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1Academic Journal
المؤلفون: Kyynäräinen, J. M., Oja, A. S., Seppä, H.
المصدر: Kyynäräinen , J M , Oja , A S & Seppä , H 2001 , ' Increasing the dynamic range of a micromechanical moving-plate capacitor ' , Analog Integrated Circuits and Signal Processing , vol. 29 , no. 1-2 , pp. 61-70 . https://doi.org/10.1023/A:1011230330035
مصطلحات موضوعية: Electrostatic actuation, Micromechanical capacitor