المؤلفون: Odhiambo, Vincent Otieno, Le Ba, Thong, Kónya, Zoltán, Cserháti, Csaba, Erdélyi, Zoltán, Naomi, Maritim C., Szilágyi, Imre Miklós

مصطلحات موضوعية: Természettudományok, Fizikai tudományok

وصف الملف: application/pdf

Relation: Materials Science In Semiconductor Processing. -147 (2022), p. 1-8. -Mater. Sci. Semicond. Process. - 1369-8001; http://dx.doi.org/10.1016/j.mssp.2022.106699; https://ebib.lib.unideb.hu/ebib/CorvinaWeb?action=cclfind&resultview=long&ccltext=idno+BIBFORM101706; 85129445655; http://hdl.handle.net/2437/332153; https://linkinghub.elsevier.com/retrieve/pii/S1369800122002414; 000798560500001

الاتاحة: http://hdl.handle.net/2437/332153
https://doi.org/10.1016/j.mssp.2022.106699
https://ebib.lib.unideb.hu/ebib/CorvinaWeb?action=cclfind&resultview=long&ccltext=idno+BIBFORM101706
https://linkinghub.elsevier.com/retrieve/pii/S1369800122002414