المؤلفون: Eugénie Martinez, O. Ceballos-Sanchez, O. Desplats, J. Guerrero, F. Martin, K. Yckache, Alberto Herrera-Gomez, H. Grampeix

المصدر: Chemical Physics Letters. :139-143

مصطلحات موضوعية: Semiconductor, Materials science, Annealing (metallurgy), business.industry, Interfacial oxide, Analytical chemistry, General Physics and Astronomy, Physical and Theoretical Chemistry, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::66a07462823d3b18ee7990d5b0833d50
https://doi.org/10.1016/j.cplett.2012.05.029

المؤلفون: C., Gourgon, A., Ferchichi, M., Panabière, E., Grinenval, O., Desplats, J.B., Brückner, Escoubas, Ludovic, N., Mikuszeit, B., Viala, C., Dubarry, A., Marty, G., Berginc

المساهمون: Laboratoire des technologies de la microélectronique (LTM), Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)

المصدر: Micro- and Nano-Engineering conference- MNE 2014 ; https://hal.science/hal-01376701 ; Micro- and Nano-Engineering conference- MNE 2014, 2014, Lausanne, Switzerland

مصطلحات موضوعية: [PHYS]Physics [physics]

جغرافية الموضوع: Lausanne, Switzerland

الاتاحة: https://hal.science/hal-01376701

المؤلفون: O. Desplats, Luc Bideux, Chantal Fontaine, Guillaume Monier, Bernard Gruzza, Christine Robert-Goumet

المساهمون: Institut Pascal (IP), SIGMA Clermont (SIGMA Clermont)-Université Clermont Auvergne [2017-2020] (UCA [2017-2020])-Centre National de la Recherche Scientifique (CNRS), Laboratoire des sciences et matériaux pour l'électronique et d'automatique (LASMEA), Université Blaise Pascal - Clermont-Ferrand 2 (UBP)-Centre National de la Recherche Scientifique (CNRS)

المصدر: Applied Surface Science
Applied Surface Science, Elsevier, 2009, 256 (1), pp.56-60. ⟨10.1016/j.apsusc.2009.07.060⟩
Applied Surface Science, 2009, 256 (1), pp.56-60. ⟨10.1016/j.apsusc.2009.07.060⟩

مصطلحات موضوعية: Plasma parameters, 020209 energy, Analytical chemistry, Oxide, General Physics and Astronomy, chemistry.chemical_element, 02 engineering and technology, Surfaces and Interfaces, General Chemistry, Plasma, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Oxygen, Ion source, Surfaces, Coatings and Films, chemistry.chemical_compound, chemistry, X-ray photoelectron spectroscopy, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], 0202 electrical engineering, electronic engineering, information engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Gallium, 0210 nano-technology, ComputingMilieux_MISCELLANEOUS, Microwave

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3797ccae5ff847a26161b5f241c72f5a
https://doi.org/10.1016/j.apsusc.2009.07.060

المؤلفون: C. Armand, Luc Bideux, Guy Lacoste, Laurent Jalabert, Chantal Fontaine, P. Gallo, Alexandre Arnoult, O. Desplats, Jean-Baptiste Doucet, F. Voillot, Guillaume Monier

المصدر: Applied Surface Science. 255:3897-3901

مصطلحات موضوعية: Auger electron spectroscopy, Materials science, Oxide, Analytical chemistry, General Physics and Astronomy, Surfaces and Interfaces, General Chemistry, Substrate (electronics), Condensed Matter Physics, Epitaxy, Ion source, Surfaces, Coatings and Films, Secondary ion mass spectrometry, chemistry.chemical_compound, chemistry, Molecular beam, Molecular beam epitaxy

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3f16b3c43c1568083076035c8099708e
https://doi.org/10.1016/j.apsusc.2008.09.062

المؤلفون: M. Panabière, O. Desplats, C. Gourgon, A K Ferchichi

المساهمون: Laboratoire des technologies de la microélectronique (LTM), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS), Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)

المصدر: Materials Research Express
Materials Research Express, IOP Publishing Ltd, 2014, pp.1 (2014) 025704. ⟨10.1088/2053-1591/1/2/025704⟩
Materials Research Express, 2014, pp.1 (2014) 025704. ⟨10.1088/2053-1591/1/2/025704⟩

مصطلحات موضوعية: [PHYS]Physics [physics], Plasma etching, Fabrication, Materials science, Polymers and Plastics, Metals and Alloys, Nanotechnology, Aspect ratio (image), Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Nanoimprint lithography, law.invention, Biomaterials, Contact angle, Hysteresis, law, Nanometre, Nanoscopic scale, ComputingMilieux_MISCELLANEOUS

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4f1bdd28eccf7741c1593be1c7025efa
https://hal.archives-ouvertes.fr/hal-01107572

المؤلفون: A. Olivier, M. P. Chauvat, Xavier Wallart, Gilles Dambrine, Pierre Ruterana, Yi Wang, N. Wichmann, Francois Danneville, Jiongjiong Mo, Y. Roelens, Sylvain Bollaert, A. Noudeviwa, O. Desplats, Jérôme Saint-Martin, Hassan Maher, F. Martin, Ming Shi, Ludovic Desplanque

المصدر: 2010 22nd International Conference on Indium Phosphide and Related Materials (IPRM).

مصطلحات موضوعية: 010302 applied physics, Fabrication, Materials science, Silicon, business.industry, Transconductance, chemistry.chemical_element, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Atomic layer deposition, chemistry.chemical_compound, Ion implantation, Silicon nitride, chemistry, Gate oxide, 0103 physical sciences, MOSFET, Optoelectronics, 0210 nano-technology, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::12799255359896ac919853b7f5a32f2c
https://doi.org/10.1109/iciprm.2010.5515926