المؤلفون: Michael S. Yeung, Eytan Barouch

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Physics, business.industry, Extreme ultraviolet lithography, law.invention, Optics, law, Logic gate, Multiple patterning, Optoelectronics, X-ray lithography, Photolithography, business, Waveguide, Immersion lithography, Next-generation lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b9765bbe9b588c84bae4f64db3f79c87
https://doi.org/10.1117/12.2087322

المؤلفون: Michael S. Yeung

المصدر: Microwave and Optical Technology Letters. 32:383-388

مصطلحات موضوعية: Diffraction, Optics, Materials science, business.industry, Dielectric, Electrical and Electronic Engineering, Grating, Condensed Matter Physics, business, Integral equation, Atomic and Molecular Physics, and Optics, Microwave, Electronic, Optical and Magnetic Materials

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6d0d806dbae28c1fa7f17698c11c4eab
https://doi.org/10.1002/mop.10185

المؤلفون: Eytan Barouch, Hye-Keun Oh, Michael S. Yeung

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Optics, Materials science, business.industry, Extreme ultraviolet lithography, Pellicle membrane, Optoelectronics, Wafer, business, Electromagnetic simulation, Aerial image

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e833742b65bfc26c02800c208a6ae478
https://doi.org/10.1117/12.2045618

المؤلفون: Michael S. Yeung

المصدر: IEEE Transactions on Semiconductor Manufacturing. 13:24-33

مصطلحات موضوعية: Wavefront, Materials science, business.industry, Semiconductor device fabrication, Photoresist, Grating, Condensed Matter Physics, Industrial and Manufacturing Engineering, Electronic, Optical and Magnetic Materials, law.invention, Lens (optics), Optics, law, Electrical and Electronic Engineering, Focus (optics), business, Lithography, Optical aberration

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::7d823c594753712bb4d8b55bb13199ab
https://doi.org/10.1109/66.827337

المؤلفون: Michael S. Yeung

المصدر: Journal of Scientific Computing. 15:1-17

مصطلحات موضوعية: Numerical Analysis, Partial differential equation, Inverse scattering transform, Applied Mathematics, Mathematical analysis, General Engineering, Line integral, Electric-field integral equation, Summation equation, Integral equation, Theoretical Computer Science, Volume integral, Computational Mathematics, Computational Theory and Mathematics, Nyström method, Software, Mathematics

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::f4762fdb7355d1936e17536d6611e117
https://doi.org/10.1023/a:1007575417396

المؤلفون: Michael S. Yeung

المصدر: Microwave and Optical Technology Letters. 23:238-242

مصطلحات موضوعية: Physics, Acoustics, Finite-difference time-domain method, Electrical and Electronic Engineering, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::526c30236b8510c6b63105aaa7d2c499
https://doi.org/10.1002/(sici)1098-2760(19991120)23:4<238::aid-mop15>3.0.co;2-0

المؤلفون: Michael S. Yeung

المصدر: Journal of Scientific Computing. 14:121-145

مصطلحات موضوعية: Numerical Analysis, Applied Mathematics, Computation, Mathematical analysis, General Engineering, Finite difference method, Finite-difference time-domain method, Physics::Optics, Electromagnetic radiation, Theoretical Computer Science, Computational Mathematics, symbols.namesake, Computational Theory and Mathematics, Maxwell's equations, Surface wave, Dispersion relation, symbols, Waveform, Software, Mathematics

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a284443d1fb00bebcebff97fc557cf06
https://doi.org/10.1023/a:1023278902960

المؤلفون: Michael S. Yeung

المصدر: IEEE Transactions on Antennas and Propagation. 47:1615-1622

مصطلحات موضوعية: Physics, Classical mechanics, Scattering, Iterative method, Mathematical analysis, Dielectric, Electrical and Electronic Engineering, Method of moments (statistics), Electric-field integral equation, Summation equation, Electric current, Integral equation

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9da864554de40377ed668d91cf70f832
https://doi.org/10.1109/8.805907

المؤلفون: T. K. Gustafson, Michael S. Yeung

المصدر: Physical Review A. 54:5227-5242

مصطلحات موضوعية: Physics, Yield (engineering), Exact solutions in general relativity, Excited state, Coulomb, Classical electromagnetism, Spontaneous emission, Stimulated emission, Atomic physics, Dispersion (water waves), Atomic and Molecular Physics, and Optics

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8422e80e8fe715039d0f707600344254
https://doi.org/10.1103/physreva.54.5227

المؤلفون: Michael S. Yeung

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Physics, Optics, business.industry, Extreme ultraviolet, Extreme ultraviolet lithography, Computer data storage, Finite-difference time-domain method, Time domain, business, Grid, Simulation

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::5568928a7dabae2790c4362ef666c00f
https://doi.org/10.1117/12.916471

المؤلفون: Michael S. Yeung

المصدر: Photomask Technology 2008.

مصطلحات موضوعية: business.industry, Computer science, Numerical analysis, Computer data storage, Electronic engineering, Finite-difference time-domain method, Time marching, business, Lithography, Order of magnitude, Finite difference time domain analysis, Computational science

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::13159f252b2c73f2ef32538750ff734d
https://doi.org/10.1117/12.801351

المؤلفون: Theodore M. Bloomstein, Michael Switkes, Michael S. Yeung, Roderick R. Kunz, Jeffrey W. Ruberti, Mordechai Rothschild, Timothy A. Shedd

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Materials science, Scattering, business.industry, Bubble, Laser, Molecular physics, law.invention, Physics::Fluid Dynamics, symbols.namesake, Outgassing, Optics, Resist, law, symbols, Rayleigh scattering, business, Raman scattering, Immersion lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::bc419cc4bdd6d58a3d1f9f637cef70c8
https://doi.org/10.1117/12.534194

المؤلفون: Michael S. Yeung

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Diffraction, Wavelet, Numerical analysis, Convergence (routing), Electronic engineering, Finite-difference time-domain method, Physics::Optics, Time domain, Minimum resolvable temperature difference, Algorithm, Order of magnitude, Mathematics

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::42075e4995defccc0d377d276a6e1f94
https://doi.org/10.1117/12.485433

المؤلفون: Eytan Barouch, Michael S. Yeung, Michael Switkes, Daniel C. Cole, So-Yeon Baek, Mordechai Rothschild

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Materials science, business.industry, Mechanical Engineering, Extreme ultraviolet lithography, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, law.invention, Numerical aperture, Optics, law, Phase-shift mask, Process window, X-ray lithography, Electrical and Electronic Engineering, Photolithography, business, Refractive index, Lithography, Next-generation lithography, Immersion lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::80a00cf83d4b04099d1156b65193b951
https://doi.org/10.1117/12.504600

المؤلفون: Michael S. Yeung, D.D. Rathman, Steven J. Spector, Roderick R. Kunz

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Engineering, Scanner, Aperture, business.industry, Detector, Photodiode, law.invention, Lens (optics), Cardinal point, Optics, law, business, Image resolution, Aerial image

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::7d18674d5837908f28bffd6e6ecccd12
https://doi.org/10.1117/12.485414

المؤلفون: Michael S. Yeung, Eytan Barouch

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Diffraction, Optics, Field (physics), business.industry, Electromagnetism, Electronic engineering, Profile analysis, Static random-access memory, business, Polarization (waves), Integral equation, Metrology, Mathematics

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8a9f3098205cf4f8b03a46e229e8d6e7
https://doi.org/10.1117/12.436773

المؤلفون: Eytan Barouch, Clifford A. Martin, Michael S. Yeung, James A. McClay

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Materials science, Optics, business.industry, Scattering, Computation, Reflection (physics), Finite-difference time-domain method, Physics::Optics, Dissipation, Photomask, business, Lithography, Aerial image

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::beb7022737028963a5c3bbbb8557122b
https://doi.org/10.1117/12.389063

المؤلفون: Eytan Barouch, Michael S. Yeung

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Optics, Materials science, Mesh spacing, business.industry, Finite-difference time-domain method, Dielectric, Plasma, Lossy compression, business, 3D modeling, Lithography, Refractive index

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::789625e83d5162c6f93e6f68c15eacd2
https://doi.org/10.1117/12.354316

المؤلفون: Steven A. Orszag, Steven L. Knodle, Eytan Barouch, Michael S. Yeung

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Engineering, business.industry, Condenser (optics), ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION, Filter (signal processing), Geometric shape, Wavelength, Optics, Feature (computer vision), Reticle, Computer vision, Artificial intelligence, business, Projection (set theory), Aerial image

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3647b4b1d647bb9fa6004c39525afcca
https://doi.org/10.1117/12.354386

المؤلفون: Michael S. Yeung, Eytan Barouch

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Diffraction, Transmission (telecommunications), Scattering, Relation between Schrödinger's equation and the path integral formulation of quantum mechanics, Mathematical analysis, Geometry, Boundary value problem, Dielectric, Photomask, Integral equation, Mathematics

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b67130d8a347827711029e274702c6bc
https://doi.org/10.1117/12.310803