المؤلفون: Masahumi MIZUKAMI, Mitsuaki HARADA, Shigeyuki IMURA, Takehi SANO, 佐野 岳, 原田 光明, 居村 茂幸, 水上 昌文

المصدر: 理学療法科学 / Rigakuryoho Kagaku. 2009, 24(4):609

المؤلفون: Hideaki Kurita, Masafumi Mizukami, Mitsuaki Harada, Osamu Nitta

المصدر: Journal of Physical Therapy Science. 2010, 22(2):209

المؤلفون: Masatoshi OHKOSHI, Mitsuaki HARADA, Shigeo HONDA, Takashi TOKUNAGA, Tetsuzou KUSUDA, 原田 光昭, 大越 正敏, 徳永 隆志, 本多 茂男, 楠田 哲三

المصدر: テレビジョン学会技術報告 / ITE Technical Report. 1985, 9(25):31

المؤلفون: Masatoshi OHKOSHI, Mitsuaki HARADA, Shigeki OHBAYASHI, Shigeo HONDA, Tetsuzo KUSUDA

المصدر: Shinku. 1986, 29(4):206

المؤلفون: Hisaki Izutani, Yuji Takahashi, Mitsuaki Harada

المصدر: Extended Abstracts - 2008 8th International Workshop on Junction Technology (IWJT '08) ; page 29-31

الاتاحة: http://dx.doi.org/10.1109/iwjt.2008.4540011
http://xplorestaging.ieee.org/ielx5/4531469/4539996/04540011.pdf?arnumber=4540011

المؤلفون: I. Shin, Atsumasa Doi, Mitsuaki Harada, Jiro Matsuo, M. Akizuki, Isao Yamada, Satoru Ogasawara

المصدر: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 121:166-169

مصطلحات موضوعية: Nuclear and High Energy Physics, Materials science, Analytical chemistry, Nanotechnology, Evaporation (deposition), Acceleration voltage, Ion, law.invention, law, Surface roughness, Irradiation, Crystallite, Crystallization, Instrumentation, Lead oxide

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::433cc218b2ebca1dc6b0c2013181325f
https://doi.org/10.1016/s0168-583x(96)00380-1

المؤلفون: Satoru Ogasawara, Mitsuaki Harada, M. Akizuki, Jiro Matsuo, Isao Yamada, Atsumasa Doi

المصدر: Materials Science and Engineering: A. :78-81

مصطلحات موضوعية: Materials science, Mechanical Engineering, Inorganic chemistry, Nozzle, Analytical chemistry, Mixing (process engineering), Ion current, Condensed Matter Physics, Ion, Mechanics of Materials, Cluster (physics), General Materials Science, Gas cooling, Current (fluid), Thin oxide

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d8e28ea55dbadbb548a838ae3ff24f0d
https://doi.org/10.1016/s0921-5093(96)10299-9

المؤلفون: Gikan H. Takaoka, Mitsuaki Harada, Tetsuro Yamaguchi, Jiro Matsuo, C.E. Ascheron, Atsumasa Doi, Y. Miyai, M. Akizuki, I. Yamada

المصدر: Surface Review and Letters. :891-895

مصطلحات موضوعية: Materials science, Si substrate, Low dose, Materials Chemistry, Cluster (physics), Surfaces and Interfaces, Irradiation, Atomic physics, Composite material, Condensed Matter Physics, Layer (electronics), Surfaces, Coatings and Films, Ion

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::454869886e9f8659f13e9ea9f9756f37
https://doi.org/10.1142/s0218625x96001601

المؤلفون: Gikan H. Takaoka, K. Yoneda, Mitsuaki Harada, Satoru Ogasawara, Isao Yamada, Takashi Yamaguchi, C.E. Ascheron, Jiro Matsuo, Atsumasa Doi, M. Akizuki

المصدر: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 99:229-232

مصطلحات موضوعية: Nuclear and High Energy Physics, Range (particle radiation), chemistry.chemical_compound, Monomer, chemistry, Impurity, Transition layer, Analytical chemistry, Cluster (physics), Irradiation, Surface processing, Instrumentation, Ion

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8714440d7e0fe98d26f38c9b1d3b0b00
https://doi.org/10.1016/0168-583x(94)00658-x

المؤلفون: Shigeo Suzuki, Motonobu Futagami, Kazuhiro Kaneda, Toshihiko Tanaka, Junichi Nishino, Shuji Fujiwara, Koichi Okada, Yoshikazu Yamaoka, Mitsuaki Harada, Mitsuaki Morigami, Takeo Watanabe

المصدر: Microelectronic Engineering. 20:277-289

مصطلحات موضوعية: Physics, business.industry, Proximity effect (electron beam lithography), Synchrotron radiation, Condensed Matter Physics, Focused ion beam, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Optics, Resist, Distortion, X-ray lithography, Electrical and Electronic Engineering, business, Lithography, Fresnel diffraction

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d7dabb01cb4afa3101c85994fe03f704
https://doi.org/10.1016/0167-9317(93)90006-q

المؤلفون: M. Futagami, Mitsuaki Morigami, Mitsuaki Harada, Yoshikazu Yamaoka, Koichi Okada, Kazuhiro Kaneda, Junichi Nishino, Shuji Fujiwara, Toshihiko Tanaka, Shigeo Suzuki

المصدر: Microelectronic Engineering. 21:71-74

مصطلحات موضوعية: Materials science, business.industry, Proximity effect (electron beam lithography), Rounding, Linearity, Synchrotron radiation, Condensed Matter Physics, Focused ion beam, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Optics, Distortion, Electrical and Electronic Engineering, business, Lithography, Fresnel diffraction

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::331e5e4810c09ada32843fd6abd2e7f4
https://doi.org/10.1016/0167-9317(93)90029-5

المؤلفون: Tatsuro Gueshi, Yoshifumi Matsushita, Shigeharu Matsushita, Mitsuaki Harada

المصدر: Applied Physics Letters. 77:3200-3202

مصطلحات موضوعية: Materials science, Physics and Astronomy (miscellaneous), business.industry, Annealing (metallurgy), Sputter deposition, engineering.material, Ferroelectricity, law.invention, Capacitor, Polycrystalline silicon, Carbon film, law, engineering, Optoelectronics, Oxygen diffusion, Barrier effect, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::68a86701d05ac96d5f6c100afb0d3444
https://doi.org/10.1063/1.1326480

المؤلفون: M. Akizuki, Isao Yamada, Mitsuaki Harada, Jiro Matsuo, Satoru Ogasawara, Atsumasa Doi

المصدر: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 112:83-85

مصطلحات موضوعية: Nuclear and High Energy Physics, Range (particle radiation), chemistry, Gas cluster ion beam, Cluster (physics), Analytical chemistry, chemistry.chemical_element, Molecule, Irradiation, Instrumentation, Carbon, Voltage, Ion

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ecfd707bbbfffd83ab6cf692c6aea07d
https://doi.org/10.1016/0168-583x(95)01235-4

المؤلفون: Atsumasa Doi, Mitsuaki Harada, Satoru Ogasawara, M. Akizuki, Jiro Matsuo, Isao Yamada

المصدر: Extended Abstracts of the 1995 International Conference on Solid State Devices and Materials.

مصطلحات موضوعية: Materials science, Cluster (physics), Atomic physics, Ion

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::cbeb44824770db715d4b26442b8d7be4
https://doi.org/10.7567/ssdm.1995.s-i-2-3

المؤلفون: Yoshikazu Yamaoka, Yoshio Yamashita, Junichi Nishino, Shigeo Suzuki, Shuji Fujiwara, Mitsuaki Morigami, M. Inai, Mitsuaki Harada, R. Yuasa, Toyoshige Tanaka, Takeo Watanabe

المصدر: Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III.

مصطلحات موضوعية: Pattern size, Optics, Materials science, Resist, business.industry, Synchrotron radiation, business, Lithography, Electron-beam lithography, Fresnel diffraction

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::83a125584ecdc8a2455d131de66bb9b2
https://doi.org/10.1117/12.146511

المؤلفون: R. Yuasa, Toyoshige Tanaka, M. Inai, Shigeo Suzuki, Mitsuaki Morigami, Mitsuaki Harada, Yoshikazu Yamaoka, Junichi Nishino, Shuji Fujiwara, Takeo Watanabe, Yoshio Yamashita

المصدر: Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III.

مصطلحات موضوعية: Materials science, business.industry, Ion beam lithography, Focused ion beam, law.invention, Optics, Resist, law, Stencil lithography, X-ray lithography, Photolithography, business, Maskless lithography, Next-generation lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2b1a57825b9bb5aa570fbe81bdb6352e
https://doi.org/10.1117/12.146535

المؤلفون: Jiro Matsuo, Mitsuaki Harada, M. Akizuki, Isao Yamada, Satoru Ogasawara, Atsumasa Doi

المصدر: Japanese Journal of Applied Physics. 35:1450

مصطلحات موضوعية: X-ray photoelectron spectroscopy, Ion beam, Silicon, Annealing (metallurgy), Gate oxide, Chemistry, General Engineering, Analytical chemistry, General Physics and Astronomy, chemistry.chemical_element, Irradiation, Thin film, Ion

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4b7ec4628f534e2e0a8d46ad568201b3
https://doi.org/10.1143/jjap.35.1450

المؤلفون: Jun-ichi Chikawa, Junichi Nishino, Kenichiro Tanaka, Shingo Terakado, Mitsuaki Morigami, Shigeo Suzuki, Mitsuaki Harada

المصدر: Japanese Journal of Applied Physics. 29:L709

مصطلحات موضوعية: Chemistry, fungi, technology, industry, and agriculture, General Engineering, Bremsstrahlung, General Physics and Astronomy, Synchrotron radiation, macromolecular substances, Substrate (electronics), Photochemistry, Isotropic etching, Gallium arsenide, chemistry.chemical_compound, stomatognathic system, Etching (microfabrication), Irradiation, Reactive-ion etching

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::7000941536814ed92a90f1f2f0a2bd03
https://doi.org/10.1143/jjap.29.l709

المؤلفون: M. Morigami, R. Shimizu, Kazuhiro Kaneda, S. Terakado, Mitsuaki Harada, M. Ando, H. Maezawa, Junichi Nishino, Shuji Fujiwara, Shigeo Suzuki, S. Kobayashi, T. Goto

المصدر: Review of Scientific Instruments. 60:2153-2156

مصطلحات موضوعية: Physics, Beamwidth, Wavelength, Photon, Optics, Resist, business.industry, Bragg's law, Synchrotron radiation, Undulator, Radiation, business, Instrumentation

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9419b948ab3fc5ca724bdd4f599b117c
https://doi.org/10.1063/1.1140806