-
1
-
2
-
3
-
4
-
5
-
6
-
7
-
8Conference
المؤلفون: Hamad, Alyssandrea H., Bae, Young C., Liu, Xiang-Qian, Ober, Christopher K., Houlihan, Francis M., Dabbagh, Gary, Novembre, Anthony E.
المساهمون: Fedynyshyn, Theodore H.
المصدر: SPIE Proceedings ; Advances in Resist Technology and Processing XIX ; ISSN 0277-786X
الاتاحة: http://dx.doi.org/10.1117/12.474245
-
9Conference
المؤلفون: Pettibone, Donald W., Bareket, Noah, Liang, Ted, Stivers, Alan R., Hector, Scott D., Mangat, Pawitter J. S., Resnick, Douglas J., Lercel, Michael J., Lawliss, Mark, Magg, Christopher, Novembre, Anthony E., Farrow, Reginald C.
المساهمون: Grenon, Brian J., Dao, Giang T.
المصدر: SPIE Proceedings ; 20th Annual BACUS Symposium on Photomask Technology ; ISSN 0277-786X
الاتاحة: http://dx.doi.org/10.1117/12.410699
-
10Conference
المؤلفون: Han, Sang-In, Mangat, Pawitter J. S., Dauksher, William J., Chor, Michael, Liddle, James A., Novembre, Anthony E.
المساهمون: Grenon, Brian J., Dao, Giang T.
المصدر: SPIE Proceedings ; 20th Annual BACUS Symposium on Photomask Technology ; ISSN 0277-786X
الاتاحة: http://dx.doi.org/10.1117/12.410751
-
11Conference
المؤلفون: Johnston, Ian R., Ashraf, Huma, Bhardwaj, Jy K., Hopkins, Janet, Hynes, Alan M., Nicholls, Glenn, McAuley, Serrita A., Hall, Stephen, Atabo, Lilian, Bogart, Gregory R., Kornblit, Avi, Novembre, Anthony E.
المساهمون: Dobisz, Elizabeth A.
المصدر: SPIE Proceedings ; Emerging Lithographic Technologies IV ; ISSN 0277-786X
الاتاحة: http://dx.doi.org/10.1117/12.390054
-
12Conference
المؤلفون: Ocola, Leonidas E., Blakey, Myrtle I., Orphanos, Paul A., Li, Wai-Yi, Novembre, Anthony E., Brainard, Robert L., Mackevich, Joseph F., Taylor, Gary N.
المساهمون: Dobisz, Elizabeth A.
المصدر: SPIE Proceedings ; Emerging Lithographic Technologies IV ; ISSN 0277-786X
الاتاحة: http://dx.doi.org/10.1117/12.390055
-
13Conference
المؤلفون: Sato, Mitsuru, Omori, Katsumi, Ishikawa, Kiyoshi, Nakayama, Toshimasa, Novembre, Anthony E., Ocola, Leonidas E.
المساهمون: Vladimirsky, Yuli
المصدر: SPIE Proceedings ; Emerging Lithographic Technologies III ; ISSN 0277-786X
الاتاحة: http://dx.doi.org/10.1117/12.351094
-
14Conference
المؤلفون: Liddle, James A., Blakey, Myrtle I., Gallatin, Gregg M., Knurek, Chester S., Mkrtchyan, Masis M., Novembre, Anthony E., Waskiewicz, Warren K.
المساهمون: Vladimirsky, Yuli
المصدر: SPIE Proceedings ; Emerging Lithographic Technologies III ; ISSN 0277-786X
الاتاحة: http://dx.doi.org/10.1117/12.351090
-
15Conference
المؤلفون: Engelstad, Roxann L., Lovell, Edward G., Dicks, Gerald A., Martin, Carl J., Schlax, Michael P., Semke, William H., Liddle, James A., Novembre, Anthony E.
المساهمون: Vladimirsky, Yuli
المصدر: SPIE Proceedings ; Emerging Lithographic Technologies III ; ISSN 0277-786X
الاتاحة: http://dx.doi.org/10.1117/12.351085
-
16Conference
المؤلفون: Taylor, Darren, Howard, William B., Kasica, Richard J., Farrow, Reginald C., Novembre, Anthony E., Caminos, Carlos, Knurek, Chester S.
المساهمون: Abboud, Frank E., Grenon, Brian J.
المصدر: SPIE Proceedings ; 19th Annual Symposium on Photomask Technology ; ISSN 0277-786X
الاتاحة: http://dx.doi.org/10.1117/12.373300
-
17Conference
المؤلفون: Newport, Chris L., Parker, Jeffrey, Smith, K. M., Benveniste, Albert, Kim, Nam-Wook, Reyland, David, Farrow, Reginald C., Novembre, Anthony E., Kasica, Richard J., Knurek, Chester S., Peabody, Jr., Milton L., Rutberg, Len
المساهمون: Vladimirsky, Yuli
المصدر: SPIE Proceedings ; Emerging Lithographic Technologies III ; ISSN 0277-786X
الاتاحة: http://dx.doi.org/10.1117/12.351088
-
18Conference
المؤلفون: Bogart, Gregory R., Novembre, Anthony E., Kornblit, Avi, Peabody, Jr., Milton L., Farrow, Reginald C., Blakey, Myrtle I., Kasica, Richard J., Liddle, James A., Saunders, Thomas E., Knurek, Chester S.
المصدر: 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 ; SPIE Proceedings ; ISSN 0277-786X
الاتاحة: http://dx.doi.org/10.1117/12.346223
-
19Conference
المؤلفون: Schlax, Michael P., Engelstad, Roxann L., Lovell, Edward G., Liddle, James A., Novembre, Anthony E.
المساهمون: Vladimirsky, Yuli
المصدر: SPIE Proceedings ; Emerging Lithographic Technologies III ; ISSN 0277-786X
الاتاحة: http://dx.doi.org/10.1117/12.351087
-
20Conference
المؤلفون: Spector, Steven J., Luo, Ping, Novembre, Anthony E., Ocola, Leonidas E., White, Donald L., Tennant, Donald M., Wood II, Obert R.
المساهمون: Vladimirsky, Yuli
المصدر: SPIE Proceedings ; Emerging Lithographic Technologies III ; ISSN 0277-786X
الاتاحة: http://dx.doi.org/10.1117/12.351134