for Nanopatterning XIII

الاتاحة: http://dx.doi.org/10.1117/12.3009747

المؤلفون: Oehrlein, Gottlieb, Brandstadter, Stephan, Bruce, Robert, Chang, Jane, Demott, Jessica, Donnelly, Vincent, Dussart, Rémi, Fischer, Andreas, Gottscho, Richard, Hamaguchi, Satoshi, Honda, Masanobu, Hori, Masaru, Ishikawa, Kenji, Jaloviar, Steven, Kanarik, Keren, Karahashi, Kazuhiro, Ko, Akiteru, Kothari, Hiten, Kuboi, Nobuyuki, Kushner, Mark, Lill, Thorsten, Luan, Pingshan, Mesbah, Ali, Miller, Eric, Nath, Shoubhanik, Ohya, Yoshinobu, Omura, Mitsuhiro, Park, Chanhoon, Poulose, John, Rauf, Shahid, Sekine, Makoto, Smith, Taylor, Stafford, Nathan, Standaert, Theo, Ventzek, Peter

المساهمون: Groupe de recherches sur l'énergétique des milieux ionisés (GREMI), Université d'Orléans (UO)-Centre National de la Recherche Scientifique (CNRS)

المصدر: ISSN: 2166-2746.

مصطلحات موضوعية: [PHYS]Physics [physics], [SPI]Engineering Sciences [physics]

الاتاحة: https://hal.science/hal-04824255
https://doi.org/10.1116/6.0003579

المؤلفون: Sasaki, Toshiyuki, Matsuda, Kazuhisa, Omura, Mitsuhiro, Sakai, Itsuko, Hayashi, Hisataka

المصدر: Japanese Journal of Applied Physics ; volume 54, issue 6S2, page 06GB03 ; ISSN 0021-4922 1347-4065

الاتاحة: http://dx.doi.org/10.7567/jjap.54.06gb03
http://stacks.iop.org/1347-4065/54/i=6S2/a=06GB03?key=crossref.8868ddc4595677c74c7cea363cbd5492
http://stacks.iop.org/1347-4065/54/i=6S2/a=06GB03/pdf